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    • 8. 发明授权
    • Apparatus and method for generating ions of an ion implanter
    • 用于产生离子注入机离子的装置和方法
    • US07476868B2
    • 2009-01-13
    • US11453075
    • 2006-06-15
    • Seong Gu KimJai Kwang ShinJae Joon Oh
    • Seong Gu KimJai Kwang ShinJae Joon Oh
    • H01J37/08H01J37/30
    • H01J37/08H01J27/024H01J27/08H01J37/3171
    • An ion generator of an ion implanter, the ion generator includes: an arc chamber provided with a slit for ion extraction and forming an equipotential surface with a first voltage; a filament installed inside of the arc chamber, heated to a predetermined temperature and generating electrons; magnetic field devices provided outside of the arc chamber and supplied with a current from a current source and generating a magnetic field in the arc chamber; a gas discharge device injecting a predetermined gas into the arc chamber; and an electrode positioned opposite to the slit and supplied with a second voltage having a high voltage than the first voltage from a voltage source and generating a magnetic field in the arc chamber.
    • 离子注入机的离子发生器,所述离子发生器包括:电弧室,设置有用于离子提取的狭缝并形成具有第一电压的等电位面; 安装在电弧室内的灯丝,加热到预定温度并产生电子; 磁场装置设置在电弧室外部,并从电流源提供电流并在电弧室中产生磁场; 将预定气体注入到电弧室中的气体放电装置; 以及电极,与所述狭缝相对设置,并且从电压源提供具有比所述第一电压高的电压的第二电压并在所述电弧室中产生磁场。