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1. 发明申请

US20080193701A1 OPTICAL FILM PRODUCTS AND METHOD FOR PRODUCING OPTICAL FILM PRODUCTS 审中-公开
标题翻译：光学膜产品和生产光学膜产品的方法
公开(公告)号：US20080193701A1
公开(公告)日：2008-08-14
申请号：US12026891
申请日：2008-02-06
申请人： Toshimitsu TAKAYANAGI , Noriyuki MIYAHARA , Hiroyuki TAKAHASHI , Hiroyuki NATSUME , Takafumi IMAI , Yoshihiro TODA
发明人： Toshimitsu TAKAYANAGI , Noriyuki MIYAHARA , Hiroyuki TAKAHASHI , Hiroyuki NATSUME , Takafumi IMAI , Yoshihiro TODA
IPC分类号： G02B5/00 , B29D11/00
CPC分类号： G02B5/305
摘要： An object of the invention is to provide an optical film product that is configured such that the direction of an optical axis can be easily recognized and that markings do not interfere with a defect inspection and to provide a method for producing such an optical film product.The invention is directed to an optical film product, including: an optical film layer having an optical axis; a surface protection film that is laminated on the optical film layer to protect the surface of the optical film layer; and an optical axis information part that shows information about the optical axis and is interposed between the optical film layer and the surface protection film.
摘要翻译：本发明的目的是提供一种光学膜产品，其被配置为使得光轴的方向可以被容易地识别，并且标记不会妨碍缺陷检查，并提供制造这种光学膜产品的方法。本发明涉及一种光学膜产品，包括：具有光轴的光学膜层; 表面保护膜层压在光学膜层上以保护光学膜层的表面; 以及光轴信息部分，其显示关于光轴的信息，并且介于光学膜层和表面保护膜之间。

2. 发明授权

US4744642A Microscope 失效
标题翻译：显微镜
公开(公告)号：US4744642A
公开(公告)日：1988-05-17
申请号：US928682
申请日：1986-11-07
申请人： Makoto Yoshinaga , Yoichi Iba , Noriyuki Miyahara , Masami Kawasaki , Terumasa Morita , Takashi Nagano
发明人： Makoto Yoshinaga , Yoichi Iba , Noriyuki Miyahara , Masami Kawasaki , Terumasa Morita , Takashi Nagano
IPC分类号： G02B21/24 , G02B7/02 , G02B21/00 , G02B21/06
CPC分类号： G02B21/24
摘要： A microscope wherein, in order that the observing position may be variable over a wide range of a sample to be observed without requiring a large objective, the objective optical system is so formed as to be movable in parallel with the sample surface and the light path length between the objective optical system and eyepiece optical system is made variable by moving the objective optical system.
摘要翻译：一种显微镜，其中，为了在不需要大的物镜的情况下观察位置在待观察的样品的宽范围内可以变化，物镜光学系统被形成为可以与样品表面和光路平行移动物镜光学系统与目镜光学系统之间的长度可通过移动物镜光学系统而变化。

3. 发明授权

US4734570A Active focus detecting device with infrared source 失效
标题翻译：红外线主动对焦检测装置
公开(公告)号：US4734570A
公开(公告)日：1988-03-29
申请号：US932145
申请日：1986-11-18
申请人： Yoshiaki Horikawa , Kazuo Kajitani , Noriyuki Miyahara
发明人： Yoshiaki Horikawa , Kazuo Kajitani , Noriyuki Miyahara
IPC分类号： G02B7/34 , G02B7/11 , G02B21/00
CPC分类号： G02B7/34
摘要： A focus detecting device comprising a light source means capable of alternating producing a pair of infrared light bundles, a light path changing means leading the infrared lights emitted alternately from the light source means toward an objective so as to pass through the periphery of the pupil of the objective through different courses, a contracting optical system arranged between the objective or a tube lens and the image forming surface of the objective or tube lens and having a positive refractive power contracting the position deviations of the infrared light images formed in positions different with the objectives to be used, a light receiving element capable of detecting the position of the infrared light image reflected from the object and a signal processing means detecting the position deviation from the in-focus position of the objective or an imaging lens with the output signal from the light receiving element, in order to enable to obtain a high detecting precision and detecting sensitivity on the objective without requiring to adjust the lens.
摘要翻译：一种聚焦检测装置，包括能够交替产生一对红外光束的光源装置，将光源装置交替发出的红外线朝向物镜通过的光路改变装置，以便通过通过不同的课程的目标，将物镜或管透镜与物镜或管透镜的图像形成表面之间的收缩光学系统具有正折射力，使形成在不同于所述物镜或管透镜的位置的位置形成的红外光图像的位置偏差要使用的目标，能够检测从物体反射的红外光图像的位置的光接收元件，以及信号处理装置，用于从物镜或成像透镜的对焦位置偏离来自光接收元件，以便能够获得高检测精度和d 在不需要调整透镜的情况下对目标进行感应灵敏度。

