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1. 发明申请

US20090044624A1 ANGULAR VELOCITY SENSOR AND PROCESS FOR PRODUCING THE SAME 有权
标题翻译：角速度传感器及其制造方法
公开(公告)号：US20090044624A1
公开(公告)日：2009-02-19
申请号：US12067539
申请日：2006-11-01
申请人： Michihiko Hayashi , Masakazu Hatanaka
发明人： Michihiko Hayashi , Masakazu Hatanaka
IPC分类号： G01C19/56 , H01L41/22
CPC分类号： G01C19/5607 , H03H9/0547 , H03H9/21 , Y10T29/42
摘要： The present invention provides an angular velocity sensor having a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element.To realize this, the angular velocity sensor of the present invention provides mixed gas of inert gas and oxygen gas in the package so that the mixed gas in the package has a pressure higher than the atmospheric pressure.
摘要翻译：本发明提供了一种具有稳定特性的角速度传感器，其中即使当通过与包括振动元件的包装中的氧气的反应产生二氧化碳气体时，振动元件的驱动效率变化也小。为了实现这一点，本发明的角速度传感器在包装中提供惰性气体和氧气的混合气体，使得包装中的混合气体具有高于大气压的压力。

2. 发明授权

US07946173B2 Angular velocity sensor and process for producing the same 有权
标题翻译：角速度传感器及其制造方法
公开(公告)号：US07946173B2
公开(公告)日：2011-05-24
申请号：US12067539
申请日：2006-11-01
申请人： Michihiko Hayashi , Masakazu Hatanaka
发明人： Michihiko Hayashi , Masakazu Hatanaka
IPC分类号： G01P9/04 , G01C19/56
CPC分类号： G01C19/5607 , H03H9/0547 , H03H9/21 , Y10T29/42
摘要： An angular velocity sensor has a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element. To realize this, the angular velocity sensor has a mixed gas of inert gas and oxygen gas in the package so that the mixed gas in the package has a pressure higher than the atmospheric pressure.
摘要翻译：角速度传感器具有稳定的特性，其中即使当通过与其中包含振动元件的包装中的氧气的反应产生二氧化碳气体时，振动元件的驱动效率变化也小。为了实现这一点，角速度传感器在包装中具有惰性气体和氧气的混合气体，使得包装中的混合气体具有高于大气压力的压力。

3. 发明申请

US20100117493A1 PIEZOELECTRIC DEVICE AND ITS MANUFACTURING METHOD 有权
标题翻译：压电器件及其制造方法
公开(公告)号：US20100117493A1
公开(公告)日：2010-05-13
申请号：US12596867
申请日：2008-04-24
申请人： Michihiko Hayashi , Masahiro Yasumi , Shoji Okamoto
发明人： Michihiko Hayashi , Masahiro Yasumi , Shoji Okamoto
IPC分类号： H01L41/047 , H01L41/22
CPC分类号： H01L41/319 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1646 , G01C19/56 , G01C19/5607 , G01C25/00 , H01L41/0477 , H01L41/0815 , H01L41/29 , H01L41/316 , Y10T29/42
摘要： Upper adhesion layer 35 formed between piezoelectricity layer 32 and upper electrode layer 34 so as to abut on piezoelectricity layer 32 and upper electrode layer 34 is included. Upper adhesion layer 35 includes first tungsten layer 47 made of tungsten in which an α phase and a β phase coexist and second tungsten layer 48 made of α-phase tungsten. First tungsten layer 47 is configured so as to abut on piezoelectricity layer 32. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.
摘要翻译：包括在压电层32和上电极层34之间形成的与上压电层32和上电极层34邻接的上粘合层35。上粘合层35包括由钨制成的第一钨层47，其中α相和/ 由α相钨制成的相共存和第二钨层48。第一钨层47被配置为与压电层32邻接。可以获得能够提高压电层和电极层两者的粘附性并降低基点点电压波动的压电装置的高温运行，以提高可靠性。

