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1. 发明申请

US20120094556A1 Wave power 有权
标题翻译：波力
公开(公告)号：US20120094556A1
公开(公告)日：2012-04-19
申请号：US13199646
申请日：2011-09-06
申请人： Roger G. Hine , Derek L. Hine , Joseph D. Rizzi , Kurt A. F. Kiesow , Robert Burcham , William A. Stutz
发明人： Roger G. Hine , Derek L. Hine , Joseph D. Rizzi , Kurt A. F. Kiesow , Robert Burcham , William A. Stutz
IPC分类号： B63H19/02
CPC分类号： B63H19/02 , B63B2035/006 , B63H1/36 , B63H25/04 , B63H2025/028 , B63H2025/045 , Y02E10/38 , Y02T70/59
摘要： A wave-powered water vehicle includes a surface float, a submerged swimmer, and a tether which connects the float and the swimmer, so that the swimmer moves up and down as a result of wave motion. The swimmer includes one or more fins which interact with the water as the swimmer moves up and down, and generate forces which propel the vehicle forward. The vehicle, which need not be manned, can carry communication and control equipment so that it can follow a course directed by signals sent to it, and so that it can record or transmit data from sensors on the vehicle.
摘要翻译：波浪水车辆包括表面浮子，潜水游泳者和连接浮子和游泳者的系绳，使得游泳者由于波浪运动而上下移动。游泳者包括一个或多个鳍，当游泳者上下移动时，它们与水相互作用，并产生推动车辆前进的力。无需载人的车辆可以携带通信和控制设备，使其可以遵循发送给它的信号所指导的路线，并且可以记录或传输车辆上传感器的数据。

2. 发明授权

US07798759B2 Modular terminal for high-throughput AMHS 有权
标题翻译：用于高通量AMHS的模块化终端
公开(公告)号：US07798759B2
公开(公告)日：2010-09-21
申请号：US11433980
申请日：2006-05-15
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/00
CPC分类号： H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67766 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.
摘要翻译：本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。在一个实施例中，第一输送系统包括基于天花板的输送机，第二输送系统包括基于地板的输送机。本发明还可以包括存储架，优选地基本上水平地围绕公共垂直平面对准，其中一个传送系统的一部分。运输系统可以位于最上面的储物架的正上方，或者位于最下面的储物架之下，以便增加储存容量。垂直模块在运输系统和至少一个存储架之间运输容器。

3. 发明申请

US20100080672A1 Direct loading to and from a conveyor system 审中-公开
标题翻译：直接装载到和从输送机系统
公开(公告)号：US20100080672A1
公开(公告)日：2010-04-01
申请号：US12456645
申请日：2009-06-19
申请人： Anthony C. Bonora , Joseph Fatula , Roumen Iliev Deyanov , Hiroshi Ito , Roger G. Hine
发明人： Anthony C. Bonora , Joseph Fatula , Roumen Iliev Deyanov , Hiroshi Ito , Roger G. Hine
IPC分类号： H01L21/677 , B65G15/20 , B65G15/22
CPC分类号： H01L21/67706 , H01L21/6773 , H01L21/67736 , H01L21/67775
摘要： A direct load system and conveyor is disclosed. The direct load system includes a load port for moving containers in a vertical orientation between a lower position near the conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass, and allows the support to be placed in the nested location, which is below a conveyor path defined by the belts of the conveyor. If a container is to be lifted off of the belts, the single arm raises up from the nested location, to then raise the container up and off of the conveyor and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e.g., wafers, etc.) to locations/tools of a fabrication facility. In alternate embodiments, it is possible to replace the belt with conveying wheels.
摘要翻译：公开了一种直接负载系统和输送机。直接负载系统包括用于在垂直方向移动容器的装载端口，其位于靠近输送机的下部位置和靠近装载端口门的上部位置之间。负载端口包括单个臂，其以垂直构造移动支撑件，使得移动单臂允许支撑件在输送机的梁之间的嵌套位置中降低到输送机。输送机包括梁中的单个槽，其允许单臂通过，并且允许支撑件被放置在嵌套位置，该嵌套位置位于由输送机的带定义的传送路径的下方。如果一个集装箱要从皮带上提起，那么单臂从嵌套的位置上升，然后将容器从输送机上升起并离开装载口门。单个臂和输送机槽的接口可以被其他工具使用，例如储存器或工具，其需要直接访问用于将容器（例如，晶片等）运送到制造设施的位置/工具的输送机。在替代实施例中，可以用输送轮代替带。

