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    • 2. 发明授权
    • Devices for measuring physical values and vibrators
    • 用于测量物理值和振动器的设备
    • US07140251B2
    • 2006-11-28
    • US10848830
    • 2004-05-19
    • Osamu KawauchiYoshio MoritaTakayuki KikuchiTakao Soma
    • Osamu KawauchiYoshio MoritaTakayuki KikuchiTakao Soma
    • G01P9/04
    • G01C19/5642
    • A device for measuring a physical value, such as a vibratory gyroscope, is provided. The device comprises a vibrator; a driving means for exciting a driving vibration in the vibrator; a detecting means for obtaining an output signal based on a detection vibration excited in the vibrator in response with the physical value; and a detection circuit for processing the output signal to provide a detection signal corresponding with the physical value. The vibrator has at least one bending vibration arms 1A and 1B vibrating in bending mode along a specified plane (X-Y plane). The bending vibration arm comprises at least a pair of base parts 2A, 2B and a connecting part 3 connecting the base parts 2A, 2B. The connecting and base parts define a pair of recesses 8A, 8B.
    • 提供了用于测量物理值的装置,例如振动陀螺仪。 该装置包括振动器; 用于激励振动器中的驱动振动的驱动装置; 检测装置,用于响应于物理值,根据在振动器中激发的检测振动获得输出信号; 以及检测电路,用于处理输出信号以提供与物理值对应的检测信号。 振动器具有沿着特定平面(X-Y平面)以弯曲模式振动的至少一个弯曲振动臂1A和1B。 弯曲振动臂包括至少一对基部2A,2B和连接基部2A,2B的连接部3.连接部和基部形成有一对凹部8A,8B。
    • 3. 发明授权
    • Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor
    • 压电振动陀螺元件及其制造方法以及压电振动陀螺传感器
    • US07126262B2
    • 2006-10-24
    • US10852606
    • 2004-05-25
    • Osamu KawauchiKoji Watanabe
    • Osamu KawauchiKoji Watanabe
    • G01C19/56
    • G01C19/5607Y10T74/12Y10T74/1275
    • The invention provides a piezoelectric vibration gyro element including a pair of detecting resonant arms at its center, connecting arms each on, the right and left of the center, and a pair of driving resonant arms at each far end of the connecting arms, which makes it possible to secure the symmetry of the resonant arms' flexure and vibrating, and easily and accurately separate electrodes. In particular, two side surfaces of extension parts that extend along the direction in which each end surface of connecting arms extends, flat surfaces are provided to both sides in a direction perpendicular to the direction in which driving resonant arms extend. A wiring passing across the end surface of the extension parts in its thickness direction and joining front and back main surfaces of the end surface of the connecting arms and the extension parts can be formed so as to electrically couple the first driving electrodes each on the front and back main surfaces of the driving resonant arms. The exposure for electrode separation can be done from the above in a direction perpendicular to the flat surface of the extension part and with a given angle to the main surfaces of the driving resonant arms so as to simultaneously expose the main surfaces and side surfaces to light.
    • 本发明提供了一种压电振动陀螺元件,其包括一对检测谐振臂在其中心,连接臂位于中心的右侧和左侧,以及一对驱动谐振臂在连接臂的每个远端,这使得 可以确保共振臂的弯曲和振动的对称性,并且容易且精确地分离电极。 特别地,沿着连接臂的每个端面延伸的方向延伸的延伸部分的两个侧表面在垂直于驱动共振臂延伸的方向的方向上设置在两侧。 延伸部件的厚度方向的端面穿过连接臂的端面的表面和后表面与延伸部分的布线可以形成为将前面的每个的第一驱动电极电耦合 和驱动谐振臂的后表面。 用于电极分离的曝光可以从上述方向在垂直于延伸部分的平坦表面的方向上以与驱动谐振臂的主表面给定的角度进行,以便同时将主表面和侧表面暴露于光 。
    • 5. 发明授权
    • Gyro vibration piece and gyro sensor
    • 陀螺振动片和陀螺传感器
    • US07437932B2
    • 2008-10-21
    • US11392843
    • 2006-03-29
    • Osamu Kawauchi
    • Osamu Kawauchi
    • G01P9/04
    • G01C19/5607
    • A gyro vibration piece detecting an angular velocity includes a supporting part, a driving part connected to the supporting part and performing vibration, and a detection part detecting vibration generated by Coriolis force generated by the rotation of the driving part. A connection part includes a connection portion having a fin and an end portion connected between at least one of a side of the driving part and a side of the supporting part and a side of the detection part and a side of the supporting part. The end portion includes a top surface and a side surface, whereby the side surface is substantially perpendicular to the top surface and includes a circular arc shape disposed along a bottom portion thereof opposite to a junction of the top surface and the side surface.