4. 发明申请

US20050029606A1 Angular-velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US20050029606A1
公开(公告)日：2005-02-10
申请号：US10495926
申请日：2003-08-06
申请人： Tsutomu Nakanishi , Hirofumi Tajika , Michihiko Hayashi , Satoshi Ouchi
发明人： Tsutomu Nakanishi , Hirofumi Tajika , Michihiko Hayashi , Satoshi Ouchi
IPC分类号： G01C19/56 , G01C19/5607 , H01L41/22 , H01L41/29 , H01L41/332 , H01L27/14 , H01L29/82 , H01L29/84
CPC分类号： G01C19/5607
摘要： An angular velocity sensor includes a tuning-fork-shaped substrate (1), drivers (110) that are provided on the arms forming a tuning fork and vibrate the arms; monitors (150) for detecting vibrations generated by the drivers (110); and detectors (120) for detecting displacement of vibrations made in application of an angular velocity. The drivers (110), the monitors (150), and the detectors (120) are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.
摘要翻译：角速度传感器包括音叉形基板（1），驱动器（110），其设置在形成音叉的臂上并使臂振动; 监视器（150），用于检测由驾驶员（110）产生的振动; 以及用于检测施加角速度的振动的位移的检测器（120）。驱动器（110），监视器（150）和检测器（120）由形成在臂上的下电极层，压电薄膜和上电极层制成。压电薄膜的外周缘成形为具有至少一个平坦部分的台阶。沿着外周边缘的平坦部分没有形成上电极层。这种结构防止了下电极层和上电极层之间的短路。

5. 发明授权

US08117916B2 Electronic component and method for manufacturing the same 有权
标题翻译：电子元件及其制造方法
公开(公告)号：US08117916B2
公开(公告)日：2012-02-21
申请号：US12447548
申请日：2007-11-12
申请人： Shoji Okamoto , Masahiro Yasumi , Yuuki Nakamura , Satoshi Ohuchi , Michihiko Hayashi
发明人： Shoji Okamoto , Masahiro Yasumi , Yuuki Nakamura , Satoshi Ohuchi , Michihiko Hayashi
IPC分类号： G01P9/04 , G01P15/09
CPC分类号： G01C19/5607 , G01C19/5628 , H01L41/0477 , H01L41/0815 , H01L41/29 , Y10T29/42
摘要： An electronic component is disclosed, and this component includes an element with an electrode section which is formed of upper electrode (74), lower electrode (72), piezoelectric unit (70) placed between upper electrode (74) and lower electrode (72), and adhesive layer (76) layered between upper electrode (74) and piezoelectric unit (70). Piezoelectric unit (70) includes piezoelectric layer (80) made of piezoelectric material containing lead, and adhesive layer (76) includes a tungsten layer made of tungsten-based material. Piezoelectric layer (80) and the tungsten layer are layered together. The structure discussed above allows preventing a piezoelectric constant from lowering and a base-point voltage from varying. The lowering and the varying have been caused by a temperature-rise.
摘要翻译：公开了一种电子部件，该部件包括具有上部电极（74），下部电极（72），设置在上部电极（74）和下部电极（72）之间的压电部件（70））形成的电极部的元件，以及层叠在上电极（74）和压电单元（70）之间的粘合层（76）。压电单元（70）包括由包含铅的压电材料制成的压电层（80），并且粘合剂层（76）包括由钨基材料制成的钨层。压电层（80）和钨层层叠在一起。上述结构允许防止压电常数降低和基点电压变化。降温和变化是由温升引起的。

