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1. 发明授权

US08505928B2 Substrate temperature control fixing apparatus 有权
标题翻译：基板温度控制定影装置
公开(公告)号：US08505928B2
公开(公告)日：2013-08-13
申请号：US12643472
申请日：2009-12-21
申请人： Miki Saito , Tadayoshi Yoshikawa , Koki Tamagawa
发明人： Miki Saito , Tadayoshi Yoshikawa , Koki Tamagawa
IPC分类号： B23B31/28
CPC分类号： H01L21/67103 , H01L21/67109 , H01L21/6831 , Y10T279/23
摘要： A substrate temperature control fixing apparatus comprises an electrostatic chuck which includes a base body and adsorbs and holds an adsorbing target mounted on one of surfaces of the base body, a base plate which supports the electrostatic chuck, and a bank portion provided on an outer periphery of one of surfaces of the base plate which is opposed to the other of the surfaces of the base body.
摘要翻译：基板温度控制定影装置包括：静电卡盘，其包括基体并吸附并保持安装在基体的一个表面上的吸附靶，支撑静电卡盘的基板和设置在外周上的堤部与基体的另一个表面相对的基板的一个表面。

2. 发明授权

US08441772B2 Substrate for electrostatic chuck and electrostatic chuck 有权
标题翻译：静电吸盘和静电吸盘用基板
公开(公告)号：US08441772B2
公开(公告)日：2013-05-14
申请号：US12910493
申请日：2010-10-22
申请人： Tadayoshi Yoshikawa , Koki Tamagawa , Naoto Watanabe
发明人： Tadayoshi Yoshikawa , Koki Tamagawa , Naoto Watanabe
IPC分类号： H01L21/683 , H01T23/00 , H01G7/02 , H05F3/00 , G03G15/02
CPC分类号： H01L21/6833
摘要： An electrostatic chuck includes a metal base member and an insulating substrate having an opposite surface to an attraction surface joined onto the base member via an adhesive layer. In the substrate, an electrode layer to which a direct current voltage for attraction is applied is embedded in a portion of the substrate, close to the attraction surface. In addition, a plurality of independent RF electrode layers to which different radio frequencies for plasma control are fed, respectively, are embedded in portions of the substrate, at an opposite side of the first electrode layer to the attraction surface. The RF electrode layers are arranged separately in different layers which are not on an identical plane in such a manner as to partially overlap each other in a plan view.
摘要翻译：静电卡盘包括金属基部件和绝缘基板，该绝缘基板具有通过粘合剂层接合到基底构件上的吸引表面的相反表面。在基板中，施加有用于吸引的直流电压的电极层嵌入基板的靠近吸引面的部分。此外，在第一电极层的与吸引表面相对的一侧的基板的部分分别嵌入多个用于等离子体控制的不同射频的独立RF电极层。 RF电极层分别布置在不在同一平面上的不同层中，以在平面图中彼此部分重叠的方式。

3. 发明申请

US20090168292A1 ELECTROSTATIC CHUCK AND SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE 审中-公开
标题翻译：静电切割和基板温度调节固定装置
公开(公告)号：US20090168292A1
公开(公告)日：2009-07-02
申请号：US12334961
申请日：2008-12-15
申请人： Naoto Watanabe , Tadayoshi Yoshikawa
发明人： Naoto Watanabe , Tadayoshi Yoshikawa
IPC分类号： H01L21/683
CPC分类号： H01L21/6831
摘要： There is provided an electrostatic chuck for adsorbing and holding an adsorption object placed on an upper surface of a base body having an electrostatic electrode embedded therein and for filling inert gas of which a pressure is adjusted into a space formed between the upper surface of the base body and a lower surface of the adsorption object, wherein the base body includes a gas discharge portion embedded therein so as to discharge the inert gas to the space and a gas path embedded therein so as to introduce the inert gas into the gas discharge portion while communicating with the gas discharge portion.
摘要翻译：提供了一种用于吸附和保持放置在其中具有静电电极的基体的上表面上的吸附物体的静电吸盘，并且将用于调节压力的惰性气体填充到形成在基体的上表面之间的空间中主体和下表面，其中，所述基体包括嵌入其中的气体排出部分，以将惰性气体排出到所述空间和嵌入其中的气体通道，以将惰性气体引入气体排出部分，同时与气体排出部分连通。

