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1. 发明授权

US07771151B2 Interface between conveyor and semiconductor process tool load port 有权
标题翻译：输送机和半导体加工工具加载口之间的接口
公开(公告)号：US07771151B2
公开(公告)日：2010-08-10
申请号：US11178072
申请日：2005-07-08
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： H01L21/68
CPC分类号： H01L21/67766 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14 , Y10T74/20305
摘要： The present invention generally comprises a tool load device for transferring a container between a container transport system and a processing tool. The tool load device may service a single load port or multiple load ports. Regardless, the tool load device is preferably located between the load port of the processing tool and the section of the container transport system passing the processing tool. The tool load device provides an improved method of moving containers between a conventional load port and, for example, a conveyor. In another embodiment, the tool load device is coupled with an x-drive assembly that moves the tool load device along a path that is substantially parallel to the container transport system passing in front of the load port—allowing the tool load device to service multiple load ports.
摘要翻译：本发明通常包括用于在容器运输系统和加工工具之间转运容器的工具装载装置。工具装载设备可以服务于单个装载端口或多个装载端口。无论如何，工具装载装置优选地位于处理工具的装载端口和通过处理工具的容器运输系统的部分之间。工具装载装置提供了一种在常规负载端口和例如输送机之间移动容器的改进方法。在另一个实施例中，工具装载装置与x驱动组件联接，该x驱动组件沿着基本上平行于通过装载端口前方的集装箱运输系统的路径移动工具装载装置 - 允许工具装载装置服务多个加载端口。

2. 发明授权

US07410340B2 Direct tool loading 失效
标题翻译：直接加载工具
公开(公告)号：US07410340B2
公开(公告)日：2008-08-12
申请号：US11064880
申请日：2005-02-24
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
摘要翻译：本发明包括容器运输和装载系统。该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

3. 发明授权

US06634851B1 Workpiece handling robot 有权
标题翻译：工件处理机器人
公开(公告)号：US06634851B1
公开(公告)日：2003-10-21
申请号：US09483625
申请日：2000-01-14
申请人： Anthony C. Bonora , Roger G. Hine , Michael Krolak , John F. Grilli
发明人： Anthony C. Bonora , Roger G. Hine , Michael Krolak , John F. Grilli
IPC分类号： B25J1804
CPC分类号： H01L21/68707 , B25J9/042 , B25J9/104 , B25J18/02 , B25J18/04 , B25J19/0079 , H01L21/67742 , Y10T74/20323
摘要： A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.
摘要翻译：公开了一种晶片处理机器人，用于在晶片制造厂内的工艺工具和/或工件存储位置之间输送诸如半导体晶片和平板显示器的工件。机器人包括一个底座，它包括一个刚性骨架，为机器人提供了很大程度的结构稳定性。基座还包括桅杆，用于平移桅杆的线性驱动系统和用于旋转桅杆的台肩驱动系统。肩部驱动系统包括用于提供桅杆部分的刚性，平滑和精确的输出旋转的谐波驱动减速系统。机器人还包括固定地安装到桅杆上以使桅杆旋转的近端链节和可旋转地安装到近端连杆的远端连杆。用于支撑各种工件的端部执行器旋转地安装到远端连杆的远端。肘部驱动器安装到近端连杆，向下延伸到桅杆部分中，用于驱动远端连杆相对于近端连杆的旋转。扭矩由弯头驱动器和远端连杆的从动皮带轮缠绕在驱动皮带轮周围的钢带从弯头传动装置传递到远端连杆。类似地，扭矩通过分别缠绕在设置在远端连杆和端部执行器中的滑轮周围的第二组钢带从远端连杆传递到末端执行器。

4. 发明授权

US07798759B2 Modular terminal for high-throughput AMHS 有权
标题翻译：用于高通量AMHS的模块化终端
公开(公告)号：US07798759B2
公开(公告)日：2010-09-21
申请号：US11433980
申请日：2006-05-15
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/00
CPC分类号： H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67766 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： The present invention generally comprises an apparatus for transporting containers between a first transport system and a second transport system. In one embodiment, the first transport system comprises a ceiling-based conveyor and the second transport system comprises a floor-based conveyor. The present invention may further include storage shelves, preferably substantially horizontally aligned about a common vertical plane with a section of one of the transport systems. The transport system may be located either directly above the uppermost storage shelf or beneath the lowermost storage shelf in order to add storage capacity within the fab. A vertical module transports containers between the transport systems and the at least one storage shelf.
摘要翻译：本发明通常包括用于在第一输送系统和第二输送系统之间输送容器的装置。在一个实施例中，第一输送系统包括基于天花板的输送机，第二输送系统包括基于地板的输送机。本发明还可以包括存储架，优选地基本上水平地围绕公共垂直平面对准，其中一个传送系统的一部分。运输系统可以位于最上面的储物架的正上方，或者位于最下面的储物架之下，以便增加储存容量。垂直模块在运输系统和至少一个存储架之间运输容器。

