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1. 发明申请

US20110139990A1 MEMS-BASED FTIR SPECTROMETER 审中-公开
标题翻译：基于MEMS的FTIR光谱仪
公开(公告)号：US20110139990A1
公开(公告)日：2011-06-16
申请号：US12989871
申请日：2009-08-04
申请人： Huikai Xie , Lei Wu , Andrea Pais , Sean Robert Samuelson
发明人： Huikai Xie , Lei Wu , Andrea Pais , Sean Robert Samuelson
IPC分类号： G01N21/35 , G01J3/45
CPC分类号： G01J3/4535 , G01J5/08 , G01J5/0853 , G01J5/38 , G01N2021/3595 , G02B26/0866
摘要： A MEMS-based Fourier Transform (FT) spectrometer is provided. According to an embodiment, the MEMS-based FT spectrometer is an FT infrared (FTIR) spectrometer. The FT spectrometer can include a beam splitter positioned to receive an incoming beam from a light source and split the incoming beam into a first sub-beam and a second sub-beam, a fixed mirror positioned to receive the first sub-beam from the beam splitter, a scanning MEMS mirror positioned to receive the second sub-beam from the beam splitter, and a photodetector, wherein a reflected first sub-beam from the fixed mirror and a reflected second sub-beam from the scanning MEMS mirror recombine at the beam splitter and become directed to the photodetector. According to one embodiment, the photodetector is a MEMS-based IR detector. In addition, the MEMS-based IR detector can be an un-cooled IR detector having a capacitive sensing structure.
摘要翻译：提供了基于MEMS的傅里叶变换（FT）光谱仪。根据实施例，基于MEMS的FT光谱仪是FT红外（FTIR）光谱仪。 FT分光计可以包括分束器，其被定位成接收来自光源的入射光束，并将入射光束分成第一子光束和第二子光束，固定镜定位成从光束接收第一子光束分离器，定位成从分束器接收第二子光束的扫描MEMS镜和光电检测器，其中来自固定镜的反射的第一子光束和来自扫描MEMS镜的反射的第二子光束在光束处复合分离器并且被引导到光电检测器。根据一个实施例，光电检测器是基于MEMS的IR检测器。此外，基于MEMS的IR检测器可以是具有电容感测结构的未冷却的IR检测器。

2. 发明申请

US20110194117A1 MIRROR-TILT-INSENSITIVE FOURIER TRANSFORM SPECTROMETER 审中-公开
标题翻译：反射光敏感变换光谱仪
公开(公告)号：US20110194117A1
公开(公告)日：2011-08-11
申请号：US13123683
申请日：2010-01-11
申请人： Huikai Xie , Andrea Pais , Lei Wu , Sean Robert Samuelson , Shuguang Guo
发明人： Huikai Xie , Andrea Pais , Lei Wu , Sean Robert Samuelson , Shuguang Guo
IPC分类号： G01J3/45 , G01J3/08
CPC分类号： G01J3/4532 , G01J3/02 , G01J3/021 , G01J3/0256 , G01J3/0291 , G01J3/45
摘要： Methods and designs for providing reduced sensitivity to mirror tilt in Fourier transform spectrometers are disclosed. According to an embodiment for two-directional tilt compensation, the FT spectrometer can include a beam splitter positioned to receive an incoming beam from a light source and split the incoming beam into a first sub-beam and a second sub-beam, a corner-cube retroreflector positioned to receive the first sub-beam from the beam splitter, a dual reflective mirror positioned to receive the first sub-beam from the corner-cube retroreflector at one surface and the second sub-beam at the other surface. An optical path delay can be created using a set of mirrors, tilting the beam splitter and/or a glass cube.
摘要翻译：公开了在傅里叶变换光谱仪中提供对镜面倾斜的灵敏度降低的方法和设计。根据用于双向倾斜补偿的实施例，FT光谱仪可以包括分束器，其被定位成接收来自光源的入射光束，并将入射光束分成第一子光束和第二子光束，立方体后向反射器被定位成从分束器接收第一子光束;双反射镜，定位成在一个表面处接收来自角立方后视反射器的第一子光束，而在另一个表面处接收第二子光束。可以使用一组反射镜，倾斜分束器和/或玻璃立方体来产生光路延迟。

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