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1. 发明授权

US07011979B2 Detecting pinholes in vertical cavity surface-emitting laser passivation 失效
标题翻译：在垂直腔表面发射激光钝化中检测针孔
公开(公告)号：US07011979B2
公开(公告)日：2006-03-14
申请号：US10387621
申请日：2003-03-12
申请人： Gregory N. DeBrabander , Robert W. Herrick , Suning Xie , Matthew C. Slater
发明人： Gregory N. DeBrabander , Robert W. Herrick , Suning Xie , Matthew C. Slater
IPC分类号： H01L21/66
CPC分类号： H01S5/18338 , H01S5/0042 , H01S5/18311 , H01S2301/176
摘要： A method for detecting a passivation pinhole includes forming an oxide vertical cavity surface-emitting laser (VCSEL) having an oxidation cavity, forming a passivation layer over a surface of the oxidation cavity, exposing the oxide VCSEL to an etchant vapor, and inspecting the oxide VCSEL for a defect caused by the etchant vapor.
摘要翻译：一种用于检测钝化针孔的方法包括形成具有氧化腔的氧化物垂直腔表面发射激光器（VCSEL），在氧化腔的表面上形成钝化层，将氧化物VCSEL暴露于蚀刻剂蒸气，并检查氧化物 VCSEL用于由蚀刻剂蒸气引起的缺陷。

2. 发明申请

US20120012864A1 LED ARRAY PACKAGE WITH A COLOR FILTER 审中-公开
标题翻译： LED阵列与彩色滤光片
公开(公告)号：US20120012864A1
公开(公告)日：2012-01-19
申请号：US12836140
申请日：2010-07-14
申请人： Suning Xie , Jianhua Li , Chao-Kun Lin
发明人： Suning Xie , Jianhua Li , Chao-Kun Lin
IPC分类号： H01L33/58
CPC分类号： H01L33/507 , H01L25/0753 , H01L33/44 , H01L2924/0002 , H01L2924/00
摘要： A light source includes a substrate, a light emitting diode on the substrate within a cavity, a plate over the cavity, a phosphor layer on the plate, and a color filter on the plate between the phosphor layer and the cavity.
摘要翻译：光源包括衬底，腔内的衬底上的发光二极管，腔上的板，板上的磷光体层，以及荧光体层和腔之间的板上的滤色器。

3. 发明授权

US06862309B2 Passivation scheme for oxide vertical cavity surface-emitting laser 有权
标题翻译：氧化物垂直腔表面发射激光器的钝化方案
公开(公告)号：US06862309B2
公开(公告)日：2005-03-01
申请号：US10361092
申请日：2003-02-06
申请人： Gregory N. DeBrabander , An-Nien Cheng , Suning Xie , Wilson Hasan Widjaja
发明人： Gregory N. DeBrabander , An-Nien Cheng , Suning Xie , Wilson Hasan Widjaja
IPC分类号： H01S3/08 , H01S3/16 , H01S3/20 , H01S5/00 , H01S5/028 , H01S5/183
CPC分类号： H01S5/18313 , H01S2301/176
摘要： A method for forming an oxide VCSEL (vertical cavity surface-emitting laser) includes forming a VCSEL structure, forming an oxidation cavity partially through the VCSEL structure, oxidizing a layer in the VCSEL structure, forming a first passivation layer over a surface of the oxidation cavity, and forming a second passivation layer over the first passivation layer. An oxide VCSEL structure includes a bottom mirror region, an active region atop the bottom mirror region, a top mirror region atop the active region, an oxidation cavity partially through the top mirror region, a first passivation layer covering a surface of the oxidation cavity, and a second passivation layer covering the first passivation layer. In both the method and the structure, the first passivation layer can be made of silicon nitride (SiN) while the second passivation layer can be made of silicon oxynitride (SiON).
摘要翻译：用于形成氧化物VCSEL（垂直腔表面发射激光器）的方法包括形成VCSEL结构，通过VCSEL结构部分地形成氧化腔，氧化VCSEL结构中的层，在氧化物的表面上形成第一钝化层并且在所述第一钝化层上形成第二钝化层。氧化物VCSEL结构包括底部反射镜区域，底部反射镜区域顶部的有源区域，有源区域顶部的顶部反射镜区域，部分穿过顶部镜像区域的氧化腔室，覆盖氧化腔体表面的第一钝化层，以及覆盖所述第一钝化层的第二钝化层。在方法和结构中，第一钝化层可以由氮化硅（SiN）制成，而第二钝化层可以由氮氧化硅（SiON）制成。

