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2. 发明授权

US6113288A Water deposition apparatus and method 失效
标题翻译：水沉积装置及方法
公开(公告)号：US6113288A
公开(公告)日：2000-09-05
申请号：US664333
申请日：1996-06-14
申请人： Lee F. Frank , Robert John Baron , Robert Michael Train
发明人： Lee F. Frank , Robert John Baron , Robert Michael Train
IPC分类号： G03C11/00 , D21G7/00 , G03C1/74 , G03D3/00 , G03D5/00 , G03D15/02 , G03D13/00
CPC分类号： G03D5/00 , D21G7/00 , G03C1/74 , G03D15/022
摘要： Apparatus and method for depositing water onto the surface of a substrate passed through the apparatus. The apparatus has a housing that defines an internal atmosphere confined in at least partial isolation from the ambient atmosphere. The housing has a moisture saturation portion, a deposition portion, and a passageway. The moisture saturation portion has a water supply and a vapor reservoir. The water supply contains a quantity of water. The vapor reservoir holds a volume of the interior atmosphere in thermal and phase equilibrium with the water in the water supply. The deposition portion has a plenum wall surrounding a central chamber. The plenum wall is substantially insulated from ambient temperature variations and has a pair of opposed substrate gaps. The gaps define a path for the substrate through the chamber. The passageway communicates with the vapor reservoir and the chamber. A primary heater is disposed to heat the water in the water supply. A secondary heater is disposed within the passageway between the vapor reservoir and the chamber. A fan drives the internal atmosphere from the vapor reservoir through the passageway to the chamber. A controller is operatively connected to the primary and secondary heaters. The controller senses wet and dry bulb temperatures of the internal atmosphere in the chamber. The controller actuates the primary heater at a range of wet bulb temperatures below a predetermined wet bulb limit temperature and actuates the secondary heater at a range of dry bulb temperatures below a predetermined dry bulb limit temperature. The dry bulb limit temperature is greater than the wet bulb limit temperature.
摘要翻译：用于将水沉积到穿过该设备的基板的表面上的装置和方法。该装置具有外壳，该外壳限定了与环境大气至少部分隔离的内部气氛。壳体具有湿气饱和部分，沉积部分和通道。水分饱和部分具有供水和蒸汽储存器。供水包含一定量的水。蒸汽储存器保持与供水中的水的热和相平衡的内部气氛的体积。沉积部分具有围绕中心室的增压壁。气室壁基本上与环境温度变化绝缘，并具有一对相对的基板间隙。间隙限定了通过腔室的衬底的路径。该通道与蒸气储存器和腔室连通。设置主加热器以加热供水中的水。二次加热器设置在蒸气储存器和腔室之间的通道内。风扇通过通道将气体从蒸汽储存器驱动到室。控制器可操作地连接到主加热器和辅助加热器。控制器感测室内内部气氛的湿和干球温度。控制器在低于预定湿球限制温度的湿球温度的范围内致动主加热器，并且在低于预定干球限制温度的干球温度范围内致动二次加热器。干球限制温度大于湿球温度限制。

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