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1. 发明申请

US20190161371A1 APPARATUS AND METHOD FOR PRODUCING ALKALINE WATER FOR CLEANING ELECTRONIC DEVICE 审中-公开
公开(公告)号：US20190161371A1
公开(公告)日：2019-05-30
申请号：US16265031
申请日：2019-02-01
申请人： NOMURA MICRO SCIENCE CO., LTD.
发明人： Takayuki JIZAIMARU
IPC分类号： C02F9/00 , B01F3/04
摘要： To provide method and apparatus for producing alkaline water, capable of preventing mixture of fine particles derived from a gas dissolving membrane device into hydrogen water. An apparatus for producing alkaline water for cleaning electronic device includes: a pH adjusting device 11 configured to adjust ultrapure water to be alkaline; a deaeration device 13 configured to deaerate the ultrapure water adjusted to be alkaline; and a gas dissolving membrane device 14 having a gas permeable membrane to dissolve functional gas into the deaerated ultrapure water.

2. 发明授权

US10059911B2 Washing hydrogen water producing method and producing apparatus 有权
公开(公告)号：US10059911B2
公开(公告)日：2018-08-28
申请号：US15209956
申请日：2016-07-14
申请人： NOMURA MICRO SCIENCE CO., LTD. , ACM RESEARCH (SHANGHAI), INC.
发明人： Takayuki Jizaimaru , David H. Wang
IPC分类号： C11D11/00 , B01F15/00 , B01F5/04 , B01F3/04 , B01F3/08 , C11D7/06
CPC分类号： C11D11/0047 , B01F3/04503 , B01F3/0876 , B01F3/088 , B01F5/0463 , B01F15/00155 , B01F2215/004 , C11D7/06
摘要： A method of producing washing hydrogen water in an embodiment, includes: a step of storing ammonia water in a first tank; a step of transferring the ammonia water from the first tank to a second tank; a step of diluting the transferred ammonia water with ultrapure water in the second tank; a step of mixing the diluted ammonia water into hydrogen water; and a washing step of washing an inside of the first tank by ultrapure water to remove fine particles derived from ammonia generated in the first tank.

3. 发明申请

US20210043440A1 METHOD OF PRODUCING HEATED OZONE WATER, HEATED OZONE WATER, AND SEMICONDUCTOR WAFER-CLEANING LIQUID 有权
公开(公告)号：US20210043440A1
公开(公告)日：2021-02-11
申请号：US17078169
申请日：2020-10-23
申请人： TOHOKU UNIVERSITY , NOMURA MICRO SCIENCE CO., LTD.
发明人： Yasuyuki SHIRAI , Takeshi SAKAI , Takayuki JIZAIMARU
IPC分类号： H01L21/02 , B08B3/10
摘要： Provided are: a method of producing heated ozone water, the method capable of producing heated ozone water having an extremely high ozone concentration by suppressing a reduction in the ozone concentration in high-concentration heated ozone water; heated ozone water; and a semiconductor wafer-cleaning liquid using the heated ozone water. A method of producing heated ozone water obtained by dissolving ozone in pure water, the method being characterized by including: adjusting a pH of the pure water to 3 or less by adding acid to the pure water; to obtain an acid water, dissolving an ozone gas in the acid water; and heating the pure water, the acid water or the ozone water, to 60° C. or more.

4. 发明授权

US10654014B2 Functional water producing apparatus and functional water producing method 有权
公开(公告)号：US10654014B2
公开(公告)日：2020-05-19
申请号：US15417957
申请日：2017-01-27
申请人： NOMURA MICRO SCIENCE CO., LTD. , ACM RESEARCH (SHANGHAI), INC.
发明人： Takayuki Jizaimaru , David Hui Wang
IPC分类号： B01F15/00 , B01F3/04 , B01F5/04 , B01F15/02 , C11D7/04 , C11D11/00
摘要： A functional water producing apparatus in an embodiment includes: a water pressure regulator configured to regulate the water pressure of the ultrapure water, the water pressure regulator having a pressure regulating valve configured to regulate a water pressure of the ultrapure water to an almost constant pressure and a feed water pump configured to pressurize the ultrapure water; a dissolving device configured to dissolve functional gas imparting a specific function in the ultrapure water regulated the water pressure by the water pressure regulator; and a control device configured to control the feed water pump to regulate the water pressure of the functional water to a predetermined constant pressure based on a water pressure or a flow rate of the functional water flowing out of the dissolving device.

