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1. 发明授权

US09006626B2 Multi-slot microwave device and processing system thereof 有权
标题翻译：多槽微波设备及其处理系统
公开(公告)号：US09006626B2
公开(公告)日：2015-04-14
申请号：US13680296
申请日：2012-11-19
申请人： Tsun-Hsu Chang , Tsung-Shune Chin , Hsien-Wen Chao , Shih-Chieh Fong
发明人： Tsun-Hsu Chang , Tsung-Shune Chin , Hsien-Wen Chao , Shih-Chieh Fong
IPC分类号： H05B6/64 , H05B6/74 , H05B6/76 , H05B6/78 , H05B6/70 , H05B6/80
CPC分类号： H05B6/64 , H05B6/704 , H05B6/74 , H05B6/76 , H05B6/78 , H05B6/80
摘要： A multi-slot resonant microwave device comprises a plurality of slot microwave resonator units and at least one microwave emitting source. Each of the plurality of slot microwave resonator unit is defined as a slot resonant cavity. Whenever at least one of the microwave emitting sources emits microwave power into the plurality of slot microwave resonator units, the plurality of slot microwave resonator units resonate simultaneously, and produce an electromagnetic field with the same polarization direction. Therefore, the multi-slot resonator device can deal with large-area microwave heating with greater microwave effect to shorten operating time and accomplish the objective of homogeneous and megathermal microwave heating.
摘要翻译：多时隙谐振微波器件包括多个时隙微波谐振器单元和至少一个微波发射源。多个时隙微波谐振器单元中的每一个被定义为时隙谐振腔。每当微波发射源中的至少一个向多个时隙微波谐振器单元发射微波功率时，多个时隙微波谐振器单元同时共振，并产生具有相同偏振方向的电磁场。因此，多槽谐振器可以处理大面积的微波加热，具有更大的微波效应，缩短了工作时间，达到均匀和大功率微波加热的目的。

2. 发明申请

US20130029497A1 Method of Crystallizing Amorphous Silicon Films by Microwave Irradiation 审中-公开
标题翻译：通过微波辐射结晶无定形硅膜的方法
公开(公告)号：US20130029497A1
公开(公告)日：2013-01-31
申请号：US13399575
申请日：2012-02-17
申请人： Tsung-Shune Chin , Tsun-Hsu Chang , Shih-Chieh Fong , Hsien-Wen Chao
发明人： Tsung-Shune Chin , Tsun-Hsu Chang , Shih-Chieh Fong , Hsien-Wen Chao
IPC分类号： H01L21/322
CPC分类号： H01L21/02672 , H01L21/02532
摘要： A method is developed to crystallize amorphous silicon (a-Si) thin films, in cold environment, by combining microwave-absorbing materials (MAM) and microwave irradiation. The MAM is set on top or around of the a-Si thin film. MAM composes of dielectric, magnetic, semiconductor, ferroelectric and carbonaceous material oxides, carbides, nitrides and borides, which will absorb and concentrate electric or magnetic field of the microwave. The microwave frequency is selected from 1 to 50 GHz, at a power density not less than 5 W/cm2. Temperature rise of the MAM is monitored and controlled by an optical pyrometer to be less than 600° C., and better be within 400-500° C. The application of MAM at patterned local areas leads to localized heating and crystallization of a-Si film right at the patterns to facilitate manufacture of semiconductor devices.
摘要翻译：通过组合微波吸收材料（MAM）和微波照射，开发了一种在寒冷环境下结晶非晶硅（a-Si）薄膜的方法。 MAM设置在a-Si薄膜的顶部或周围。 MAM组成电介质，磁性，半导体，铁电和碳质材料的氧化物，碳化物，氮化物和硼化物，其将吸收和集中微波的电场或磁场。微波频率选择1〜50GHz，功率密度不小于5W / cm2。 MAM的温度升高由光学高温计监控和控制，低于600℃，最好在400-500℃之间。在图案化局部区域的MAM的应用导致局部加热和a-Si的结晶电影就是以图案方式制造半导体器件。

3. 发明申请

US20130175261A1 MULTI-SLOT MICROWAVE DEVICE AND PROCESSING SYSTEM THEREOF 有权
标题翻译：多槽微波器件及其处理系统
公开(公告)号：US20130175261A1
公开(公告)日：2013-07-11
申请号：US13680296
申请日：2012-11-19
申请人： TSUN-HSU CHANG , TSUNG-SHUNE CHIN , HSIEN-WEN CHAO , SHIH-CHIEH FONG
发明人： TSUN-HSU CHANG , TSUNG-SHUNE CHIN , HSIEN-WEN CHAO , SHIH-CHIEH FONG
IPC分类号： H05B6/64 , H05B6/76 , H05B6/78 , H05B6/74
CPC分类号： H05B6/64 , H05B6/704 , H05B6/74 , H05B6/76 , H05B6/78 , H05B6/80
摘要： A multi-slot resonant microwave device comprises a plurality of slot microwave resonator units and at least one microwave emitting source. Each of the plurality of slot microwave resonator unit is defined as a slot resonant cavity. Whenever at least one of the microwave emitting sources emits microwave power into the plurality of slot microwave resonator units, the plurality of slot microwave resonator units resonate simultaneously, and produce an electromagnetic field with the same polarization direction. Therefore, the multi-slot resonator device can deal with large-area microwave heating with greater microwave effect to shorten operating time and accomplish the objective of homogeneous and megathermal microwave heating.
摘要翻译：多时隙谐振微波器件包括多个时隙微波谐振器单元和至少一个微波发射源。多个时隙微波谐振器单元中的每一个被定义为时隙谐振腔。每当微波发射源中的至少一个向多个时隙微波谐振器单元发射微波功率时，多个时隙微波谐振器单元同时共振，并产生具有相同偏振方向的电磁场。因此，多槽谐振器可以处理大面积的微波加热，具有更大的微波效应，缩短了工作时间，达到均匀和大功率微波加热的目的。

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