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    • 3. 发明申请
    • SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • 基板处理装置和基板处理方法
    • US20090081810A1
    • 2009-03-26
    • US11664684
    • 2005-09-22
    • Satomi HamadaMichihisa Kono
    • Satomi HamadaMichihisa Kono
    • H01L21/66C23F1/00
    • H01L21/67051H01L21/68707
    • A substrate processing apparatus has a fluid supply means 20 for supplying fluid to a substrate W and a fluid collection means 21 for collecting the fluid in the vicinity of the substrate W, the fluid supply means 20 having a fluid spurt section 20a, the fluid collection means 21 having a fluid suction section 21a opening in the vicinity of the fluid spurt section 20a. Since the fluid collection means 21 suctions and collects the fluid floating around the substrate W as a result of the liquid having been supplied from the fluid spurt section 20a to the substrate W, it is possible to prevent the substrate W from being contaminated after the substrate W being processed with the fluid supplied from the fluid supply means 20.
    • 基板处理装置具有用于向基板W供给流体的流体供给装置20和用于收集基板W附近的流体的流体收集装置21,流体供给装置20具有流体喷出部20a,流体收集 装置21具有在流体喷出部分20a附近开口的流体抽吸部分21a。 由于液体收集装置21由于从液体喷出部分20a供给到基底W而液体被吸收并收集在基底W周围浮动的流体,所以可以防止基底W在基底之后被污染 W被从流体供应装置20供应的流体处理。
    • 4. 发明授权
    • Motor stator structure
    • 电机定子结构
    • US07719148B2
    • 2010-05-18
    • US11773112
    • 2007-07-03
    • Tomoyuki OkadaMichihisa KonoHiroyuki SatoMinoru Nakajima
    • Tomoyuki OkadaMichihisa KonoHiroyuki SatoMinoru Nakajima
    • H02K3/52
    • H02K3/522B60L11/12B60L2220/50H02K5/225H02K2203/09Y02T10/641Y02T10/7077
    • In a motor stator structure, a neutral-point bus ring is arranged along an inner peripheral portion of a stator, and alternately includes a larger-diameter portion, a first link portion, a smaller-diameter portion, and a second link portion. An end of a wound wire pulled out of a coil is located between radially-extending adjacent first and second link portions. A connecting terminal is connected at one end to the end of the wound wire, and at the other end to the first and second link portions. The use of the neutral-point bus ring ensures that a neutral point can be formed without bending the end of the wound wire of the coil into a U-shape. Particularly when a rectangular cross-section wire difficult to bend is used as the wound wire, the processing cost can be reduced.
    • 在电动机定子结构中,沿着定子的内周部布置有中性点母线环,并且交替地包括大直径部,第一连接部,小直径部和第二连杆部。 从线圈拉出的绕线的端部位于径向延伸的相邻的第一和第二连接部之间。 连接端子一端连接到绕线的端部,另一端连接到第一和第二连接部。 使用中性点总线环确保可以形成中性点而不将线圈的绕线的端部弯曲成U形。 特别是当使用难弯曲的矩形截面电线作为绕线时,可以降低加工成本。