4. 发明授权

US08686743B2 Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus 有权
标题翻译：基板，基板保持装置，分析装置，程序，检测系统，半导体装置，显示装置和半导体制造装置
公开(公告)号：US08686743B2
公开(公告)日：2014-04-01
申请号：US12592219
申请日：2009-11-19
申请人： Yuji Furumura , Naomi Mura , Koki Tamagawa , Tadayoshi Yoshikawa , Hiroshi Yonekura
发明人： Yuji Furumura , Naomi Mura , Koki Tamagawa , Tadayoshi Yoshikawa , Hiroshi Yonekura
IPC分类号： G01R27/28
CPC分类号： H01L21/67248 , G01K7/32 , G01K11/265 , H01J37/32935
摘要： A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate (e.g., the temperature of the substrate or the amount of charge stored in the substrate) flows through the coil.
摘要翻译：一种包括传感器单元的基板，其中传感器单元包括至少一次布置在传感器表面上或嵌入在其表面内和附近的线圈。通过这种布置，对应于相对于基板的信息（例如，基板的温度或存储在基板中的电荷量）的电流流过线圈。

5. 发明申请

US20090059461A1 ELECTROSTATIC CHUCK 审中-公开
标题翻译：静电卡
公开(公告)号：US20090059461A1
公开(公告)日：2009-03-05
申请号：US12171458
申请日：2008-07-11
申请人： Hiroshi Yonekura , Tadayoshi Yoshikawa
发明人： Hiroshi Yonekura , Tadayoshi Yoshikawa
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , H01L21/67103 , H02N13/00
摘要： An electrostatic chuck of the invention includes a base portion; a heat insulating layer bonded onto the base portion; and a chuck function portion bonded on the heat insulating layer and composed by providing a heater electrode and an electrostatic chuck (ESC) electrode in a ceramic substrate portion. Adhesive layers are respectively provided on the both surface sides of the heat insulating layer. In the case where the base portion and the chuck function portion are bonded together with high adhesion strength, openings are formed in the heat insulating layer and are filled with the adhesive layers.
摘要翻译：本发明的静电吸盘包括基部; 粘合到基部上的绝热层; 以及卡盘功能部分，其结合在所述绝热层上，并且通过在陶瓷基板部分中设置加热电极和静电卡盘（ESC）电极而构成。粘合层分别设置在隔热层的两个表面侧。在基部和卡盘功能部分以高粘合强度粘合在一起的情况下，在绝热层中形成开口并填充有粘合剂层。

6. 发明申请

US20100156055A1 SUBSTRATE TEMPERATURE CONTROL FIXING APPARATUS 有权
标题翻译：基板温度控制固定装置
公开(公告)号：US20100156055A1
公开(公告)日：2010-06-24
申请号：US12643472
申请日：2009-12-21
申请人： Miki Saito , Tadayoshi Yoshikawa , Koki Tamagawa
发明人： Miki Saito , Tadayoshi Yoshikawa , Koki Tamagawa
IPC分类号： B23B31/28
CPC分类号： H01L21/67103 , H01L21/67109 , H01L21/6831 , Y10T279/23
摘要： A substrate temperature control fixing apparatus comprises an electrostatic chuck which includes a base body and adsorbs and holds an adsorbing target mounted on one of surfaces of the base body, a base plate which supports the electrostatic chuck, and a bank portion provided on an outer periphery of one of surfaces of the base plate which is opposed to the other of the surfaces of the base body.
摘要翻译：基板温度控制定影装置包括：静电卡盘，其包括基体并吸附并保持安装在基体的一个表面上的吸附靶，支撑静电卡盘的基板和设置在外周上的堤部与基体的另一个表面相对的基板的一个表面。

7. 发明申请

US20100134122A1 Substrate, substrate holding apparatus, analysis apparatus, program, detection system, semiconductor device, display apparatus, and semiconductor manufacturing apparatus 有权
标题翻译：基板，基板保持装置，分析装置，程序，检测系统，半导体装置，显示装置和半导体制造装置
公开(公告)号：US20100134122A1
公开(公告)日：2010-06-03
申请号：US12592219
申请日：2009-11-19
申请人： Yuji Furumura , Naomi Mura , Koki Tamagawa , Tadayoshi Yoshikawa , Hiroshi Yonekura
发明人： Yuji Furumura , Naomi Mura , Koki Tamagawa , Tadayoshi Yoshikawa , Hiroshi Yonekura
IPC分类号： G01R27/28 , G01K7/00 , H02N2/00 , B05C13/00 , C23F1/08 , H01L29/66 , H01L29/82
CPC分类号： H01L21/67248 , G01K7/32 , G01K11/265 , H01J37/32935
摘要： A substrate including a sensor unit, wherein the sensor unit includes a coil wound at least once arranged on the surface of the sensor or embedded within and near the surface thereof. With such an arrangement, an electric current that corresponds to information with respect to the substrate flows through the coil.
摘要翻译：一种包括传感器单元的基板，其中传感器单元包括至少一次布置在传感器表面上或嵌入在其表面内和附近的线圈。通过这种布置，对应于相对于衬底的信息的电流流过线圈。