6. 发明申请

US20100043547A1 ELECTRONIC COMPONENT AND METHOD FOR MANUFACTURING THE SAME 有权
标题翻译：电子元件及其制造方法
公开(公告)号：US20100043547A1
公开(公告)日：2010-02-25
申请号：US12447548
申请日：2007-11-12
申请人： Shoji Okamoto , Masahiro Yasumi , Yuuki Nakamura , Satoshi Ohuchi , Michihiko Hayashi
发明人： Shoji Okamoto , Masahiro Yasumi , Yuuki Nakamura , Satoshi Ohuchi , Michihiko Hayashi
IPC分类号： G01P9/04 , H01L41/047 , H01L41/22
CPC分类号： G01C19/5607 , G01C19/5628 , H01L41/0477 , H01L41/0815 , H01L41/29 , Y10T29/42
摘要： An electronic component is disclosed, and this component includes an element with an electrode section which is formed of upper electrode (74), lower electrode (72), piezoelectric unit (70) placed between upper electrode (74) and lower electrode (72), and adhesive layer (76) layered between upper electrode (74) and piezoelectric unit (70). Piezoelectric unit (70) includes piezoelectric layer (80) made of piezoelectric material containing lead, and adhesive layer (76) includes a tungsten layer made of tungsten-based material. Piezoelectric layer (80) and the tungsten layer are layered together. The structure discussed above allows preventing a piezoelectric constant from lowering and a base-point voltage from varying. The lowering and the varying have been caused by a temperature-rise.
摘要翻译：公开了一种电子部件，该部件包括具有上部电极（74），下部电极（72），设置在上部电极（74）和下部电极（72）之间的压电部件（70））形成的电极部的元件，以及层叠在上电极（74）和压电单元（70）之间的粘合层（76）。压电单元（70）包括由包含铅的压电材料制成的压电层（80），并且粘合剂层（76）包括由钨基材料制成的钨层。压电层（80）和钨层层叠在一起。上述结构允许防止压电常数降低和基点电压变化。降温和变化是由温升引起的。

7. 发明授权

US07164179B2 Angular-velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US07164179B2
公开(公告)日：2007-01-16
申请号：US10495926
申请日：2003-08-06
申请人： Tsutomu Nakanishi , Hirofumi Tajika , Michihiko Hayashi , Satoshi Ouchi
发明人： Tsutomu Nakanishi , Hirofumi Tajika , Michihiko Hayashi , Satoshi Ouchi
IPC分类号： H01L27/14
CPC分类号： G01C19/5607
摘要： An angular velocity sensor includes a tuning-fork-shaped substrate (1), drivers (110) that are provided on the arms forming a tuning fork and vibrate the arms; monitors (150) for detecting vibrations generated by the drivers (110); and detectors (120) for detecting displacement of vibrations made in application of an angular velocity. The drivers (110), the monitors (150), and the detectors (120) are made of a lower electrode layer, a piezoelectric thin film, and an upper electrode layer formed on the arms. The outer peripheral edge of the piezoelectric thin film is shaped like a step having at least one flat portion. The flat portion along the outer peripheral edge has no upper electrode layer formed thereon. This structure prevents short circuits between the lower electrode layer and the upper electrode layer.
摘要翻译：角速度传感器包括音叉形基板（1），驱动器（110），其设置在形成音叉的臂上并使臂振动; 监视器（150），用于检测由驾驶员（110）产生的振动; 以及用于检测施加角速度的振动的位移的检测器（120）。驱动器（110），监视器（150）和检测器（120）由形成在臂上的下电极层，压电薄膜和上电极层制成。压电薄膜的外周缘成形为具有至少一个平坦部分的台阶。沿着外周边缘的平坦部分没有形成上电极层。这种结构防止了下电极层和上电极层之间的短路。

