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1. 发明授权

US6118525A Wafer inspection system for distinguishing pits and particles 失效
公开(公告)号：US6118525A
公开(公告)日：2000-09-12
申请号：US958230
申请日：1997-10-27
申请人： Michael E. Fossey , John C. Stover , Lee D. Clementi
发明人： Michael E. Fossey , John C. Stover , Lee D. Clementi
IPC分类号： G01N21/00 , G01N21/86
CPC分类号： G01N21/9501 , H01L22/12 , G01N2021/945
摘要： A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.

2. 发明授权

US6122047A Methods and apparatus for identifying the material of a particle occurring on the surface of a substrate 有权
标题翻译：用于识别发生在基底表面上的颗粒的材料的方法和装置
公开(公告)号：US6122047A
公开(公告)日：2000-09-19
申请号：US231685
申请日：1999-01-14
申请人： John C. Stover , Songping Gao , Michael E. Fossey , Lee Dante Clementi
发明人： John C. Stover , Songping Gao , Michael E. Fossey , Lee Dante Clementi
IPC分类号： G01N21/55 , G01N21/94 , G01N21/88
CPC分类号： G01N21/94 , G01N2021/556
摘要： The composition of a particle occurring on the surface of a smooth substrate is identified by impinging the surface with a light beam having a strong P-polarized component at an oblique angle of incidence to the surface, and collecting light scattered from the surface at forward, center, and back locations relative to the portion of the surface impinged by the incident beam. The intensities of the light collected at these locations are measured by detectors and converted into signals, and the magnitudes of the signals are compared to correlations of particle material as a function of the relative magnitudes of the forward-, center-, and back-scatter signals so as to identify the material whose correlation most nearly matches the measured detector signals. Preferably, a ratio of the back detector signal magnitude to forward detector signal magnitude is correlated with particle material and back detector signal magnitude. Alternatively or additionally, a ratio of back detector signal magnitude to center detector signal magnitude is correlated with particle material and back detector signal magnitude. Average particle diameter versus back detector signal magnitude is correlated with particle material.
摘要翻译：发生在光滑基板表面上的颗粒的组成通过用具有与表面倾斜的入射角的强P偏振分量的光束照射表面来识别表面，并且收集从表面向前散射的光，相对于被入射光束入射的表面的部分的中心和后部位置。在这些位置处收集的光的强度由检测器测量并转换为信号，并且将信号的大小与作为前向，中心和后向散射的相对幅度的函数的粒子材料的相关性进行比较信号，以便识别其相关性最接近于测量的检测器信号的材料。优选地，反向检测器信号幅度与正向检测器信号幅度的比率与粒子材料和反向检测器信号幅度相关。或者或另外，反向检测器信号幅度与中心检测器信号幅度的比率与颗粒材料和反向检测器信号幅度相关。平均粒径对背景检测器信号幅度与粒子物质相关。

3. 发明授权

US5565852A Smoke detector with digital display 失效
标题翻译：烟雾探测器与数字显示
公开(公告)号：US5565852A
公开(公告)日：1996-10-15
申请号：US274922
申请日：1994-07-13
申请人： Mark A. Peltier , Douglas H. Marman , David S. Terrett , Michael E. Fossey
发明人： Mark A. Peltier , Douglas H. Marman , David S. Terrett , Michael E. Fossey
IPC分类号： G08B25/01 , G08B19/00
CPC分类号： G08B25/014
摘要： An improved environmental alarm system has centralized control of local sensor display capabilities displays, on the sensor itself, a variety of sensor data including sensor address, and detected levels of one or more environmental conditions. Alphanumeric characters are displayed at individual sensors in response to commands from a master microprocessor directing local sensor display content and timing. A local microcontroller within each sensor interprets the detected signal and prepares a resulting data signal that is available for downloading into the alphanumeric display in compliance with a coded message from the master microprocessor.
摘要翻译：改进的环境报警系统具有局部传感器显示能力显示的集中控制，在传感器本身上，包括传感器地址的各种传感器数据以及检测到的一个或多个环境条件的水平。响应于来自主微处理器的命令，指示本地传感器显示内容和定时，单个传感器上显示字母数字字符。每个传感器内的本地微控制器解释检测到的信号，并根据来自主微处理器的编码消息准备可用于下载到字母数字显示器的结果数据信号。