4. 发明授权

US4732485A Optical surface profile measuring device 失效
标题翻译：光学表面轮廓测量装置
公开(公告)号：US4732485A
公开(公告)日：1988-03-22
申请号：US852845
申请日：1986-04-16
申请人： Terumasa Morita , Noriyuki Miyahara , Hisao Kitagawa
发明人： Terumasa Morita , Noriyuki Miyahara , Hisao Kitagawa
IPC分类号： G01B11/24
CPC分类号： G01B11/24
摘要： An optical surface profile measuring device adapted to be able to simultaneously or substantially simultaneously measure a same part on the surface of an object to be measured with two different measuring ranges by combining a surface profile measuring device of a high resolving power using the critical angle method with a surface profile measuring device having a wide measuring range using the astigmatism method, in order to facilitate the setting of a detecting head within a measuring range while maintaining a high resolving power and to enable to measure automatically regardless of the state of the measured surface. This optical surface profile measuring device is provided with an iris stop or liquid crystal shutter capable of varying the numerical aperture behind an objective lens to allow the free setting of the resolving power or the measuring range, and further provided with an aperture stop to make the numerical aperture on the detecting side smaller than the numerical aperture on the projecting side to thereby obtain the proper measuring result even if the measured surface inclines with respect to the optical axis.
摘要翻译：一种光学表面轮廓测量装置，其适于能够通过使用临界角方法组合具有高分辨率的表面轮廓测量装置来同时或基本上同时测量待测对象的表面上的相同部分，具有两个不同的测量范围具有使用散光法的宽测量范围的表面轮廓测量装置，以便于在保持高分辨能力的同时在检测范围内设置检测头，并且能够自动测量而不管测量表面的状态如何。该光学表面轮廓测量装置设置有能够改变物镜后面的数值孔径的光圈停止或液晶快门，以允许分辨力或测量范围的自由设定，并且还设置有孔径光阑，以使检测侧的数值孔径小于突出侧的数值孔径，从而即使测量的表面相对于光轴倾斜，也能获得适当的测量结果。

5. 发明授权

US4832474A Microscope apparatus for examining wafer 失效
标题翻译：用于检查晶片的显微镜装置
公开(公告)号：US4832474A
公开(公告)日：1989-05-23
申请号：US198642
申请日：1988-05-26
申请人： Makoto Yoshinaga , Yoichi Iba , Noriyuki Miyahara , Masami Kawasaki , Terumasa Morita , Takashi Nagano
发明人： Makoto Yoshinaga , Yoichi Iba , Noriyuki Miyahara , Masami Kawasaki , Terumasa Morita , Takashi Nagano
IPC分类号： G02B21/00 , G02B21/24
CPC分类号： G02B21/24 , G02B21/0016 , Y10S359/90
摘要： In order to substantially reduce the time required for examination and to enable the structure of the microscope apparatus for examining a wafer to be made in a compact size, the apparatus comprises a wafer examination unit provided midway on the transportation course of the wafer transporting means for being able to move the wafer under examination independently of the direction of its transporation, and an objective disposed above the wafer examination unit for being able to move along the upper face of the wafer which is held at the position of examination and in a direction different from the direction of the transportation.
摘要翻译：为了显着减少检查所需的时间，并且能够使显微镜装置的结构用于检查制造尺寸紧凑的晶片，该装置包括在晶片传送装置的传送过程中途设置的晶片检查单元，能够独立于其运送方向移动检查晶片，以及设置在晶片检查单元上方的物镜，以便能够沿着保持在检查位置的晶片的上表面沿着不同的方向移动从运输方向。

6. 发明授权

US4769530A Focusing degree-detecting device with a reduction optical system 失效
标题翻译：具有还原光学系统的聚焦度检测装置
公开(公告)号：US4769530A
公开(公告)日：1988-09-06
申请号：US934115
申请日：1986-11-24
申请人： Noriyuki Miyahara
发明人： Noriyuki Miyahara
IPC分类号： G02B7/28 , G02B7/09 , G02B21/00 , G02B21/02 , G02B21/24 , G01J1/20
CPC分类号： G02B21/247
摘要： An automatic focusing microscope projects infrared rays onto a specimen along optical paths oblique to the optical axis of an optical system. For the focusing operation, a degree of focusing in the optical system is detected according to the deviation of the reflected rays from the optical axis. A reduction optical system with a positive refractive is placed between an objective and its image plane, so that the displacement of the image plane by visible and infrared rays is reduced. In the reduction optical system, the post principal point is located between the objective and its image plane and nearer to the image plane. The focal distance is less than 1/2 the focal distance of the objective. A focusing degree-detecting means is made up of a position sensor for sensing the position of the image formed by the reflected rays. An offset signal for correcting an amount of aberration, which is based on the focal distance of the objective, is added to the output signal of the sensor, to form a focusing degree-detecting signal.
摘要翻译：自动对焦显微镜将光学系统的光轴的光路的红外线投射到试样上。对于聚焦操作，根据反射光线与光轴的偏差来检测光学系统中的聚焦程度。具有正折射率的还原光学系统被放置在物镜与其像平面之间，使得可见光和红外线的像平面位移减小。在还原光学系统中，后主点位于物镜与其图像平面之间并且靠近图像平面。焦距小于物镜焦距的1/2。聚焦度检测装置由用于感测由反射光线形成的图像的位置的位置传感器构成。用于校正基于物镜的焦距的像差量的偏移信号被添加到传感器的输出信号，以形成聚焦度检测信号。

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