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1. 发明授权

US07493231B2 Process for determining the actual position of a rotation axis of a transportation mechanism 失效
标题翻译：用于确定运输机构的旋转轴线的实际位置的处理
公开(公告)号：US07493231B2
公开(公告)日：2009-02-17
申请号：US11491477
申请日：2006-07-21
申请人： Ottmar Graf
发明人： Ottmar Graf
IPC分类号： G01C9/00 , G06F19/00
CPC分类号： G01C9/00 , H01L21/67259 , H01L21/67742 , H01L21/68
摘要： Determination of the actual position of the rotation axis of a transportation mechanism relative to a reference axis, in particular relative to gravity, is performed with at least one inclination sensor mounted to the transportation mechanism having at least one measurement axis, and comprises the measurement of the inclination of at least the one inclination sensor along the at least one measurement axis in a first rotation position of the transportation mechanism, and the measurement of the inclination of the at least one inclination sensor along the at least one measurement axis in a second rotation position. The actual position of the rotation axis of the transportation mechanism may be determined from the measurement values of the inclination sensor and the angular separation between the rotation positions. The process is suitable in particular for a process to align the rotation axis of a transportation mechanism and for a process for replacing a transportation mechanism.
摘要翻译：运输机构相对于参考轴线，特别是相对于重力的旋转轴线的实际位置的确定是用至少一个安装在具有至少一个测量轴线的运输机构的倾斜传感器进行的，并且包括测量至少一个倾斜传感器沿着所述至少一个测量轴线在所述输送机构的第一旋转位置中的倾斜度，以及所述至少一个倾斜传感器沿着所述至少一个测量轴线在第二旋转中的倾斜度的测量位置。运输机构的旋转轴的实际位置可以根据倾斜传感器的测量值和旋转位置之间的角度间隔来确定。该方法特别适合用于对准运输机构的旋转轴线和用于替换运输机构的过程的过程。

2. 发明授权

US07004716B2 Device and method for aligning disk-shaped substrates 失效
公开(公告)号：US07004716B2
公开(公告)日：2006-02-28
申请号：US10148656
申请日：2000-11-29
申请人： Ottmar Graf , Paul Mantz
发明人： Ottmar Graf , Paul Mantz
IPC分类号： B25J11/00
CPC分类号： H01L21/68 , Y10S414/136
摘要： The invention relates to a simple and cost-effective method for aligning substrates. In order to achieve this, the invention provides a device for aligning disc-shaped substrates, in particular semiconductor wafers, comprising an alignment detection unit, at least one first support for receiving the substrate, which forms an oblique plane in relation to the horizontal, a stop against which the substrate can be displaced as a result of the oblique angle and a rotational device for rotating the substrate. The invention also relates to a method for aligning disc-shaped substrates, in particular semiconductor wafers, comprising the following steps: displacement of the substrate into an oblique position in relation to the horizontal, in which the substrate is held on a support which forms a tilted plane in relation to the horizontal and lies against a stop as a result of the oblique angle; rotation of the substrate into a predefined rotational position; and monitoring of the rotational position using a detection unit.

3. 发明申请

US20070150226A1 Process for determining the actual position of a rotation axis of a transportation mechanism 失效
标题翻译：用于确定运输机构的旋转轴线的实际位置的处理
公开(公告)号：US20070150226A1
公开(公告)日：2007-06-28
申请号：US11491477
申请日：2006-07-21
申请人： Ottmar Graf
发明人： Ottmar Graf
IPC分类号： G01C17/00
CPC分类号： G01C9/00 , H01L21/67259 , H01L21/67742 , H01L21/68
摘要： Determination of the actual position of the rotation axis of a transportation mechanism relative to a reference axis, in particular relative to gravity, is performed with at least one inclination sensor mounted to the transportation mechanism having at least one measurement axis, and comprises the measurement of the inclination of at least the one inclination sensor along the at least one measurement axis in a first rotation position of the transportation mechanism, and the measurement of the inclination of the at least one inclination sensor along the at least one measurement axis in a second rotation position. The actual position of the rotation axis of the transportation mechanism may be determined from the measurement values of the inclination sensor and the angular separation between the rotation positions. The process is suitable in particular for a process to align the rotation axis of a transportation mechanism and for a process for replacing a transportation mechanism.
摘要翻译：运输机构相对于参考轴线，特别是相对于重力的旋转轴线的实际位置的确定是用至少一个安装在具有至少一个测量轴线的运输机构的倾斜传感器进行的，并且包括测量至少一个倾斜传感器沿着所述至少一个测量轴线在所述输送机构的第一旋转位置中的倾斜度，以及所述至少一个倾斜传感器沿着所述至少一个测量轴线在第二旋转中的倾斜度的测量位置。运输机构的旋转轴的实际位置可以根据倾斜传感器的测量值和旋转位置之间的角度间隔来确定。该方法特别适合用于对准运输机构的旋转轴线和用于替换运输机构的过程的过程。

