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    • 2. 发明申请
    • Fabrication method for a trench capacitor with an insulation collar
    • 具有绝缘套管的沟槽电容器的制造方法
    • US20050153507A1
    • 2005-07-14
    • US11013921
    • 2004-12-17
    • Thomas HechtTill SchlosserMichael Sesterhenn
    • Thomas HechtTill SchlosserMichael Sesterhenn
    • H01L21/265H01L21/76H01L21/8242
    • H01L27/10867H01L21/26586
    • The present invention provides a fabrication method for a trench capacitor with an insulation collar in a substrate, which is electrically connected to the substrate on one side via a buried contact. After forming and sinking an electrically conductive filling, an insulation collar and, if appropriate, a buried contact that is connected on all sides, the following are effected: providing at least one liner layer in the trench; filling the trench with a filling made of an auxiliary material, which filling is encapsulated by the at least one liner layer in the trench; providing a mask on the filling for defining the structure of the buried contact, the mask having no projections into the trench; removing a part of the filling using the mask; removing an underlying part of the at least one liner layer for uncovering a corresponding part of the insulation collar.
    • 本发明提供了一种用于在衬底中具有绝缘套环的沟槽电容器的制造方法,其通过埋入触点在一侧电连接到衬底。 在形成和下沉导电填料之后,绝缘套环以及如果合适的话,在所有侧面上连接的埋入触头都可以实现:在沟槽中提供至少一个衬垫层; 用由辅助材料制成的填充物填充沟槽,该填充物被沟槽中的至少一个衬垫层封装; 在所述填充物上设置掩模以限定所述埋入接触件的结构,所述掩模没有突起到所述沟槽中; 使用掩模去除一部分填充物; 去除所述至少一个衬垫层的下部部分以露出所述绝缘套环的对应部分。
    • 5. 发明授权
    • Dosing device and writing implement with a dosing device
    • 给药装置和书写工具
    • US07093994B2
    • 2006-08-22
    • US10415971
    • 2001-10-31
    • Tilo StrobeltGuenther WaibelMichael SesterhennJoerg Mellmann
    • Tilo StrobeltGuenther WaibelMichael SesterhennJoerg Mellmann
    • B43K5/18
    • B43K5/189
    • A dosing device for demand-dosing a liquid includes a primary container, a point of release for releasing the liquid, a main liquid channel between the primary container and the point of release and a vented secondary container, wherein the secondary container is coupled to the main liquid channel at a branch point, wherein the secondary container and the main liquid channel are designed such that the main liquid channel preferably fills with the liquid before the secondary container. The dosing device further includes a liquid valve between the primary container and the branch point, a sensor for measuring the filling level in the secondary container and finally means for opening the valve responsive to a predetermined filling level in the secondary container. By measuring the flow not directly in the main stream but via a filling level of a secondary container in an auxiliary stream, the secondary container can be designed independently of ambient temperature and ambient pressure so that cases of failure due to changing ambient conditions do no longer occur. A preferred application of the dosing system is the use of it in an electronic writing apparatus.
    • 用于对液体进行需求配量的计量装置包括主容器,用于释放液体的释放点,主容器和释放点之间的主液体通道以及排放的次级容器,其中第二容器联接到 主液体通道在分支点处,其中第二容器和主液体通道被设计成使得主液体通道优选地在第二容器之前填充液体。 所述计量装置还包括在所述主容器和所述分支点之间的液体阀,用于测量所述辅助容器中的填充水平的传感器,以及最终响应于所述次级容器中的预定填充水平打开所述阀的装置。 通过不是直接在主流中测量流量,而是通过辅助流中的次级容器的填充水平测量流量,可以独立于环境温度和环境压力设计次级容器,以便由于环境条件的变化而导致的故障情况不再 发生。 剂量系统的优选应用是在电子书写装置中使用它。