5. 发明授权

US07648327B2 Wafer engine 有权
标题翻译：晶圆发动机
公开(公告)号：US07648327B2
公开(公告)日：2010-01-19
申请号：US11305256
申请日：2005-12-16
申请人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
发明人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
IPC分类号： B65G49/07
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/137
摘要： The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
摘要翻译：本发明是用于输送晶片的晶片引擎。晶片引擎包括用于沿x轴移动晶片的线性驱动器，用于使晶片围绕θ轴旋转的旋转驱动器，用于沿着z轴移动晶片的线性驱动器和用于沿着径向移动晶片的线性驱动器轴。用于沿着z轴移动晶片的线性驱动器偏离旋转驱动。当旋转驱动器围绕θ轴旋转时，z轴和径向轴驱动器也绕θ轴旋转。优选地，用于沿着径向轴线移动晶片的线性驱动器是具有上端和下端执行器的双重或快速互换滑动体机构。滑动体机构优选地还具有对准晶片并执行各种检查和标记程序的装置。

6. 发明授权

US07217076B2 Semiconductor material handling system 有权
标题翻译：半导体材料处理系统
公开(公告)号：US07217076B2
公开(公告)日：2007-05-15
申请号：US10087092
申请日：2002-03-01
申请人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
发明人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
IPC分类号： B65G49/07
CPC分类号： H01L21/67775 , H01L21/67766 , H01L21/67778 , H01L21/68707 , Y10S414/139
摘要： The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.
摘要翻译：半导体材料处理系统是可以安装到处理工具的前端或被集成到处理工具中的EFEM。 EFEM由统一的框架构成，EFEM组件（如晶片引擎和SMIF盒前进板）可以安装到。该框架用作通用安装结构，EFEM组件可用作对准目的的参考。由于EFEM组件不必相对于彼此的位置对准，所以校准（如果需要）被大大简化。 EFEM还具有减少的占地面积，允许EFEM安装到加工工具的前端，而不是延伸到fab楼层。因此，在EFEM和fab楼之间释放空间。仅作为示例，该空间可以用作处理工具的维护访问区域，而不必首先去除EFEM。

7. 发明授权

US07841820B2 Universal modular wafer transport system 有权
标题翻译：通用模块化晶圆输送系统
公开(公告)号：US07841820B2
公开(公告)日：2010-11-30
申请号：US11938236
申请日：2007-11-09
申请人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
发明人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
IPC分类号： B65G54/02
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译：本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。在一个实施例中，晶片由在运输箱内行进的晶片梭运送。运输箱的内部与周围的晶片制造设备的大气条件隔离。因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。晶片梭可能同时传送多于一个晶片。运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。

8. 发明授权

US07597523B2 Variable lot size load port 失效
标题翻译：可变批量负载端口
公开(公告)号：US07597523B2
公开(公告)日：2009-10-06
申请号：US11774750
申请日：2007-07-09
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine , Theodore W. Rogers
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine , Theodore W. Rogers
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.
摘要翻译：可变批量装载端口组件包括工具接口，前进板和密封板。工具界面大致垂直延伸，并且具有前表面，大体平行于前表面的后表面和孔。前进板位于孔下方的工具界面的前部。前进板大致水平地延伸并且被配置为支撑前开口统一舱（FOUP）。推进板在缩回位置和高级位置之间平移。前进位置靠近工具界面，缩回位置与工具界面间隔开。密封板具有固定到工具接口的上端，并且下端覆盖孔的一部分以形成减小的孔。密封板成形为与安装到前进板的选定容量的FOUP的前凸缘形成邻近密封件并且被带到前进位置。

9. 发明授权

US07445415B2 Direct tool loading 失效
标题翻译：直接加载工具
公开(公告)号：US07445415B2
公开(公告)日：2008-11-04
申请号：US11177645
申请日：2005-07-08
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a load port for providing access to an article that is stored in a container having a container door removably coupled to a container shell. The load port preferably loads/unloads a container directly from a container transport system. In one embodiment, the load port includes a plate having an opening, a container support plate, a drive assembly for moving the support plate vertically and a shroud to partially enclose the opening. The shroud, which may be affixed to the mounting plate, has an open top and bottom. The shroud contains a mechanism for retaining the container shell at a controllable height. During operation, a container is raised from the transport system into the shroud until the container shell is retained by the mechanism. After the container shell is uncoupled from the container door, the container support plate is lowered until the article is accessible through the opening. The container shell remains located at the controllable height. The container shell, in combination with the shroud, creates a mini-environment isolating the article from ambient conditions in the fabrication facility.
摘要翻译：本发明包括一个负载端口，用于提供对存储在具有可拆卸地联接到容器壳体的容器门的容器中的物品的通路。负载端口优选地从容器运输系统直接装载/卸载容器。在一个实施例中，负载端口包括具有开口的板，容器支撑板，用于垂直移动支撑板的驱动组件和用于部分地封闭开口的护罩。可以固定到安装板的护罩具有敞开的顶部和底部。护罩包含用于将容器壳保持在可控高度的机构。在操作期间，容器从运输系统升起到护罩中，直到容器壳体被机构保持。在容器壳与容器门分离后，容器支撑板被降低直到制品通过开口接近。容器壳保持位于可控高度。容器壳与护罩组合形成了将制品与制造设备中的环境条件隔离的迷你环境。

10. 发明授权

US07100340B2 Unified frame for semiconductor material handling system 有权
公开(公告)号：US07100340B2
公开(公告)日：2006-09-05
申请号：US10087638
申请日：2002-03-01
申请人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
发明人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
IPC分类号： H01J5/02
CPC分类号： H01L21/68707 , H01L21/67766 , H01L21/67775 , H01L21/67778 , Y10S414/135
摘要： The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.

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