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    • 2. 发明授权
    • Interface between conveyor and semiconductor process tool load port
    • 输送机和半导体加工工具加载口之间的接口
    • US07771151B2
    • 2010-08-10
    • US11178072
    • 2005-07-08
    • Anthony C. BonoraMichael KrolakRoger G. Hine
    • Anthony C. BonoraMichael KrolakRoger G. Hine
    • H01L21/68
    • H01L21/67766H01L21/67736H01L21/67769H01L21/67775Y10S414/14Y10T74/20305
    • The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.
    • 本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。 工具装载设备可以服务于单个装载端口或多个装载端口。 无论如何,工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。 工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。 在另一个实施例中,工具装载装置与x驱动组件联接,该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个 加载端口。
    • 5. 发明授权
    • Direct tool loading
    • 直接加载工具
    • US07410340B2
    • 2008-08-12
    • US11064880
    • 2005-02-24
    • Anthony C. BonoraMichael KrolakRoger G. Hine
    • Anthony C. BonoraMichael KrolakRoger G. Hine
    • B65G1/133
    • H01L21/67775H01L21/67736Y10S414/14
    • The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
    • 本发明包括容器运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中,负载端口包括可垂直移动的FOUP提前板组件,其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中,负载端口包括可垂直移动的支撑结构,其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子,负载口可装载或卸载容器。
    • 8. 发明授权
    • Workpiece handling robot
    • 工件处理机器人
    • US06634851B1
    • 2003-10-21
    • US09483625
    • 2000-01-14
    • Anthony C. BonoraRoger G. HineMichael KrolakJohn F. Grilli
    • Anthony C. BonoraRoger G. HineMichael KrolakJohn F. Grilli
    • B25J1804
    • H01L21/68707B25J9/042B25J9/104B25J18/02B25J18/04B25J19/0079H01L21/67742Y10T74/20323
    • A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.
    • 公开了一种晶片处理机器人,用于在晶片制造厂内的工艺工具和/或工件存储位置之间输送诸如半导体晶片和平板显示器的工件。 机器人包括一个底座,它包括一个刚性骨架,为机器人提供了很大程度的结构稳定性。 基座还包括桅杆,用于平移桅杆的线性驱动系统和用于旋转桅杆的台肩驱动系统。 肩部驱动系统包括用于提供桅杆部分的刚性,平滑和精确的输出旋转的谐波驱动减速系统。 机器人还包括固定地安装到桅杆上以使桅杆旋转的近端链节和可旋转地安装到近端连杆的远端连杆。 用于支撑各种工件的端部执行器旋转地安装到远端连杆的远端。 肘部驱动器安装到近端连杆,向下延伸到桅杆部分中,用于驱动远端连杆相对于近端连杆的旋转。 扭矩由弯头驱动器和远端连杆的从动皮带轮缠绕在驱动皮带轮周围的钢带从弯头传动装置传递到远端连杆。 类似地,扭矩通过分别缠绕在设置在远端连杆和端部执行器中的滑轮周围的第二组钢带从远端连杆传递到末端执行器。