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1. 发明申请

US20120041646A1 DEVICE AND METHOD FOR GENERATING A CONTROL SIGNAL 有权
标题翻译：用于产生控制信号的装置和方法
公开(公告)号：US20120041646A1
公开(公告)日：2012-02-16
申请号：US13198660
申请日：2011-08-04
申请人： Nicolaus Ulbrich , Andreas Wienss
发明人： Nicolaus Ulbrich , Andreas Wienss
IPC分类号： B60R21/01 , A63F9/24
CPC分类号： B60R21/0136 , Y10T408/165
摘要： A device is described for generating a control signal for controlling a passenger protection arrangement of a motor vehicle, having a first acceleration sensor for generating a first acceleration signal, having a second acceleration sensor for generating a second acceleration signal, having a first structure-borne noise sensor for generating a first structure-borne noise signal, having a second structure-borne noise sensor for generating a second structure-borne noise signal, and having an evaluation circuit, the evaluation circuit (being configured for generating a combination signal from the first structure-borne noise signal and the second structure-borne noise signal, the evaluation circuit being configured for generating the control signal as a function of the first acceleration signal, the second acceleration signal and the combination signal.
摘要翻译：描述了一种用于产生用于控制机动车辆的乘客保护装置的控制信号的装置，其具有用于产生第一加速度信号的第一加速度传感器，具有用于产生第二加速度信号的第二加速度传感器，具有第一结构承载件用于产生第一结构噪声信号的噪声传感器，具有用于产生第二结构噪声信号的第二结构传播噪声传感器，并具有评估电路，所述评估电路（被配置为产生来自所述第一结构噪声信号的组合信号结构噪声信号和第二结构噪声信号，所述评估电路被配置为产生作为所述第一加速度信号，所述第二加速度信号和所述组合信号的函数的所述控制信号。

2. 发明申请

US20070087465A1 Micromechanical component having an anodically bonded cap and a manufacturing method 失效
标题翻译：具有阳极接合盖的微机械部件和制造方法
公开(公告)号：US20070087465A1
公开(公告)日：2007-04-19
申请号：US11512647
申请日：2006-08-29
申请人： Heiko Stahl , Nicolaus Ulbrich , Rainer Straub
发明人： Heiko Stahl , Nicolaus Ulbrich , Rainer Straub
IPC分类号： H01L21/00 , H01L29/76 , H01L29/94 , H01L31/00
CPC分类号： B81C1/00301 , B81B2207/095 , B81C2203/0109
摘要： A micromechanical component includes a cap wafer made up of at least a first silicon substrate and a thin glass substrate, and having a functional wafer made up of at least a second silicon substrate, at least one electrical contact surface being disposed on the functional wafer. The cap wafer is joined at the glass substrate to the functional wafer by anodic bonding. The electrical contact surface is disposed on a side of the functional wafer facing the cap wafer, and the cap wafer has at least one recess, such that an access is provided to the electrical contact surface. A method for encapsulating a micromechanical component having a cap wafer, by anodically bonding the cap wafer to a functional wafer.
摘要翻译：微机械部件包括由至少第一硅衬底和薄玻璃衬底构成的盖晶片，并且具有由至少第二硅衬底构成的功能晶片，至少一个电接触表面设置在功能晶片上。盖玻片通过阳极接合在玻璃基板上连接到功能晶片。电接触表面设置在面向盖晶片的功能晶片的一侧，并且盖晶片具有至少一个凹部，使得向电接触表面提供通路。一种用于封装具有盖晶片的微机械部件的方法，通过将盖晶片阳极结合到功能晶片。

3. 发明申请

US20130276537A1 Micromechanical sensor element and sensor device having this type of sensor element 审中-公开
标题翻译：具有这种传感器元件的微机械传感器元件和传感器装置
公开(公告)号：US20130276537A1
公开(公告)日：2013-10-24
申请号：US13869346
申请日：2013-04-24
申请人： Frank SCHAEFER , Nicolaus Ulbrich , Harald Emmerich
发明人： Frank SCHAEFER , Nicolaus Ulbrich , Harald Emmerich
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5776 , G01P15/08
摘要： A micromechanical sensor element for detecting lateral acceleration, having at least two boundaries situated essentially orthogonally with respect to one another, and also having at least one spring element, in which the spring element is oriented at an angle relative to at least one of the boundaries.
摘要翻译：一种用于检测横向加速度的微机械传感器元件，具有至少两个相对于彼此基本上正交的边界，并且还具有至少一个弹簧元件，弹簧元件相对于至少一个边界以一定角度定向。