4. 发明申请

US20060245906A1 Device for accommodating disk-shaped objects and apparatus for handling objects 审中-公开
标题翻译：用于容纳盘形物体的装置和处理物体的装置
公开(公告)号：US20060245906A1
公开(公告)日：2006-11-02
申请号：US11333727
申请日：2006-01-17
申请人： Arthur Pelzmann , Martin Drechsler , Jurgen Niess , Michael Grandy , Hin Chung , Paul Mantz , Ottmar Graf
发明人： Arthur Pelzmann , Martin Drechsler , Jurgen Niess , Michael Grandy , Hin Chung , Paul Mantz , Ottmar Graf
IPC分类号： B66C23/00
CPC分类号： H01L21/68735 , H01L21/67109 , H01L21/6835 , H01L21/68742 , H01L21/68764 , H01L21/68771 , H01L2221/68313
摘要： A device is provided for accommodating disk-shaped objects, preferably semiconductor wafers for a thermal treatment thereof. The device has a carrier with at least two recesses for respective objects, and at least one cover for covering at least one of the recesses. A handling apparatus is also provided and has at least one transport arm, at least one support arm, at least one support drive provided on the arm for supporting, via vacuum, at least one object that is to be handled, a device for determining the individual weight of an object, and a vacuum control device for altering the vacuum as a function of the individual weight of an object.
摘要翻译：提供了用于容纳盘形物体的装置，优选用于其热处理的半导体晶片。该装置具有用于相应物体的至少两个凹部的载体，以及用于覆盖至少一个凹部的至少一个盖。还提供了处理装置，并且具有至少一个输送臂，至少一个支撑臂，设置在臂上的至少一个支撑驱动器，用于经由真空支撑待处理的至少一个物体，用于确定物体的个体重量，以及用于根据物体的个体重量来改变真空度的真空控制装置。

5. 发明授权

US09865485B2 Apparatus and method for determining the location of plate elements of a wafer boat 有权
公开(公告)号：US09865485B2
公开(公告)日：2018-01-09
申请号：US13642891
申请日：2011-04-27
申请人： Daniel Knopfle , Andreas Hartmann , Ottmar Graf
发明人： Daniel Knopfle , Andreas Hartmann , Ottmar Graf
IPC分类号： H01L21/67
CPC分类号： H01L21/67265
摘要： An apparatus and method determines the location of wafer boat plate elements having a plurality of plate elements arranged substantially parallel to each other. At least three sensors are moved along travel paths perpendicular to the plate elements, wherein at least a first travel path is above, at least a second travel path is below the wafer boat and at third travel path is laterally spaced from the first or second travel paths above or below the wafer boat. During this movement the position of the sensors along a respective travel path is determined continuously, and it is determined, in which position a respective plate element enters the measuring area of a sensor and exits the same. A distance between a sensor and an edge of a plate element is measured and the location of a respective plate element is determined by means of the sensor signals.

