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    • 3. 发明申请
    • METHOD FOR MANUFACTURING LIQUID CRYSTAL DEVICE
    • 制造液晶装置的方法
    • US20090283401A1
    • 2009-11-19
    • US12434111
    • 2009-05-01
    • Huiping ZANGHideo NAKATAShinsuke SEKITakao TANAKA
    • Huiping ZANGHideo NAKATAShinsuke SEKITakao TANAKA
    • C23C14/34
    • G02F1/133711C09K3/1018C09K17/36C09K17/38C23C14/10C23C14/185C23C14/226C23C14/584G02F1/133734G02F2001/133749Y10T428/1014
    • A method for manufacturing a liquid crystal device that has a liquid crystal layer interposed between a pair of substrates which oppose each other and an alignment film which is formed on an inner face side of at least one of the substrates includes forming an inorganic alignment layer that has a plurality of columnar structures in which crystals grow in an oblique direction with respect to a normal line of the substrate by using sputtering equipment in which a pair of targets oppose each other with a plasma forming region interposed therebetween, by emitting an alignment film material that is made of an inorganic material in an oblique direction onto the substrate from the targets, and forming an organic alignment layer that is a monomolecular film made of an organic material chemically bonded with the inorganic alignment layer on a surface of the inorganic alignment layer by treating the surface of the inorganic alignment layer with a silane coupling agent that has an alkyl group, wherein a pretilt angle of a liquid crystal molecule is set to a desired angle by selecting the silane coupling agent by the number of carbon atoms.
    • 一种制造液晶装置的方法,该液晶装置具有介于彼此相对的一对基板之间的液晶层和形成在至少一个基板的内表面侧上的取向膜,形成无机配向层, 具有多个柱状结构,其中通过使用其中一对靶与其间插入等离子体形成区域彼此相对的溅射设备,通过发射取向膜材料而使晶体相对于基板的法线在倾斜方向上生长 其由倾斜方向的无机材料制成,并且在无机取向层的表面上形成由与无机取向层化学键合的有机材料制成的单分子膜的有机取向层 用具有烷基的硅烷偶联剂处理无机取向层的表面, 通过选择硅烷偶联剂碳原子数,将液晶分子的预倾角设定为期望的角度。