    • 检测角速度的陀螺仪振动片包括支撑部,与支撑部连接并进行振动的驱动部,以及检测由驱动部的旋转产生的科里奥利力产生的振动的检测部。 连接部分包括具有翅片的连接部分和连接在驱动部分的一侧和支撑部分的侧面和检测部分的侧面和支撑部分的侧面中的至少一个之间的端部。 该端部包括顶表面和侧表面,由此侧表面基本上垂直于顶表面并且包括沿着与顶表面和侧表面的接合部相对的底部部分设置的圆弧形状。
    • 7. 发明申请
    • Gyro vibration piece, gyro sensor, and method of manufacturing gyro vibration piece
    • 陀螺振动片,陀螺仪传感器及制造陀螺仪振动片的方法
    • US20060219007A1
    • 2006-10-05
    • US11392843
    • 2006-03-29
    • Osamu Kawauchi
    • Osamu Kawauchi
    • G01P15/08
    • G01C19/5607
    • A gyro vibration piece detecting an angular velocity includes: a supporting part; a driving part connected to the supporting part and performing vibration; a detection part connected through the driving part and the supporting part and detecting detection vibration generated by Coriolis force generated by the rotation of the driving part; and a connection part including a connection portion having a plurality of steps formed between a side of a width direction of the driving part or a side of a width direction of the detection part and a side of another portion connected to the driving part or the detection part, which are continuously connected. The connection part has a first end portion which is located on an innermost side of the connection part among the connection portion and has a circular arc shaped wall portion that connects a side of a width direction of the driving part or a side of a width direction of the detection part to a side of another portion connected to the driving part or the detection part, and a bottom surface having a predetermined depth.
    • 检测角速度的陀螺仪振动片包括:支撑部; 与支撑部连接的驱动部,进行振动; 通过驱动部和支撑部连接的检测部,检测由驱动部旋转产生的科里奥利力产生的检测振动; 以及连接部,包括具有多个台阶的连接部分,所述多个台阶形成在所述驱动部分的宽度方向的一侧或所述检测部分的宽度方向的一侧,以及连接到所述驱动部分的另一部分的侧面或所述检测 部分,连续连接。 连接部具有位于连接部中的连接部的最内侧的第一端部,并且具有连接驱动部的宽度方向的一侧或宽度方向侧的圆弧状的壁部 的检测部分的一侧到连接到驱动部分或检测部分的另一部分的侧面,以及具有预定深度的底面。
    • 8. 发明申请
    • Devices for measuring physical values and vibrators
    • 用于测量物理值和振动器的设备
    • US20050257620A1
    • 2005-11-24
    • US10848830
    • 2004-05-19
    • Osamu KawauchiYoshio MoritaTakayuki KikuchiTakao Soma
    • Osamu KawauchiYoshio MoritaTakayuki KikuchiTakao Soma
    • G01C19/56G01M3/32
    • G01C19/5642
    • A device for measuring a physical value, such as a vibratory gyroscope, is provided. The device comprises a vibrator; a driving means for exciting a driving vibration in the vibrator; a detecting means for obtaining an output signal based on a detection vibration excited in the vibrator in response with the physical value; and a detection circuit for processing the output signal to provide a detection signal corresponding with the physical value. The vibrator has at least one bending vibration arms 1A and 1B vibrating in bending mode along a specified plane (X-Y plane). The bending vibration arm comprises at least a pair of base parts 2A, 2B and a connecting part 3 connecting the base parts 2A, 2B. The connecting and base parts define a pair of recesses 8A, 8B.