4. 发明授权

US07669903B2 Ultra low contact area end effector 有权
标题翻译：超低接触面末端执行器
公开(公告)号：US07669903B2
公开(公告)日：2010-03-02
申请号：US11870560
申请日：2007-10-11
申请人： Anthony C. Bonora , Roger G. Hine
发明人： Anthony C. Bonora , Roger G. Hine
IPC分类号： B25J15/06
CPC分类号： H01L21/6838 , Y10S294/902 , Y10S414/141
摘要： The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly.
摘要翻译：本发明包括具有工件支撑件的真空端部执行器，其与变形的工件表面一起工作。在一个实施例中，每个工件支撑件具有万向架和使工件表面与支撑件的外边缘接触的能力。每个工件支撑件优选地提供刀形接触边缘以最小化支撑件和工件之间的接触面积，同时仍然提供有效的真空区域以将晶片牢固地保持在支撑件上。在另一个实施例中，每个工件支撑件是可更换的，而不必从机器人组件移除端部执行器。

5. 发明授权

US07648327B2 Wafer engine 有权
标题翻译：晶圆发动机
公开(公告)号：US07648327B2
公开(公告)日：2010-01-19
申请号：US11305256
申请日：2005-12-16
申请人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
发明人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
IPC分类号： B65G49/07
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
摘要翻译：本发明是用于输送晶片的晶片引擎。晶片引擎包括用于沿x轴移动晶片的线性驱动器，用于使晶片围绕θ轴旋转的旋转驱动器，用于沿着z轴移动晶片的线性驱动器和用于沿着径向移动晶片的线性驱动器轴。用于沿着z轴移动晶片的线性驱动器偏离旋转驱动。当旋转驱动器围绕θ轴旋转时，z轴和径向轴驱动器也绕θ轴旋转。优选地，用于沿着径向轴线移动晶片的线性驱动器是具有上端和下端执行器的双重或快速互换滑动体机构。滑动体机构优选地还具有对准晶片并执行各种检查和标记程序的装置。

6. 发明授权

US07217076B2 Semiconductor material handling system 有权
标题翻译：半导体材料处理系统
公开(公告)号：US07217076B2
公开(公告)日：2007-05-15
申请号：US10087092
申请日：2002-03-01
申请人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
发明人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , H01L21/67766 , H01L21/67778 , H01L21/68707 , Y10S414/139
摘要： The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.
摘要翻译：半导体材料处理系统是可以安装到处理工具的前端或被集成到处理工具中的EFEM。 EFEM由统一的框架构成，EFEM组件（如晶片引擎和SMIF盒前进板）可以安装到。该框架用作通用安装结构，EFEM组件可用作对准目的的参考。由于EFEM组件不必相对于彼此的位置对准，所以校准（如果需要）被大大简化。 EFEM还具有减少的占地面积，允许EFEM安装到加工工具的前端，而不是延伸到fab楼层。因此，在EFEM和fab楼之间释放空间。仅作为示例，该空间可以用作处理工具的维护访问区域，而不必首先去除EFEM。

7. 发明授权

US06591160B2 Self teaching robot 失效
公开(公告)号：US06591160B2
公开(公告)日：2003-07-08
申请号：US09729463
申请日：2000-12-04
申请人： Roger G. Hine , Graham L. Hine
发明人： Roger G. Hine , Graham L. Hine
IPC分类号： G06F700
CPC分类号： H01L21/67259 , H01L21/681 , H01L21/68707
摘要： A robot calibration system for calibration of a workpiece handling robot relative to a station. The workpiece handling robot includes a sensor mounted on an end effector. The robot calibration system also includes a target, which in coordination with the sensor, allows a control system to determine a center of the target. The target is a wafer in the shape of a disk. A pattern is on at least one side of the workpiece, preferably on a bottom side of the target. The pattern comprises alternating black and white areas. The workpiece handling robot is placed in front of the station which includes a cassette mounted thereon. The cassette has a support surface which supports the target. Once the z-height of the end effector is established with the end effector being in close proximity to a lowermost support surface of the cassette, the end effector proceeds to move in a search pattern searching the pattern for transition points from black to white areas. The control system stores these transition points and uses the transition points in an algorithmic equation to determine the center of the target. Once the center of the target has been identified, the control system knows the spacial relation between the robot and the station, and in particular the position of the workpieces at the station. The station may thereafter be loaded with workpieces and processed accordingly.