4. 再颁专利

USRE44604E1 System for and method of synchronous acquisition of pulsed source light in performance of monitoring aircraft flight operation 有权
公开(公告)号：USRE44604E1
公开(公告)日：2013-11-19
申请号：US13453862
申请日：2012-04-23
申请人： J. Richard Kerr , Gregory A. Zuro , Michael E. Fossey
发明人： J. Richard Kerr , Gregory A. Zuro , Michael E. Fossey
IPC分类号： H04N7/18 , H04N7/00
CPC分类号： H04N19/186 , G01S1/70 , G06T5/50 , G08G5/025
摘要： A system for and a method of synchronous acquisition of pulsed source light performs monitoring of aircraft flight operation. Diode sources of illumination (18, 108, 208) are pulsed (16, 106, 206) at one-half the video frame rate of an imaging camera (36, 136, 236). Alternate frames view the world-scene with lights of interest pulsed on, and then off, respectively. Video differencing (34, 134, 234) eliminates the background scene, as well as all lights not of interest. Suitable threshholding over a resulting array of camera pixel-differences acquires the desired lights and represents them as point symbology on a display (40, 140, 240). In an enhanced vision landing system embodiment, the desired lights (symbols) overlay or are fused on a thermal image of the scene; alternatively, the symbols overlay a visible scene (TV) image.

5. 发明授权

US06292259B1 Wafer inspection system for distinguishing pits and particles 有权
公开(公告)号：US06292259B1
公开(公告)日：2001-09-18
申请号：US09624502
申请日：2000-07-24
申请人： Michael E. Fossey , John C. Stover
发明人： Michael E. Fossey , John C. Stover
IPC分类号： G01N2100
CPC分类号： G01N21/9501 , G01N2021/945 , H01L22/12
摘要： A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.

6. 发明授权

US5361268A Switchable two-wavelength frequency-converting laser system and power control therefor 失效
标题翻译：可切换双波长变频激光系统及其功率控制
公开(公告)号：US5361268A
公开(公告)日：1994-11-01
申请号：US064515
申请日：1993-05-18
申请人： Michael E. Fossey , Yunlong Sun
发明人： Michael E. Fossey , Yunlong Sun
IPC分类号： B23K26/00 , G02F1/35 , G02F1/37 , H01S3/107
CPC分类号： G02F1/3534 , G02F1/37 , H01S3/109 , H01S3/08054 , H01S3/107 , H01S3/1103
摘要： A laser system and power control have a polarization state changer that produces in response to an incident beam with selected polarization state at a first wavelength .lambda..sub.1 a beam at .lambda..sub.1 with a desired polarization state. A frequency converter responds to the beam at .lambda..sub.1 with the desired polarization state to produce a frequency converted beam at a second, different wavelength .lambda..sub.2. When the polarization state changer and the frequency converter are located within a laser cavity, the laser system is operable in three different states and produces an output beam at .lambda..sub.1 or .lambda..sub.2, or no output beam, depending on the polarization state changer. In this intracavity configuration the polarization state changer is also operable as a Q-switch. When the polarization state changer and the frequency converter are located outside a laser cavity, the polarization state changer is operable in the whole range between its first and third states; the device thus produces an output beam at .lambda..sub.2, an output beam including components at .lambda..sub.1 and .lambda..sub.2, or an output beam having no component at .lambda..sub.2, again depending on the polarization state changer. In the extracavity configuration the power in the output at .lambda..sub.2 is continuously controllable between a maximum and zero.
摘要翻译：激光系统和功率控制具有偏振状态变换器，其响应于具有选定的偏振态的入射光束，其以第一波长λ1具有λ1的具有期望偏振态的光束。频率转换器以λ1响应所需的偏振状态的波束，以产生在第二不同波长λ2的频率转换波束。当偏振状态变换器和变频器位于激光腔内时，激光系统可在三种不同状态下工作，并根据偏振状态变化器产生λ1或λ2的输出光束，或不输出光束。在该腔内配置中，偏振状态变换器也可用作Q开关。当偏振状态变换器和变频器位于激光腔外部时，偏振状态变换器可在其第一和第三状态之间的整个范围内操作; 因此该装置产生λ2的输出光束，包括λ1和λ2的分量的输出光束，或者不依赖于偏振状态变换器的，没有λ2分量的输出光束。在腔外构造中，λ2处的输出功率在最大值和零之间是连续可控的。

