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1. 发明申请

US20080204879A1 Miniature Lamellar Grating Interferometer Based on Silicon Technology 审中-公开
标题翻译：基于硅技术的微型层状光栅干涉仪
公开(公告)号：US20080204879A1
公开(公告)日：2008-08-28
申请号：US11630872
申请日：2005-06-22
申请人： Omar Manzardo , Felix Schadelin , Hans Peter Herzig , Wilfried Noell , Nicolaas De Rooij , Steeve Buhler , Christoph Meier
发明人： Omar Manzardo , Felix Schadelin , Hans Peter Herzig , Wilfried Noell , Nicolaas De Rooij , Steeve Buhler , Christoph Meier
IPC分类号： G02B27/44
CPC分类号： G01B9/02051 , G01B9/02007 , G01J3/4532
摘要： A lamellar grating interferometer is described, in which the light beams are collimated and focused onto the grating by means of mirror 9, which at the same time serves for collecting the light reflected from the grating. In this case, the light beam of a white light source 1 is first collimated by means of first lens 2, and subsequently passed through a sample cuvette 3. The transmitted light beam is subsequentlyy focused and coupled by another lens 2 into a fibre 17. The light to this fibre 17 is subsequentlyy directed towards a mirror 9, reflected from this mirror 9 onto a grating 11, which forms part of a lamellar grating interferometer which is realised by means of a micro electro mechanical device MEMS 7, which is mounted on a MEMS holder 6, as is the fibre 17. The light reflected from this grating 11 is reflected onto the same mirror 9, and focused and coupled by this same mirror 9 into a second multimode fibre 18, which is also fastened to the holder 6. The light guided by this second multimode fibre 18 is subsequently fed into a detection device 4.
摘要翻译：描述了一种层状光栅干涉仪，其中光束被准直并通过反射镜9聚焦到光栅上，反射镜9同时用于收集从光栅反射的光。在这种情况下，白光源1的光束首先通过第一透镜2准直，然后通过样本比色杯3.透射光束随后聚焦并被另一透镜2耦合到光纤17中。到这个光纤17的光随后被引向反射镜9，反射镜9从该反射镜9反射到光栅11上，光栅11形成了薄片光栅干涉仪的一部分，该干涉仪通过微机电装置MEMS 7实现， MEMS保持器6，光纤17一样。从该光栅11反射的光被反射到相同的反射镜9上，并被该相同的反射镜9聚焦并耦合到第二多模光纤18中，第二多模光纤18也被固定到保持器6 由第二多模光纤18引导的光随后被馈送到检测装置4中。

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