    • 提供了用于测量物理值的装置,例如振动陀螺仪。 该装置包括振动器; 用于激励振动器中的驱动振动的驱动装置; 检测装置,用于响应于物理值,根据在振动器中激发的检测振动获得输出信号; 以及检测电路,用于处理输出信号以提供与物理值对应的检测信号。 振动器具有沿着特定平面(X-Y平面)以弯曲模式振动的至少一个弯曲振动臂1A和1B。 弯曲振动臂包括至少一对基部2A,2B和连接基部2A,2B的连接部3.连接部和基部形成有一对凹部8A,8B。
    • 9. 发明申请
    • Piezoelectric vibration gyro element, method for manufacturing the same, and piezoelectric vibration gyro sensor
    • 压电振动陀螺元件及其制造方法以及压电振动陀螺传感器
    • US20050006988A1
    • 2005-01-13
    • US10852606
    • 2004-05-25
    • Osamu KawauchiKoji Watanabe
    • Osamu KawauchiKoji Watanabe
    • G01C19/56G01C19/5621G01C19/5628H01L41/04H01L41/08H01L41/18H01L41/22H01L41/29H01L41/311
    • G01C19/5607Y10T74/12Y10T74/1275
    • The invention provides a piezoelectric vibration gyro element including a pair of detecting resonant arms at its center, connecting arms each on, the right and left of the center, and a pair of driving resonant arms at each far end of the connecting arms, which makes it possible to secure the symmetry of the resonant arms' flexure and vibrating, and easily and accurately separate electrodes. In particular, two side surfaces of extension parts that extend along the direction in which each end surface of connecting arms extends, flat surfaces are provided to both sides in a direction perpendicular to the direction in which driving resonant arms extend. A wiring passing across the end surface of the extension parts in its thickness direction and joining front and back main surfaces of the end surface of the connecting arms and the extension parts can be formed so as to electrically couple the first driving electrodes each on the front and back main surfaces of the driving resonant arms. The exposure for electrode separation can be done from the above in a direction perpendicular to the flat surface of the extension part and with a given angle to the main surfaces of the driving resonant arms so as to simultaneously expose the main surfaces and side surfaces to light.
    • 本发明提供了一种压电振动陀螺元件,其包括一对检测谐振臂在其中心,连接臂位于中心的右侧和左侧,以及一对驱动谐振臂在连接臂的每个远端,这使得 可以确保共振臂的弯曲和振动的对称性,并且容易且精确地分离电极。 特别地,沿着连接臂的每个端面延伸的方向延伸的延伸部分的两个侧表面在垂直于驱动共振臂延伸的方向的方向上设置在两侧。 延伸部件的厚度方向的端面穿过连接臂的端面的表面和后表面与延伸部分的布线可以形成为将前面的每个的第一驱动电极电耦合 和驱动谐振臂的后表面。 用于电极分离的曝光可以从上述方向在垂直于延伸部分的平坦表面的方向上以与驱动谐振臂的主表面给定的角度进行,以便同时将主表面和侧表面暴露于光 。
    • 10. 发明授权
    • Package structure for a piezoelectric resonator
    • 压电谐振器的封装结构
    • US06545392B2
    • 2003-04-08
    • US09781443
    • 2001-02-13
    • Osamu KawauchiHisashi MikoshibaMitsuru Nagai
    • Osamu KawauchiHisashi MikoshibaMitsuru Nagai
    • H01L41053
    • H03H9/1021
    • A package structure for a piezoelectric resonator includes a base which has a shape of flat box and made of an insulating material, and a thin lid bonded to the upper side of the base. A tuning fork type quartz crystal resonator piece is mounted at its one end, that is its base end, on electrode pads provided on the mounting surface in a cantilever manner using conductive adhesive so that it is parallel to the mounting surface, and hermetically sealed in a package with the lid engaged therewith. Either one or both of the mounting surface of the base and the inner surface of the lid has a recess formed at the location adjacent to the free end of a tuning fork type quartz crystal resonator piece so that the free end does not touch the inside surfaces of the packages when the quartz crystal resonator piece is largely dislocated on external impact.
    • 用于压电谐振器的封装结构包括具有扁平盒形状并由绝缘材料制成的基座和结合到基座的上侧的薄盖。 音叉型石英晶体谐振器片的一端,即其基端,以悬臂方式设置在安装表面上的电极焊盘上,使用导电粘合剂安装,使其平行于安装表面,并气密密封 具有与其接合的盖的包装。 基座的安装面和盖的内表面中的一个或两者具有形成在与音叉型石英晶体振动片的自由端相邻的位置处的凹部,使得自由端不接触内表面 当石英晶体谐振器片在外部冲击时大大脱位时,封装件。