8. 发明授权

US08287323B2 Wave power components 有权
标题翻译：波功率元件
公开(公告)号：US08287323B2
公开(公告)日：2012-10-16
申请号：US12082457
申请日：2008-04-11
申请人： Roger G. Hine , Derek L. Hine , Joseph D. Rizzi , Kurt A. F. Kiesow , Robert Burcham , William A. Stutz
发明人： Roger G. Hine , Derek L. Hine , Joseph D. Rizzi , Kurt A. F. Kiesow , Robert Burcham , William A. Stutz
IPC分类号： B63H19/02
CPC分类号： B63H1/36 , B63B2035/006 , B63H19/02 , B63H19/04 , B63H25/04 , B63H2025/028 , B63H2025/045 , Y02T70/59
摘要： A wave-powered water vehicle includes a surface float, a submerged swimmer, and a tether which connects the float and the swimmer, so that the swimmer moves up and down as a result of wave motion. The swimmer includes one or more fins which interact with the water as the swimmer moves up and down, and generate forces which propel the vehicle forward. The vehicle, which need not be manned, can carry communication and control equipment so that it can follow a course directed by signals sent to it, and so that it can record or transmit data from sensors on the vehicle.
摘要翻译：波浪水车辆包括表面浮子，潜水游泳者和连接浮子和游泳者的系绳，使得游泳者由于波浪运动而上下移动。游泳者包括一个或多个鳍，当游泳者上下移动时，它们与水相互作用，并产生推动车辆前进的力。无需载人的车辆可以携带通信和控制设备，使其可以遵循发送给它的信号所指导的路线，并且可以记录或传输车辆上传感器的数据。

9. 发明授权

US07771151B2 Interface between conveyor and semiconductor process tool load port 有权
标题翻译：输送机和半导体加工工具加载口之间的接口
公开(公告)号：US07771151B2
公开(公告)日：2010-08-10
申请号：US11178072
申请日：2005-07-08
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： H01L21/68
CPC分类号： H01L21/67766 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14 , Y10T74/20305
摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.
摘要翻译：本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。工具装载设备可以服务于单个装载端口或多个装载端口。无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个加载端口。

10. 发明申请

US20090311925A1 Wave Power 有权
标题翻译：波力
公开(公告)号：US20090311925A1
公开(公告)日：2009-12-17
申请号：US12087961
申请日：2007-01-18
申请人： Roger G. Hine , Derek L. Hine , Joseph D. Rizzi , Kurt A.F. Kiesow , Robert Burcham , William A. Stutz
发明人： Roger G. Hine , Derek L. Hine , Joseph D. Rizzi , Kurt A.F. Kiesow , Robert Burcham , William A. Stutz
IPC分类号： B63H1/32 , G05D1/02
CPC分类号： B63H19/02 , B63B2035/006 , B63H1/36 , B63H25/04 , B63H2025/028 , B63H2025/045 , Y02E10/38 , Y02T70/59
摘要： A wave-powered water vehicle includes a surface float, a submerged swimmer, and a tether which connects the float and the swimmer, so that the swimmer moves up and down as a result of wave motion. The swimmer includes one or more fins which interact with the water as the swimmer moves up and down, and generate forces which propel the vehicle forward. The vehicle, which need not be manned, can carry communication and control equipment so that it can follow a course directed by signals sent to it, and so that it can record or transmit data from sensors on the vehicle.
摘要翻译：波浪水车辆包括表面浮子，潜水游泳者和连接浮子和游泳者的系绳，使得游泳者由于波浪运动而上下移动。游泳者包括一个或多个鳍，当游泳者上下移动时，它们与水相互作用，并产生推动车辆前进的力。无需载人的车辆可以携带通信和控制设备，使其可以遵循发送给它的信号所指导的路线，并且可以记录或传输车辆上传感器的数据。

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