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    • 2. 发明申请
    • APPARATUS FOR AND METHOD OF DISPENSING CHEMICAL SOLUTION IN SPIN-COATING EQUIPMENT
    • 旋转涂装设备中化学溶液分配方法及方法
    • US20080107796A1
    • 2008-05-08
    • US11867744
    • 2007-10-05
    • Seung-Ki CHO
    • Seung-Ki CHO
    • B05D1/02B05C5/02
    • B05C11/1013B05C11/08G03F7/162H01L21/67253
    • A chemical solution is uniformly dispensed from a nozzle by N2 in spin-coating equipment. The dispensing apparatus includes a canister configured to receive a bottle containing the chemical solution, gas supply piping connecting a source of N2 to the inside of the canister, a pressure control valve disposed in the gas supply piping, a chemical supply line by which the bottle is connected to the nozzle, a pressure sensor for sensing the pressure of the chemical solution supplied from the bottle, and a controller that controls the pressure control valve on the basis of the pressure sensed by the pressure sensor. The controller opens the pressure control valve further when the value of the signal output by the pressure sensor is less than a value representative of the minimum of a predetermined pressure range, and closes the pressure control valve further when the value of the signal output by the pressure sensor is greater than a value representative of the maximum of the predetermined pressure range. The degree to which the pressure control is open is thus controlled by feedback from the pressure control sensor such that the pressure of the chemical solution remains substantially constant as it is dispensed from the nozzle.
    • 化学溶液在旋涂设备中通过N 2 N 2从喷嘴均匀分配。 分配装置包括:罐,其构造为容纳含有化学溶液的瓶子,将N 2源的源连接到罐内部的气体供给管道,设置在气体供给管道中的压力控制阀, 瓶子连接到喷嘴的化学品供应管线,用于感测从瓶子供应的化学溶液的压力的压力传感器,以及基于由压力传感器感测到的压力来控制压力控制阀的控制器 。 当由压力传感器输出的信号的值小于表示预定压力范围的最小值的值时,控制器进一步打开压力控制阀,并且当由该压力传感器输出的信号的值 压力传感器大于表示预定压力范围的最大值的值。 因此,通过来自压力控制传感器的反馈来控制压力控制打开的程度,使得化学溶液的压力在从喷嘴分配时保持基本上恒定。
    • 5. 发明授权
    • Apparatus for and method of dispensing chemical solution in spin-coating equipment
    • 用于在旋涂设备中分配化学溶液的设备和方法
    • US08136477B2
    • 2012-03-20
    • US11867744
    • 2007-10-05
    • Seung-Ki Cho
    • Seung-Ki Cho
    • B05C11/00B05C11/02B05C5/00B05B15/02
    • B05C11/1013B05C11/08G03F7/162H01L21/67253
    • A chemical solution is uniformly dispensed from a nozzle by N2 in spin-coating equipment. The dispensing apparatus includes a canister configured to receive a bottle containing the chemical solution, gas supply piping connecting a source of N2 to the inside of the canister, a pressure control valve disposed in the gas supply piping, a chemical supply line by which the bottle is connected to the nozzle, a pressure sensor for sensing the pressure of the chemical solution supplied from the bottle, and a controller that controls the pressure control valve on the basis of the pressure sensed by the pressure sensor. The controller opens the pressure control valve further when the value of the signal output by the pressure sensor is less than a value representative of the minimum of a predetermined pressure range, and closes the pressure control valve further when the value of the signal output by the pressure sensor is greater than a value representative of the maximum of the predetermined pressure range. The degree to which the pressure control is open is thus controlled by feedback from the pressure control sensor such that the pressure of the chemical solution remains substantially constant as it is dispensed from the nozzle.
    • 化学溶液在旋涂设备中通过N2从喷嘴均匀分配。 所述分配装置包括:罐,其构造成容纳含有所述化学溶液的瓶子;将所述氮源与所述罐内连接的气体供给配管;配置在所述气体供给配管内的压力控制阀, 连接到喷嘴,用于感测从瓶供应的化学溶液的压力的压力传感器,以及基于由压力传感器感测的压力来控制压力控制阀的控制器。 当由压力传感器输出的信号的值小于表示预定压力范围的最小值的值时,控制器进一步打开压力控制阀,并且当由该压力传感器输出的信号的值 压力传感器大于表示预定压力范围的最大值的值。 因此,通过来自压力控制传感器的反馈来控制压力控制打开的程度,使得化学溶液的压力在从喷嘴分配时保持基本上恒定。