4. 发明授权

US06680964B2 Moisture passivated planar index-guided VCSEL 有权
公开(公告)号：US06680964B2
公开(公告)日：2004-01-20
申请号：US10013108
申请日：2001-12-07
申请人： Seongsin Kim , Wilson H. Widjaja , Suning Xie
发明人： Seongsin Kim , Wilson H. Widjaja , Suning Xie
IPC分类号： H01S5183
CPC分类号： H01S5/18338 , H01S5/18313 , H01S5/2081 , H01S5/423 , H01S2301/176
摘要： Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELs) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, a VCSEL includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region disposed between the top mirror and the bottom mirror and including an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator as a result of exposure to an oxidizing agent. The vertical stack structure defines two or more etched holes each extending from the substantially planar top surface to the oxidized peripheral region. Each of the etched holes is moisture passivated by an overlying moisture penetration barrier.

5. 发明授权

US06982182B2 Moisture passivated planar index-guided VCSEL 有权
公开(公告)号：US06982182B2
公开(公告)日：2006-01-03
申请号：US10620137
申请日：2003-07-14
申请人： Seongsin Kim , Wilson H. Widjaja , Suning Xie
发明人： Seongsin Kim , Wilson H. Widjaja , Suning Xie
IPC分类号： H01L21/00 , H01S5/00
CPC分类号： H01S5/18338 , H01S5/18313 , H01S5/2081 , H01S5/423 , H01S2301/176
摘要： Systems and methods of passivating planar index-guided oxide vertical cavity surface emitting lasers (VCSELs) are described. These systems and methods address the unique susceptibility of these devices to damage that otherwise might be caused by moisture intrusion into the etch holes that are used to form the index-guiding confinement regions. In one aspect, a VCSEL includes a vertical stack structure having a substantially planar top surface. The vertical stack structure includes a top mirror, a bottom mirror, and a cavity region disposed between the top mirror and the bottom mirror and including an active light generation region. At least one of the top mirror and the bottom mirror has a layer with a peripheral region that is oxidized into an electrical insulator as a result of exposure to an oxidizing agent. The vertical stack structure defines two or more etched holes each extending from the substantially planar top surface to the oxidized peripheral region. Each of the etched holes is moisture passivated by an overlying moisture penetration barrier.

6. 发明申请

US20050175051A1 Detecting pinholes in vertical cavity surface-emitting laser passivation 审中-公开
标题翻译：在垂直腔表面发射激光钝化中检测针孔
公开(公告)号：US20050175051A1
公开(公告)日：2005-08-11
申请号：US11096397
申请日：2005-03-31
申请人： Gregory DeBrabander , Robert Herrick , Suning Xie , Matthew Slater
发明人： Gregory DeBrabander , Robert Herrick , Suning Xie , Matthew Slater
IPC分类号： H01S5/00 , H01S5/183
CPC分类号： H01S5/18338 , H01S5/0042 , H01S5/18311 , H01S2301/176
摘要： A method for detecting a passivation pinhole includes forming an oxide vertical cavity surface-emitting laser (VCSEL) having an oxidation cavity, forming a passivation layer over a surface of the oxidation cavity, exposing the oxide VCSEL to an etchant vapor, and inspecting the oxide VCSEL for a defect caused by the etchant vapor.
摘要翻译：一种用于检测钝化针孔的方法包括形成具有氧化腔的氧化物垂直腔表面发射激光器（VCSEL），在氧化腔的表面上形成钝化层，将氧化物VCSEL暴露于蚀刻剂蒸气，并检查氧化物 VCSEL用于由蚀刻剂蒸气引起的缺陷。

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