8. 发明授权

US06984572B2 Method for manufacturing electronic component 有权
标题翻译：电子元件制造方法
公开(公告)号：US06984572B2
公开(公告)日：2006-01-10
申请号：US10473980
申请日：2003-01-24
申请人： Masaya Nakatani , Michihiko Hayashi , Hirofumi Tajika
发明人： Masaya Nakatani , Michihiko Hayashi , Hirofumi Tajika
IPC分类号： H01L21/301
CPC分类号： G01C19/5607 , H01L21/3043
摘要： An electronic circuit is manufactured by the following method. Elements are formed on a front surface of a substrate, and then, a recess is formed around each of the elements in the front surface of the substrate. Then, a portion of the substrate is removed from a back surface of the substrate until reaching the bottom of the recess. In the method, the elements are separated at once by removing the portion of the substrate from the back surface, and thus, the elements are manufactured efficiently.
摘要翻译：通过以下方法制造电子电路。元件形成在基板的前表面上，然后在基板的前表面中的每个元件周围形成凹部。然后，将基板的一部分从基板的背面去除，直至到达凹部的底部。在该方法中，通过从背面去除基板的一部分，元件被分开，因此有效地制造元件。

9. 发明授权

US5030897A Driving current control circuit 失效
标题翻译：驱动电流控制电路
公开(公告)号：US5030897A
公开(公告)日：1991-07-09
申请号：US448857
申请日：1989-12-12
申请人： Kenzi Ohtani , Michihiko Hayashi
发明人： Kenzi Ohtani , Michihiko Hayashi
IPC分类号： H02P6/08 , H02P6/00
CPC分类号： H02P6/28
摘要： A driving current control circuit capable of controlling the logarithmic base current of two transistors in a current driver to control a drive current for a motor. This control circuit controls the current of the current regulator depending on a control signal, thereby controlling the driving current for the transistors in the current driver. The control circuit includes an output current mirror composed of two output-side transistors and a single input-side transistor. The two output-side transistors control the inflow and outflow of the driving current for the current driver. A single phase compensating condenser is connected to the input-side transistor. This arrangement makes the entire circuit simple and compact and causes an improved controlling characteristic.
摘要翻译：一种驱动电流控制电路，其能够控制电流驱动器中的两个晶体管的对数基极电流，以控制电动机的驱动电流。该控制电路根据控制信号控制电流调节器的电流，从而控制当前驱动器中的晶体管的驱动电流。控制电路包括由两个输出侧晶体管和单个输入侧晶体管组成的输出电流镜。两个输出侧晶体管控制当前驱动器的驱动电流的流入和流出。单相补偿电容器连接到输入侧晶体管。这种布置使得整个电路简单紧凑，并且导致改进的控制特性。

10. 发明授权

US08044557B2 Piezoelectric device and its manufacturing method 有权
标题翻译：压电器件及其制造方法
公开(公告)号：US08044557B2
公开(公告)日：2011-10-25
申请号：US12596867
申请日：2008-04-24
申请人： Michihiko Hayashi , Masahiro Yasumi , Shoji Okamoto
发明人： Michihiko Hayashi , Masahiro Yasumi , Shoji Okamoto
IPC分类号： H01L41/08
CPC分类号： H01L41/319 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1632 , B41J2/1635 , B41J2/1646 , G01C19/56 , G01C19/5607 , G01C25/00 , H01L41/0477 , H01L41/0815 , H01L41/29 , H01L41/316 , Y10T29/42
摘要： An upper adhesion layer 35 formed between a piezoelectricity layer 32 and an upper electrode layer 34 so as to abut on the piezoelectricity layer 32 and the upper electrode layer 34 is included. The upper adhesion layer 35 includes a first tungsten layer 47 made of tungsten in which an α phase and a β phase coexist and a second tungsten layer 48 made of α-phase tungsten. The first tungsten layer 47 is configured so as to abut on the piezoelectricity layer 32. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.
摘要翻译：包括形成在压电层32和上电极层34之间以抵靠压电层32和上电极层34的上粘合层35。上部粘合层35包括由钨制成的第一钨层47，其中α相和/ 相共存和由α相钨制成的第二钨层48。第一钨层47被构造成邻接在压电层32上。可以获得能够提高压电层和电极层的粘合性的压电装置，并且降低基本点电压波动高温运行的时间，以提高可靠性。

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