会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 3. 发明授权
    • Probe needle test apparatus and method
    • 探针测试仪和方法
    • US06906341B2
    • 2005-06-14
    • US10759094
    • 2004-01-20
    • Soo-Min ByunJoon-Su JiByoung-Joo Kim
    • Soo-Min ByunJoon-Su JiByoung-Joo Kim
    • H01L21/66G01R31/28H01L23/58
    • G01R31/2886G01R31/2851
    • A test apparatus is provided which includes a substrate retainer, a probe card, a tester, a test head, and a main controller. The substrate retainer is for holding a substrate having a plurality of chips. The probe card has an array of probes aligned in rows and columns, and each of the probes is for contacting respective chips of the substrate held by the retainer and each includes a plurality of probe needles. The tester conducts a test routine by generating test signals and by receiving and analyzing return signals, and the test head is for sending the test signals from the tester to the probe card, and for sending the return signals from the probe card to the tester. The main controller includes a test result database for storing test data analyzed by the tester, and for executing a cleaning error detection program to determine whether the test data contains cleaning errors resulting from a lack of cleanliness of the probe needles of the probes.
    • 提供一种测试装置,其包括基板保持器,探针卡,测试器,测试头和主控制器。 基板保持器用于保持具有多个芯片的基板。 探针卡具有排列成行和列的探针阵列,并且每个探针用于接触由保持器保持的基板的相应芯片,并且每个探针包括多个探针。 测试人员通过产生测试信号和接收和分析返回信号进行测试程序,测试头用于将测试信号从测试仪发送到探针卡,并将返回信号从探针卡发送到测试仪。 主控制器包括用于存储由测试仪分析的测试数据的测试结果数据库,以及用于执行清洁错误检测程序以确定测试数据是否包含由于探针的探针的清洁度不足而导致的清洁错误。