8. 发明申请

US20110096461A1 SUBSTRATE FOR ELECTROSTATIC CHUCK AND ELECTROSTATIC CHUCK 有权
标题翻译：静电卡盘和静电卡盘基座
公开(公告)号：US20110096461A1
公开(公告)日：2011-04-28
申请号：US12910493
申请日：2010-10-22
申请人： Tadayoshi YOSHIKAWA , Koki Tamagawa , Naoto Watanabe
发明人： Tadayoshi YOSHIKAWA , Koki Tamagawa , Naoto Watanabe
IPC分类号： H01L21/683
CPC分类号： H01L21/6833
摘要： An electrostatic chuck includes a metal base member and an insulating substrate having an opposite surface to an attraction surface joined onto the base member via an adhesive layer. In the substrate, an electrode layer to which a direct current voltage for attraction is applied is embedded in a portion of the substrate, close to the attraction surface. In addition, a plurality of independent RF electrode layers to which different radio frequencies for plasma control are fed, respectively, are embedded in portions of the substrate, at an opposite side of the first electrode layer to the attraction surface. The RF electrode layers are arranged separately in different layers which are not on an identical plane in such a manner as to partially overlap each other in a plan view.
摘要翻译：静电卡盘包括金属基部件和绝缘基板，该绝缘基板具有通过粘合剂层接合到基底构件上的吸引表面的相反表面。在基板中，施加有用于吸引的直流电压的电极层嵌入基板的靠近吸引面的部分。此外，在第一电极层的与吸引表面相对的一侧的基板的部分分别嵌入多个用于等离子体控制的不同射频的独立RF电极层。 RF电极层分别布置在不在同一平面上的不同层中，以在平面图中彼此部分重叠的方式。

9. 发明授权

US4230762A Asphalt water-proofing material 失效
标题翻译：沥青防水材料
公开(公告)号：US4230762A
公开(公告)日：1980-10-28
申请号：US59326
申请日：1979-07-20
申请人： Hajime Iwasaki , Kuninori Mizuta , Yoshinori Kobayashi , Tadayoshi Yoshikawa , Kyouzi Muraoka
发明人： Hajime Iwasaki , Kuninori Mizuta , Yoshinori Kobayashi , Tadayoshi Yoshikawa , Kyouzi Muraoka
IPC分类号： B32B5/26 , B32B11/02 , B32B11/10 , C09K3/18 , D04H13/00 , D06M15/17 , D06N5/00 , E04D5/02 , B32B5/06
CPC分类号： D06N5/00 , B32B5/022 , B32B5/024 , B32B5/026 , B32B5/06 , B32B5/22 , B32B5/26 , D04H3/105 , D04H3/14 , D06M15/17 , B32B2260/023 , B32B2260/042 , B32B2262/02 , B32B2307/308 , B32B2307/50 , B32B2307/7265 , B32B2419/00 , B32B2419/06 , B32B2607/00 , Y10T428/31815 , Y10T442/159 , Y10T442/3764
摘要： An asphalt water-proofing material comprising a core impregnated with petroleum asphalt. The core is made of composite material including a non-woven fabric layer formed of long filaments of synthetic resin arranged in random fashion and a woven or knitted fabric layer. The non-woven fabric and woven or knitted fabric layers are connected together by needle-punching whereby the long filaments of the non-woven fabric layer are forced into the woven or knitted fabric layer to integrally connect these layers to form said core.
摘要翻译：沥青防水材料，包括浸渍有石油沥青的核心。芯由复合材料制成，包括由随机形成的合成树脂的长丝和机织或针织织物层形成的无纺织物层。通过针刺将无纺布和织造织物层连接在一起，由此使无纺布层的长丝被强制进入机织或针织织物层，以一体地连接这些层以形成所述芯。

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