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1. 发明申请

US20090308317A1 CARRIER WITH DEPOSITION SHIELD 审中-公开
标题翻译：携带沉积物
公开(公告)号：US20090308317A1
公开(公告)日：2009-12-17
申请号：US12468887
申请日：2009-05-20
申请人： Hiroshi Sone , Shinya Houman , Naoyuki Nozawa , Yoshiro Hasegawa
发明人： Hiroshi Sone , Shinya Houman , Naoyuki Nozawa , Yoshiro Hasegawa
IPC分类号： C23C14/56 , C23C14/50
CPC分类号： C23C14/50 , C23C14/564 , C23C14/568
摘要： The peeling-off of a deposited film caused by a carrier is restrained, and the exchange period of the carrier is prolonged. In a carrier 1 including a slider 7 having a mechanism for conveying a substrate holder 3 that supports a substrate 2, a deposition shield 20a, 20b that can cover the substrate holder 3 and has an opening equivalent to or larger than the substrate 2 on which a film is formed is installed on both surfaces of the substrate holder 3. At this time, the substrate holder 3, supporting claws 4, and fixing parts 6 are arranged so as to be hidden by the deposition shield 20. In a film forming chamber, to form a predetermined film on the substrate 2, the carrier 1 covered by the deposition shield 20 is exposed to a plasma space in the film forming chamber, and the film is formed. The deposition of film onto the substrate holder 3, the supporting claws 4, and the fixing parts 6 that are covered by the deposition shield 20 can be restrained. Therefore, the peeling-off of film due to the deflection of claw or the peeling-off of film from the acute angle part of the fixing part 6 and the like is restrained, by which the exchange period of the carrier 1 can be prolonged.
摘要翻译：由载体引起的沉积膜的剥离被抑制，并且载体的交换周期延长。在包括具有用于输送支撑基板2的基板保持件3的机构的滑块7的载体1中，可以覆盖基板保持件3并且具有等于或大于其上的基板2的开口的沉积屏蔽20a，20b，在基板支架3的两面安装有膜。此时，基板保持件3，支撑爪4和固定部6被布置成被沉积屏蔽20隐藏。在成膜室为了在基板2上形成规定的膜，将由沉积屏蔽罩20覆盖的载体1暴露于成膜室中的等离子体空间，形成膜。可以抑制膜沉积到由沉积屏蔽20覆盖的基板保持件3，支撑爪4和固定部6上。因此，可以抑制由于爪的偏转而导致的膜的剥离或者从固定部6的锐角部等剥离的膜等，能够延长载体1的交换周期。

2. 发明申请

US20100189912A1 SUBSTRATE HOLDER, DEPOSITION METHOD USING SUBSTRATE HOLDER, HARD DISK MANUFACTURING METHOD, DEPOSITION APPARATUS, AND PROGRAM 有权
标题翻译：基板支架，使用基板支架的沉积方法，硬盘制造方法，沉积装置和程序
公开(公告)号：US20100189912A1
公开(公告)日：2010-07-29
申请号：US12754364
申请日：2010-04-05
申请人： Shinya Houman , Hiroshi Torii
发明人： Shinya Houman , Hiroshi Torii
IPC分类号： B05D1/36 , B25B5/00 , B05C9/00 , C23C14/34
CPC分类号： G11B5/851 , C23C16/4585 , G11B23/042 , H01L21/68728 , H01L21/68778
摘要： A substrate holder for supporting an insulating substrate includes a conductive substrate holder main body having an opening, a first support member formed to protrude inside the opening from the inner periphery of the opening, and including a clamping member which supports one end portion of the insulating substrate, and a second support member including a clamping member which supports the other end portion of the insulating substrate, and is movable so as to protrude inside the opening or retract from inside the opening.
摘要翻译：用于支撑绝缘基板的基板保持器包括具有开口的导电基板保持器主体，形成为从开口的内周突出到开口内部的第一支撑构件，并且包括夹持构件，该夹紧构件支撑绝缘的一个端部基板，以及第二支撑构件，其包括支撑绝缘基板的另一端部的夹持构件，并且可移动地从开口内部突出到开口内部或内部。

3. 发明授权

US07927473B2 Substrate holder, deposition method using substrate holder, hard disk manufacturing method, deposition apparatus, and program 有权
标题翻译：基板支架，使用基板支架的沉积方法，硬盘制造方法，沉积装置和程序
公开(公告)号：US07927473B2
公开(公告)日：2011-04-19
申请号：US12754364
申请日：2010-04-05
申请人： Shinya Houman , Hiroshi Torii
发明人： Shinya Houman , Hiroshi Torii
IPC分类号： C23C14/34 , C23C16/00
CPC分类号： G11B5/851 , C23C16/4585 , G11B23/042 , H01L21/68728 , H01L21/68778
摘要： A substrate holder for supporting an insulating substrate includes a conductive substrate holder main body having an opening, a first support member formed to protrude inside the opening from the inner periphery of the opening, and including a clamping member which supports one end portion of the insulating substrate, and a second support member including a clamping member which supports the other end portion of the insulating substrate, and is movable so as to protrude inside the opening or retract from inside the opening.
摘要翻译：用于支撑绝缘基板的基板保持器包括具有开口的导电基板保持器主体，形成为从开口的内周突出到开口内部的第一支撑构件，并且包括夹持构件，该夹紧构件支撑绝缘的一个端部基板，以及第二支撑构件，其包括支撑绝缘基板的另一端部的夹持构件，并且可移动地从开口内部突出到开口内部或内部。

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