6. 发明申请

US20130272825A1 APPARATUS AND METHOD FOR DETERMINING THE LOCATION OF PLATE ELEMENTS OF A WAFER BOAT 有权
标题翻译：用于确定波浪板的板元件位置的装置和方法
公开(公告)号：US20130272825A1
公开(公告)日：2013-10-17
申请号：US13642891
申请日：2011-04-27
申请人： Daniel Knopfle , Andreas Hartmann , Ottmar Graf
发明人： Daniel Knopfle , Andreas Hartmann , Ottmar Graf
IPC分类号： H01L21/67
CPC分类号： H01L21/67265
摘要： An apparatus and method determines the location of wafer boat plate elements having a plurality of plate elements arranged substantially parallel to each other. At least three sensors are moved along travel paths perpendicular to the plate elements, wherein at least a first travel path is above, at least a second travel path is below the wafer boat and at third travel path is laterally spaced from the first or second travel paths above or below the wafer boat. During this movement the position of the sensors along a respective travel path is determined continuously, and it is determined, in which position a respective plate element enters the measuring area of a sensor and exits the same. A distance between a sensor and an edge of a plate element is measured and the location of a respective plate element is determined by means of the sensor signals.
摘要翻译：一种装置和方法确定具有彼此基本平行布置的多个板元件的晶片舟板元件的位置。至少三个传感器沿着垂直于板元件的行进路径移动，其中至少第一行进路径在上方，至少第二行进路径在晶片舟皿的下方，并且在第三行进路径与第一或第二行程横向间隔开在晶圆舟之上或之下的路径。在该移动期间，连续地确定传感器沿相应的行进路径的位置，并且确定相应的板元件进入传感器的测量区域并将其退出的位置。测量传感器和板元件的边缘之间的距离，并且通过传感器信号确定相应板元件的位置。

7. 发明授权

US07746482B2 Determining the position of a semiconductor substrate on a rotation device 有权
标题翻译：确定半导体衬底在旋转装置上的位置
公开(公告)号：US07746482B2
公开(公告)日：2010-06-29
申请号：US11597178
申请日：2004-08-26
申请人： Ottmar Graf , Michael Grandy
发明人： Ottmar Graf , Michael Grandy
IPC分类号： G01B11/14
CPC分类号： H01L21/681 , H01L21/67259
摘要： A device for determining the position of a semiconductor substrate on a rotation device having a rotational axis, including a direction of rotation detecting unit for determining the rotational state of the rotation device, and also including at least one light source and at least one receiver which is photo-sensitive to the light from the light source, wherein at least one light beam emitted by the light source is directed toward the edge of the semiconductor substrate and passes said edge to at least a partial extent. The light of the light beam which has passed to at least a partial extent is then detected at least partially by the receiver.
摘要翻译：一种用于确定具有旋转轴线的旋转装置上的半导体衬底的位置的装置，包括用于确定旋转装置的旋转状态的旋转检测单元的方向，并且还包括至少一个光源和至少一个接收器，对来自光源的光感光，其中由光源发射的至少一个光束被引向半导体衬底的边缘并且将所述边缘至少部分地扩展。至少部分地由接收器检测已经传递到至少局部范围的光束的光。

8. 发明申请

US20080316505A1 Determining the Position of a Semiconductor Substrate on a Rotation Device 有权
标题翻译：确定半导体基板在旋转装置上的位置
公开(公告)号：US20080316505A1
公开(公告)日：2008-12-25
申请号：US11597178
申请日：2004-08-26
申请人： Ottmar Graf , Michael Grandy
发明人： Ottmar Graf , Michael Grandy
IPC分类号： G01B11/00
CPC分类号： H01L21/681 , H01L21/67259
摘要： A device for determining the position of a semiconductor substrate on a rotation device having a rotational axis, including a direction of rotation detecting unit for determining the rotational state of the rotation device, and also including at least one light source and at least one receiver which is photo-sensitive to the light from the light source, wherein at least one light beam emitted by the light source is directed toward the edge of the semiconductor substrate and passes said edge to at least a partial extent. The light of the light beam which has passed to at least a partial extent is then detected at least partially by the receiver The light source, the receiver and the rotation device form an eccentricity measuring arrangement for a semiconductor substrate disposed on the rotation device, whereby the position of the semiconductor substrate on the rotation device is detected by a method in which at least one light beam passes the edge of the semiconductor substrate to at least a partial extent and then the light of the light beam which has passed to at least a partial extent is detected at least partially by a receiver.
摘要翻译：一种用于确定具有旋转轴线的旋转装置上的半导体衬底的位置的装置，包括用于确定旋转装置的旋转状态的旋转检测单元的方向，并且还包括至少一个光源和至少一个接收器，对来自光源的光感光，其中由光源发射的至少一个光束被引向半导体衬底的边缘并将所述边缘至少部分地扩展。至少部分地通过接收器检测到至少部分光束的光束。光源，接收器和旋转装置形成用于设置在旋转装置上的半导体衬底的偏心测量装置，由此通过一种方法来检测半导体衬底在旋转装置上的位置，其中至少一个光束至少部分地通过半导体衬底的边缘，然后将光束的光通过至少一个至少部分地由接收器检测部分范围。

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