5. 发明申请

US20170015956A1 WASHING HYDROGEN WATER PRODUCING METHOD AND PRODUCING APPARATUS 审中-公开
标题翻译：洗涤水生产方法和生产设备
公开(公告)号：US20170015956A1
公开(公告)日：2017-01-19
申请号：US15209956
申请日：2016-07-14
申请人： NOMURA MICRO SCIENCE CO., LTD. , ACM RESEARCH (SHANGHAI), INC. , HJS ENG CO., LTD.
发明人： Takayuki JIZAIMARU , David H. WANG , Hwang Du CHEOL
IPC分类号： C11D11/00 , B01F15/00 , C11D7/04 , B01F3/04
CPC分类号： C11D11/0047 , B01F3/04503 , B01F3/0876 , B01F3/088 , B01F5/0463 , B01F15/00155 , B01F2215/004 , C11D7/06
摘要： A method of producing washing hydrogen water in an embodiment, includes: a step of storing ammonia water in a first tank; a step of transferring the ammonia water from the first tank to a second tank; a step of diluting the transferred ammonia water with ultrapure water in the second tank; a step of mixing the diluted ammonia water into hydrogen water; and a washing step of washing an inside of the first tank by ultrapure water to remove fine particles derived from ammonia generated in the first tank.
摘要翻译：在一个实施方案中，生产洗涤氢水的方法包括：将氨水储存在第一罐中的步骤; 将氨水从第一罐转移到第二罐的步骤; 在第二罐中用超纯水稀释转移的氨水的步骤; 将稀氨水与氢水混合的步骤; 以及通过超纯水洗涤第一罐的内部以除去在第一罐中产生的氨的细颗粒的洗涤步骤。

6. 发明申请

US20130333299A1 ABRASIVE RECOVERY METHOD AND ABRASIVE RECOVERY DEVICE 审中-公开
标题翻译：磨料回收方法和磨料回收装置
公开(公告)号：US20130333299A1
公开(公告)日：2013-12-19
申请号：US13972364
申请日：2013-08-21
申请人： NOMURA MICRO SCIENCE CO., LTD.
发明人： Keiichiro Ishii , Shoji Hioki
IPC分类号： B24B57/00
CPC分类号： B24B57/00 , B01D61/18 , B01D63/02 , B01D2317/022 , B24B57/02 , C02F1/444 , C02F2103/346
摘要： There is provided an abrasive recovery device and an abrasive recovery method capable of recovering a slurry which is condensed until a concentration of its abrasive becomes high while suppressing an increase in pressure loss and a great decrease in a recovery ratio ascribable to membrane clogging. The abrasive recovery device is a device 1 which recovers an abrasive from a used polishing slurry which has been used in a CMP process, the device including a separation membrane 41 having a cylindrical hole passage to which the used polishing slurry is led, wherein an effective filtration part of the hole passage of the separation membrane 41 has a 0.8 m length or less, and the abrasive recovery device 1 condenses the used polishing slurry until a concentration of the abrasive becomes 10 mass % or more.
摘要翻译：提供了一种磨料回收装置和磨料回收方法，其能够回收冷凝的浆料，直到其研磨剂的浓度变高，同时抑制压力损失的增加和由于膜堵塞引起的回收率的大幅降低。磨料回收装置是从已经用于CMP工艺的已使用的抛光浆料中回收研磨剂的装置1，该装置包括具有圆柱形孔通道的分离膜41，所述抛光浆料被引导到其上，其中有效的分离膜41的孔通道的过滤部分的长度为0.8μm以下，研磨回收装置1将研磨用浆料冷凝，直到研磨剂的浓度达到10质量％以上。