4. 发明授权

US08350215B2 Thermopile sensor and method of manufacturing same 有权
标题翻译：热电堆传感器及其制造方法
公开(公告)号：US08350215B2
公开(公告)日：2013-01-08
申请号：US12538422
申请日：2009-08-10
申请人： Nicolaus Ulbrich
发明人： Nicolaus Ulbrich
IPC分类号： G01J5/00 , G01J5/20
CPC分类号： H01L35/32 , G01J5/02 , G01J5/023 , G01J5/024 , G01J5/12
摘要： A thermopile sensor for detection of infrared radiation in a measurement wavelength range having a sensor substrate in which a cavity is formed, a diaphragm formed on the sensor substrate above the cavity, at least one thermopile structure formed in, on, or below the diaphragm, having at least one thermopile pair of mutually contacted thermopile legs, where the two thermopile legs are made of doped semiconductor materials having different Seebeck coefficients, and at least one insulating intermediate layer formed between the thermopile legs. A layer system having at least the two thermopile legs and at least the insulating intermediate layer is formed above the lower cavity and has multibeam interference for IR radiation in the measurement wavelength range, absorbing a portion of the IR radiation and at least partially reducing the reflection.
摘要翻译：一种用于检测具有其中形成空腔的传感器基板的测量波长范围内的红外辐射的热电堆传感器，形成在空腔上方的传感器基板上的隔膜，形成在隔膜中，之上或之下的至少一个热电堆结构，具有至少一个相互接触的热电堆腿的热电堆对，其中两个热电堆腿由具有不同塞贝克系数的掺杂半导体材料制成，以及形成在热电堆脚之间的至少一个绝缘中间层。具有至少两个热电堆腿和至少绝缘中间层的层系统形成在下腔体的上方，并且对于测量波长范围内的IR辐射具有多波束干涉，吸收一部分IR辐射并且至少部分地减少反射。

5. 发明申请

US20100269590A1 SENSOR SYSTEM 审中-公开
标题翻译：传感器系统
公开(公告)号：US20100269590A1
公开(公告)日：2010-10-28
申请号：US12729992
申请日：2010-03-23
申请人： Sebastian GUENTHER , Nicolaus Ulbrich , Volker Materna
发明人： Sebastian GUENTHER , Nicolaus Ulbrich , Volker Materna
IPC分类号： G01P15/02 , G01P1/02
CPC分类号： G01P1/023 , B81B7/0077 , B81B2201/0235 , G01P15/0802 , G01P15/125 , G01P2015/0831 , H01L2224/48091 , H01L2224/48137 , H01L2224/48472 , H01L2224/73265 , H05K7/20463 , H01L2924/00014
摘要： A sensor system, in particular an acceleration sensor system, includes a sensor element and a cover element, at least one side of the sensor element having a covering provided by the cover element, and the cover element being at least partially designed as an infrared-protection element.
摘要翻译：传感器系统，特别是加速度传感器系统，包括传感器元件和盖元件，传感器元件的至少一侧具有由盖元件提供的覆盖物，并且覆盖元件至少部分地设计为红外线 - 保护元件。

6. 发明授权

US07436076B2 Micromechanical component having an anodically bonded cap and a manufacturing method 失效
标题翻译：具有阳极接合盖的微机械部件和制造方法
公开(公告)号：US07436076B2
公开(公告)日：2008-10-14
申请号：US11512647
申请日：2006-08-29
申请人： Heiko Stahl , Nicolaus Ulbrich , Rainer Straub
发明人： Heiko Stahl , Nicolaus Ulbrich , Rainer Straub
IPC分类号： H01L23/29 , H01L23/58 , H01L23/28
CPC分类号： B81C1/00301 , B81B2207/095 , B81C2203/0109
摘要： A micromechanical component includes a cap wafer made up of at least a first silicon substrate and a thin glass substrate, and having a functional wafer made up of at least a second silicon substrate, at least one electrical contact surface being disposed on the functional wafer. the cap wafer is joined at the glass substrate to the functional wafer by anodic bonding. the electrical contact surface is disposed on a side of the functional wafer facing the cap wafer, and the cap wafer has at least one recess, such that an access is provided to the electrical contact surface. A method for encapsulating a micromechanical component having a cap wafer, by anodically bonding the cap wafer to a functional wafer.
摘要翻译：微机械部件包括由至少第一硅衬底和薄玻璃衬底构成的盖晶片，并且具有由至少第二硅衬底构成的功能晶片，至少一个电接触表面设置在功能晶片上。盖玻片通过阳极接合在玻璃基板上连接到功能晶片。电接触表面设置在面向盖晶片的功能晶片的一侧，并且盖晶片具有至少一个凹部，使得对电接触表面提供通路。一种用于封装具有盖晶片的微机械部件的方法，通过将盖晶片阳极结合到功能晶片。

