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    • 2. 发明授权
    • Floating gate FPGA cell with counter-doped select device
    • 具有反掺杂选择器件的浮栅FPGA单元
    • US5894148A
    • 1999-04-13
    • US708074
    • 1996-08-09
    • Jack Zezhong PengRobert U. BrozeKyung Joon HanVictor Levchenko
    • Jack Zezhong PengRobert U. BrozeKyung Joon HanVictor Levchenko
    • H01L21/336H01L29/788
    • H01L29/66825H01L29/7885
    • The present invention provides for an improved EPROM transistor cell which forms the programming portion of the programmable interconnect interconnect of an FPGA integrated circuit, and a method of manufacturing the EPROM cell. The EPROM cell has a floating gate disposed over a P region of the substrate. Aligned with one edge of the floating gate and at the surface of the substrate is a lightly doped P- region; on the opposite edge of the floating gate is a heavily doped N+ region. A control gate lies over the P-, P substrate and over the N+ region. N+ regions are formed at the opposite edges of the control gate. One N+ region is contiguous to the P- region and forms the source of the EPROM cell and the other N+ region is connected to the N+ region under the control gate and forms the drain of the EPROM cell. This structure allows for easy process control of the V.sub.T of the access transistor formed by the control gate and the P- surface, and of the space charge region formed by the P substrate and the N+ drain of the EPROM cell.
    • 本发明提供了形成FPGA集成电路的可编程互连互连的编程部分的改进的EPROM晶体管单元以及制造EPROM单元的方法。 EPROM单元具有设置在基板的P区上方的浮置栅极。 与浮动栅极的一个边缘并且在衬底的表面处对准的是轻掺杂的P-区域; 在浮置栅极的相对边缘上是重掺杂的N +区域。 控制门位于P,P衬底和N +区上方。 N +区域形成在控制栅极的相对边缘处。 一个N +区域与P-区域相邻并形成EPROM单元的源极,另一个N +区域连接到控制栅极下面的N +区域,并形成EPROM单元的漏极。 这种结构允许由控制栅极和P-表面形成的存取晶体管的VT以及由P基板和EPROM单元的N +漏极形成的空间电荷区域的VT的容易的过程控制。
    • 5. 发明授权
    • Nonvolatile reprogrammable interconnect cell with FN tunneling and
programming method thereof
    • 具有FN隧道及其编程方法的非易失性可编程互连单元
    • US5633518A
    • 1997-05-27
    • US508914
    • 1995-07-28
    • Robert U. Broze
    • Robert U. Broze
    • G11C16/04H01L21/82H01L21/8247H01L27/115H01L29/788H01L29/792H01L29/76
    • H01L27/11517H01L27/115H01L29/7883
    • An array of programmable interconnect cells, each cell having a floating gate as the gate of an MOS switch transistor which programmably connect or disconnects nodes, is used in an FPGA. The floating gate of each cell, which is capacitively coupled to a control gate, is programmed by Fowler-Nordheim tunneling through an tunneling oxide above a programming/erase line in the integrated circuit substrate. Contiguous and parallel to the programming/erase line is at least one tunneling control line which forms a PN junction in close proximity to the programming/erase line region under the tunneling oxide. Under a reverse bias, a deep charge depletion region is formed in the programming/erase line region to block tunneling. In this manner, a selected cell can be programmed/erased, while the non-selected cells are not.
    • 在FPGA中使用可编程互连单元的阵列,每个单元具有浮动栅极作为可编程地连接或断开节点的MOS开关晶体管的栅极。 电容耦合到控制栅极的每个电池的浮动栅极由Fowler-Nordheim通过穿过集成电路衬底中的编程/擦除线路上的隧道氧化物进行隧道编程。 与编程/擦除线相连和并联的是至少一个隧道控制线,其在隧道氧化物下方的编程/擦除线区域附近形成PN结。 在反向偏压下,在编程/擦除线区域中形成深电荷耗尽区,以阻止隧穿。 以这种方式,可以对所选择的单元进行编程/擦除,而未选择的单元不被编程。