7. 发明申请

US20230135621A1 METHOD FOR STARTING UP HOT ULTRAPURE WATER PRODUCTION SYSTEM, AND HOT ULTRAPURE WATER PRODUCTION SYSTEM 有权
公开(公告)号：US20230135621A1
公开(公告)日：2023-05-04
申请号：US17876624
申请日：2022-07-29
申请人： Nomura Micro Science Co., Ltd.
发明人： Masamitsu IIYAMA
IPC分类号： C02F1/02 , F24D17/00
摘要： A method for starting up a hot ultrapure water production system that produces hot ultrapure water by heating ultrapure water to a supply water temperature, for supplied to a point of use, the method involving: alternately passing heated water and cooled water through a hot ultrapure water pipe through which the hot ultrapure water flows, the heated water being obtained by heating the ultrapure water to a temperature higher than room temperature and the cooled water being obtained by cooling the ultrapure water to a temperature lower than the temperature of the heated water in a range of from room temperature to the supply water temperature.

8. 发明申请

US20230117675A1 LIQUID TREATMENT APPARATUS, PURE WATER PRODUCTION SYSTEM, AND LIQUID TREATMENT METHOD 有权
公开(公告)号：US20230117675A1
公开(公告)日：2023-04-20
申请号：US17915106
申请日：2021-09-03
申请人： Nomura Micro Science Co., Ltd.
发明人： Seiichi NAKAMURA
IPC分类号： B01D61/02 , B01D61/10 , C02F1/44 , B01D61/08
摘要： A desalination apparatus 12 (liquid treatment apparatus) includes a first water treatment unit 26 (liquid treatment unit) that includes a reverse osmosis membrane and in which a treated liquid is separated into a permeate that permeates the reverse osmosis membrane and a concentrate other than the permeate, a water recovery unit 28 (liquid recovery unit) that includes a reverse osmosis membrane and in which the concentrate is separated into a recovered liquid that permeates the reverse osmosis membrane and a waste liquid other than the recovered liquid, and a pressure increasing means that increases a liquid pressure of the concentrate, such that a state capable of separating into the recovered liquid and the waste liquid in the liquid recovery unit continues, and that directly feeds the concentrate from the liquid treatment unit to the liquid recovery unit.

9. 发明申请

US20230101477A1 RESIST STRIPPING METHOD, RESIST STRIPPING DEVICE, AND PRETREATMENT METHOD 有权
公开(公告)号：US20230101477A1
公开(公告)日：2023-03-30
申请号：US18076657
申请日：2022-12-07
申请人： NOMURA MICRO SCIENCE CO., LTD. , TOHOKU UNIVERSITY
发明人： Takayuki Jizaimaru , Takao Funakoshi , Yasuyuki Shirai , Hisashi Fujimoto , Takeshi Sakai
IPC分类号： G03F7/42 , G03F7/38
摘要： Provided is a stripping method capable of stripping a resist while suppressing the time and cost of processing required for stripping, while giving sufficient consideration to the load on the environment. The resist stripping method is a method for stripping a resist film-formed on a substrate, including: a pretreatment step of exposing the resist to a heated steam in a predetermined temperature range for a predetermined time; and a stripping step of stripping the resist exposed to the heated steam in the pretreatment step by using a resist stripping liquid, wherein the predetermined temperature range and the predetermined time are set according to the resist.

10. 发明申请

US20220403631A1 LIQUID RECOVERY SYSTEM, LIQUID SUPPLY SYSTEM, AND PRESSURE REGULATING METHOD 有权
公开(公告)号：US20220403631A1
公开(公告)日：2022-12-22
申请号：US17839530
申请日：2022-06-14
申请人： NOMURA MICRO SCIENCE CO., LTD.
发明人： Katsumi YAMAMOTO
IPC分类号： E03B7/07 , E03B11/02 , E03B1/04
摘要： A ultrapure water supply system 10 includes a pure water tank 16 provided vertically below a use point 30, a return pipe 32 through which ultrapure water is returned from the use point 30 to the pure water tank 16, a first pressure regulating valve 40 that is provided at a first position H1 of the return pipe 32 and adjusts a first pressure upstream of the first position H1 and a second pressure regulating valve 42 that is provided at a second position H2 downstream of the first position H1 and vertically below the first position H1 of the return pipe 32 and adjusts a second pressure downstream of the first position H1 and upstream of the second position H2.

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