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    • 1. 发明申请
    • INTELLIGENT MACHINES AND PROCESS FOR PRODUCTION OF MONOCRYSTALLINE PRODUCTS WITH GONIOMETER CONTINUAL FEEDBACK
    • 智能机器和生产具有GONIOMETER连续反馈的单晶产品的工艺
    • US20150092920A1
    • 2015-04-02
    • US14563225
    • 2014-12-08
    • Rubicon Technology, Inc.
    • Srikanth KAMIREDDI
    • G01N23/207
    • G01N23/207B23D59/001B28D5/0088C30B33/00C30B33/06C30B35/00G01N2223/604
    • The present invention consists of an x-ray goniometer which is positioned directly adjacent to processing machines used in the cutting, milling, drilling and shaping of crystal boules and crystal ingots, used in conjunction with an adjustable tilt platform capable of pitch, yaw and roll movement, to allow in-situ measurement and automatic adjustment of crystal orientation with respect to the processing machine. The goniometer may be secured to either the tool itself or a portion of the machine which is adjacent the piece to be worked. Various embodiments include an x-ray goniometer and adjustable tilt platform incorporated into a core drilling machine, wire saw, surface grinder, polishing apparatus, or orientation flat or notch grinder. Incorporating an x-ray goniometer and adjustable tilt platform directly into a crystal processing machine results in a significant decrease in overall processing time and labor, and a significant increase in precision when processing crystal ingots into a final product, such as a notched wafer.
    • 本发明由一个x射线测角仪组成,该X射线测角仪直接邻近加工机床,该加工机器用于切割,铣削,钻孔和成形水晶棒和水晶锭,可与俯仰,偏转和滚动的可调倾斜平台结合使用 运动,以允许相对于加工机器进行原位测量和自动调整晶体取向。 测角仪可以固定到工具本身或机器的与待加工件相邻的部分。 各种实施例包括结合到钻芯机,线锯,平面磨床,抛光装置或取向平面或凹口研磨机中的x射线测角器和可调节的倾斜平台。 将x射线测角仪和可调节的倾斜平台直接结合到晶体加工机器中,导致总体处理时间和人力的显着降低,并且在将晶锭加工成最终产品(例如切口晶片)时,精度显着提高。
    • 8. 发明授权
    • Intelligent machines and process for production of monocrystalline products with goniometer continual feedback
    • 用于生产具有测角器连续反馈的单晶产品的智能机器和工艺
    • US09134260B2
    • 2015-09-15
    • US14563225
    • 2014-12-08
    • Rubicon Technology, Inc.
    • Srikanth Kamireddi
    • G01N23/207B23D59/00B28D5/00C30B33/00C30B33/06C30B35/00
    • G01N23/207B23D59/001B28D5/0088C30B33/00C30B33/06C30B35/00G01N2223/604
    • The present invention consists of an x-ray goniometer which is positioned directly adjacent to processing machines used in the cutting, milling, drilling and shaping of crystal boules and crystal ingots, used in conjunction with an adjustable tilt platform capable of pitch, yaw and roll movement, to allow in-situ measurement and automatic adjustment of crystal orientation with respect to the processing machine. The goniometer may be secured to either the tool itself or a portion of the machine which is adjacent the piece to be worked. Various embodiments include an x-ray goniometer and adjustable tilt platform incorporated into a core drilling machine, wire saw, surface grinder, polishing apparatus, or orientation flat or notch grinder. Incorporating an x-ray goniometer and adjustable tilt platform directly into a crystal processing machine results in a significant decrease in overall processing time and labor, and a significant increase in precision when processing crystal ingots into a final product, such as a notched wafer.
    • 本发明由一个x射线测角仪组成,该X射线测角仪直接邻近加工机床,该加工机器用于切割,铣削,钻孔和成形水晶棒和水晶锭,可与俯仰,偏转和滚动的可调倾斜平台结合使用 运动,以允许相对于加工机器进行原位测量和自动调整晶体取向。 测角仪可以固定到工具本身或机器的与待加工件相邻的部分。 各种实施例包括结合到钻芯机,线锯,平面磨床,抛光装置或取向平面或凹口研磨机中的x射线测角器和可调节的倾斜平台。 将x射线测角仪和可调节的倾斜平台直接结合到晶体加工机器中,导致总体处理时间和人力的显着降低,并且在将晶锭加工成最终产品(例如切口晶片)时,精度显着提高。
    • 10. 发明申请
    • METHOD FOR CREATING ATOMICALLY SHARP EDGES ON OBJECTS MADE OF CRYSTAL MATERIAL
    • 用于在晶体材料物体上形成原子形键的方法
    • US20140082947A1
    • 2014-03-27
    • US14035217
    • 2013-09-24
    • RUBICON TECHNOLOGY, INC.
    • SUNIL PHATAKFaisal Nabulsi
    • B26B9/00
    • B26B9/00C30B29/20C30B33/10
    • A process to make atomically sharp cutting devices is described. The process may provide for a cost effective and efficient technique of producing the atomically sharp cutting devices made from single crystal material such as, for example, sapphire, silicon carbide, silicon, and the like. The process may include identifying and choosing a preferred geometric orientation of the crystal material where cleavage can be promoted along a preferred natural plane of the single crystal material, thus ultimately producing an atomically sharp edge. The single crystal material may be covered at select surface locations by a photo-resist material arranged in a predetermined alignment with reference to the preferred plane to prevent etching at unexposed surface portions while permitting etching at exposed surface portions of the single crystal material. An atomic edge may be created by physical cleaving once the etching has reached a predetermined end-point.
    • 描述了制造原子锋利的切割装置的过程。 该方法可以提供生产由诸如蓝宝石,碳化硅,硅等的单晶材料制成的原子锋利切割装置的成本有效和有效的技术。 该方法可以包括识别和选择晶体材料的优选几何取向,其中可以沿着单晶材料的优选天然平面促进裂解,从而最终产生原子锋利的边缘。 可以通过相对于优选平面以预定对准布置的光刻胶材料在选择的表面位置处覆盖单晶材料,以防止在未曝光的表面部分处的蚀刻,同时允许在单晶材料的暴露表面部分处的蚀刻。 一旦蚀刻达到预定的终点,就可以通过物理分裂来产生原子边缘。