7. 发明授权

US08874323B2 Device and method for generating a control signal 有权
标题翻译：用于产生控制信号的装置和方法
公开(公告)号：US08874323B2
公开(公告)日：2014-10-28
申请号：US13198660
申请日：2011-08-04
申请人： Nicolaus Ulbrich , Andreas Wienss
发明人： Nicolaus Ulbrich , Andreas Wienss
IPC分类号： G06F17/00 , B60R21/0136
CPC分类号： B60R21/0136 , Y10T408/165
摘要： A device is described for generating a control signal for controlling a passenger protection arrangement of a motor vehicle, having a first acceleration sensor for generating a first acceleration signal, having a second acceleration sensor for generating a second acceleration signal, having a first structure-borne noise sensor for generating a first structure-borne noise signal, having a second structure-borne noise sensor for generating a second structure-borne noise signal, and having an evaluation circuit, the evaluation circuit (being configured for generating a combination signal from the first structure-borne noise signal and the second structure-borne noise signal, the evaluation circuit being configured for generating the control signal as a function of the first acceleration signal, the second acceleration signal and the combination signal.
摘要翻译：描述了一种用于产生用于控制机动车辆的乘客保护装置的控制信号的装置，其具有用于产生第一加速度信号的第一加速度传感器，具有用于产生第二加速度信号的第二加速度传感器，具有第一结构承载件用于产生第一结构噪声信号的噪声传感器，具有用于产生第二结构噪声信号的第二结构传播噪声传感器，并具有评估电路，所述评估电路（被配置为产生来自所述第一结构噪声信号的组合信号结构噪声信号和第二结构噪声信号，所述评估电路被配置为产生作为所述第一加速度信号，所述第二加速度信号和所述组合信号的函数的所述控制信号。

8. 发明授权

US08207500B2 Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same 有权
标题翻译：具有可变电容器的微机械传感器和使用其的电磁辐射检测方法
公开(公告)号：US08207500B2
公开(公告)日：2012-06-26
申请号：US12620301
申请日：2009-11-17
申请人： Sebastian Guenther , Nicolaus Ulbrich , Volker Materna
发明人： Sebastian Guenther , Nicolaus Ulbrich , Volker Materna
IPC分类号： G01J5/00
CPC分类号： G01J5/02 , B81B3/0024 , B81B2201/0221 , B81B2201/0278 , B81B2203/0181 , G01J5/023 , G01J5/34 , H01G5/16
摘要： A sensor for detecting electromagnetic radiation, having a detection element; and at least one electrode; the detection element and the at least one electrode forming a variable capacitor, and a change in the capacitance of the capacitor being caused by the detected electromagnetic radiation.
摘要翻译：一种用于检测电磁辐射的传感器，具有检测元件; 和至少一个电极; 所述检测元件和所述至少一个电极形成可变电容器，以及由检测到的电磁辐射引起的电容器的电容变化。

9. 发明申请

US20100127175A1 MICROMECHANICAL INFRARED SENSOR AND EVALUATION CONCEPT 有权
标题翻译：微观红外传感器和评估概念
公开(公告)号：US20100127175A1
公开(公告)日：2010-05-27
申请号：US12620301
申请日：2009-11-17
申请人： Sebastian Guenther , Nicolaus Ulbrich , Volker Materna
发明人： Sebastian Guenther , Nicolaus Ulbrich , Volker Materna
IPC分类号： G01J5/02 , G01J5/00
CPC分类号： G01J5/02 , B81B3/0024 , B81B2201/0221 , B81B2201/0278 , B81B2203/0181 , G01J5/023 , G01J5/34 , H01G5/16
摘要： A sensor for detecting electromagnetic radiation, having a detection element; and at least one electrode; the detection element and the at least one electrode forming a variable capacitor, and a change in the capacitance of the capacitor being caused by the detected electromagnetic radiation.
摘要翻译：一种用于检测电磁辐射的传感器，具有检测元件; 和至少一个电极; 所述检测元件和所述至少一个电极形成可变电容器，以及由所检测的电磁辐射引起的所述电容器的电容变化。

10. 发明申请

US20100032788A1 THERMOPILE SENSOR AND METHOD OF MANUFACTURING SAME 有权
标题翻译：热传感器及其制造方法
公开(公告)号：US20100032788A1
公开(公告)日：2010-02-11
申请号：US12538422
申请日：2009-08-10
申请人： Nicolaus Ulbrich
发明人： Nicolaus Ulbrich
IPC分类号： H01L31/09
CPC分类号： H01L35/32 , G01J5/02 , G01J5/023 , G01J5/024 , G01J5/12
摘要： A thermopile sensor for detection of infrared radiation in a measurement wavelength range having a sensor substrate in which a cavity is formed, a diaphragm formed on the sensor substrate above the cavity, at least one thermopile structure formed in, on, or below the diaphragm, having at least one thermopile pair of mutually contacted thermopile legs, where the two thermopile legs are made of doped semiconductor materials having different Seebeck coefficients, and at least one insulating intermediate layer formed between the thermopile legs. A layer system having at least the two thermopile legs and at least the insulating intermediate layer is formed above the lower cavity and has multibeam interference for IR radiation in the measurement wavelength range, absorbing a portion of the IR radiation and at least partially reducing the reflection.
摘要翻译：一种用于检测具有其中形成空腔的传感器基板的测量波长范围内的红外辐射的热电堆传感器，形成在空腔上方的传感器基板上的隔膜，形成在隔膜中，之上或之下的至少一个热电堆结构，具有至少一个相互接触的热电堆腿的热电堆对，其中两个热电堆腿由具有不同塞贝克系数的掺杂半导体材料制成，以及形成在热电堆脚之间的至少一个绝缘中间层。具有至少两个热电堆腿和至少绝缘中间层的层系统形成在下腔体的上方，并且对于测量波长范围内的IR辐射具有多波束干涉，吸收一部分IR辐射并且至少部分地减少反射。

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