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    • 1. 发明申请
    • METHOD FOR GROWING ZIRCONIUM NITRIDE CRYSTAL
    • 生长氮化锆晶体的方法
    • US20150225874A1
    • 2015-08-13
    • US14422562
    • 2012-08-21
    • Sung Moo Kim
    • Sung Moo Kim
    • C30B25/02C30B29/38
    • C30B25/02C23C16/34C30B25/183C30B29/38C30B29/403H01L21/02439H01L21/0254H01L21/0262H01L33/005H01L33/26
    • According to the present invention, if a zirconium nitride lattice is grown by a method for growing zirconium nitride using a metal-organic vapor phase epitaxy method, the lattice binding efficiency of ZrN and GaN can enable a low cost preparation of an LED having high performance and it is very advantageous to grow a green LED by a direct band gap in the presence of Zr3N4. In addition, InZr3N4 can be substituted for In when growing a MQW in an LED, and thus it is very advantageous to prepare green and red LEDs. Further, a more satisfactory diffusion current can be obtained using ZrN or Zr3N4 as an epitaxial interlayer, and thus it is very advantageous in the application of a large LED chip and it is possible to prevent thermal expansion or cracks with respect to a silicon substrate.
    • 根据本发明,如果通过使用金属 - 有机气相外延法的生长氮化锆的方法生长氮化锆晶格,则ZrN和GaN的晶格结合效率可以使得具有高性能的LED的低成本准备 并且在Zr 3 N 4存在下通过直接带隙生长绿色LED是非常有利的。 另外,当在LED中生长MQW时,InZr3N4可以代替In,因此制备绿色和红色LED是非常有利的。 此外,可以使用ZrN或Zr3N4作为外延中间层获得更令人满意的扩散电流,因此在应用大的LED芯片方面是非常有利的,并且可以防止相对于硅衬底的热膨胀或裂纹。
    • 6. 发明授权
    • Method for manufacturing CMOS image sensor
    • CMOS图像传感器的制造方法
    • US07659133B2
    • 2010-02-09
    • US11646096
    • 2006-12-26
    • Sung Moo Kim
    • Sung Moo Kim
    • H01L21/00H01L21/8238
    • H01L27/14643H01L27/14603H01L27/14689
    • Disclosed is a method for manufacturing a CMOS image sensor, capable of preventing dopants implanted with high energy from penetrating into a lower part of a gate electrode when a photodiode is formed, thereby preventing current leakage of a transistor and variation of a threshold voltage. The method includes the steps of forming a gate electrode on a transistor area of a first conductive type semiconductor substrate including a photodiode area and the transistor area, forming a salicide layer on the gate electrode, and implanting second conductive type dopants for forming a photodiode in a photodiode area of the semiconductor substrate.
    • 公开了一种制造CMOS图像传感器的方法,当形成光电二极管时,能够防止注入高能量的掺杂剂渗透到栅电极的下部,从而防止晶体管的电流泄漏和阈值电压的变化。 该方法包括以下步骤:在包括光电二极管区域和晶体管区域的第一导电类型半导体衬底的晶体管区域上形成栅电极,在栅电极上形成自对准硅化物层,以及将用于形成光电二极管的第二导电型掺杂剂注入 半导体衬底的光电二极管区域。
    • 7. 发明授权
    • Semiconductor devices and methods of manufacturing the same
    • 半导体器件及其制造方法
    • US07638426B2
    • 2009-12-29
    • US11318917
    • 2005-12-27
    • Sung-Moo Kim
    • Sung-Moo Kim
    • H01L21/312H01L21/469
    • H01L21/76804H01L21/7684
    • Shorting of a copper line with an adjacent line in a semiconductor device during chemical mechanical polishing may be prevented and thus reliability of the semiconductor device may be improved, when the semiconductor device includes a substrate, an interlayer insulating layer formed on the substrate and having a dual trench, and a copper line formed to fill the dual trench, wherein the dual trench includes a first trench inclined at a first angle with respect to the substrate, and a second trench connected to the first trench and inclined at a second angle that is smaller than the first angle with respect to the substrate.
    • 可以防止在化学机械抛光期间在半导体器件中使用相邻线的铜线短路,并且因此当半导体器件包括衬底,形成在衬底上的层间绝缘层并且具有 双沟槽和形成为填充双沟槽的铜线,其中双沟槽包括相对于衬底倾斜第一角度的第一沟槽和连接到第一沟槽并以第二角度倾斜的第二沟槽, 小于相对于基底的第一角度。
    • 9. 发明授权
    • Method for modeling varactor by direct extraction of parameters
    • 通过直接提取参数建模变容二极管的方法
    • US07631281B2
    • 2009-12-08
    • US11964484
    • 2007-12-26
    • Sung-Moo Kim
    • Sung-Moo Kim
    • G06F17/50
    • G06F17/5009
    • A method for modeling a varactor with a MOS structure, and transforms an s-parameter obtained by the measurement using measurement equipment into a y-parameter and a z-parameter and then directly extracts parameters required for the modeling by means of equations in accordance with embodiments. The modeling can be made reflecting the parameters of the varactor varied according to frequency so that the more accurate RF modeling of a passive device can be made and the accurate modeling of the varactor can be made through the direct extraction method of the parameters so that the parameters of the varactor having a physical meaning can be extracted without using an expensive CAD tool, the time required for optimizing the parameters can be reduced, a computing time can be shorten, an initial condition dependence generated in performing the optimization is not required, and a pattern for a test is not required.
    • 一种用于对具有MOS结构的变容二极管建模的方法,并且将通过使用测量设备的测量获得的s参数变换为y参数和z参数,然后通过等式直接提取建模所需的参数 实施例。 可以根据频率对变容二极管的参数进行建模,从而可以对无源器件进行更准确的射频建模,并通过参数的直接提取方法对变容二极管进行精确建模, 可以在不使用昂贵的CAD工具的情况下提取具有物理含义的变容二极管的参数,可以减少优化参数所需的时间,可以缩短计算时间,不需要在执行优化时产生的初始条件相关性, 不需要测试模式。