7. 发明授权

US06509965B2 Wafer inspection system for distinguishing pits and particles 有权
标题翻译：用于区分凹坑和颗粒的晶圆检查系统
公开(公告)号：US06509965B2
公开(公告)日：2003-01-21
申请号：US09906062
申请日：2001-07-17
申请人： Michael E. Fossey , John C. Stover , Lee D. Clementi
发明人： Michael E. Fossey , John C. Stover , Lee D. Clementi
IPC分类号： G01N2100
CPC分类号： G01N21/9501 , G01N2021/945 , H01L22/12
摘要： A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.
摘要翻译：提供了表面检查系统和方法，其检测诸如硅晶片的工件的表面上的诸如颗粒或凹坑的缺陷，并且还区分凹坑缺陷和颗粒缺陷。表面检查系统包括用于接收工件的检查站和定位和布置成在检查站扫描工件的表面的扫描仪。扫描仪包括布置成投射P偏振光束的光源和定位成扫描穿过工件表面的P偏振光束的扫描仪。该系统还提供了检测从工件散射的光的角度分布的差异，并且基于这些差异来区分颗粒缺陷和凹坑缺陷。

8. 发明授权

US4916536A Imaging range finder and method 失效
标题翻译：成像测距仪和方法
公开(公告)号：US4916536A
公开(公告)日：1990-04-10
申请号：US268337
申请日：1988-11-07
申请人： James R. Kerr , Michael E. Fossey , David M. Aikens , Bruce L. Cannon , John J. McDonald
发明人： James R. Kerr , Michael E. Fossey , David M. Aikens , Bruce L. Cannon , John J. McDonald
IPC分类号： G01S7/481 , G01S17/89
CPC分类号： G01S7/4817 , G01S17/89 , G01S7/4811
摘要： The imaging range finder of the invention includes a radiation transmitter, a transmitting section and a receiving section. The transmitting section directs radiation across an angular field of view by a first rotating mirror having a plurality of facets. The receiving section includes a second rotating mirror also with a plurality of facets which collects any reflected radiation. An image is produced by measuring the intensity of the reflected radiation at numerous points in the field of view. Range is determined by radiation modulation. Range may be determined more precisely at shorter ranges by modulating the radiation to produce two subcarriers and using one subcarrier to supply short range information. The finder is stabilized to preserve imaging and range finding accuracy when it is exposed to vibration or pitch-angle disturbance. The invention also discloses a method of imaging and range finding over very wide angles and at standard picture frame frequencies.
摘要翻译：本发明的成像测距仪包括辐射发射器，发射部分和接收部分。发射部分通过具有多个小平面的第一旋转反射镜引导横跨角度视场的辐射。接收部分包括具有收集任何反射辐射的多个小面的第二旋转镜。通过在视场中的多个点测量反射辐射的强度来产生图像。范围由辐射调制决定。通过调制辐射以产生两个子载波并且使用一个子载波来提供短距离信息，可以在较短范围内更准确地确定范围。当它被暴露于振动或俯仰角扰动时，取景器被稳定以保持成像和测距精度。本发明还公开了一种在非常宽的角度和标准图像帧频率下成像和测距的方法。

9. 发明授权

US4698785A Method and apparatus for detecting control system data processing errors 失效
标题翻译：用于检测控制系统数据处理错误的方法和装置
公开(公告)号：US4698785A
公开(公告)日：1987-10-06
申请号：US557631
申请日：1983-12-02
申请人： John P. Desmond , Douglas W. Ford , Michael E. Fossey , Michael Stanbro , Kenneth A. Zimmerman
发明人： John P. Desmond , Douglas W. Ford , Michael E. Fossey , Michael Stanbro , Kenneth A. Zimmerman
IPC分类号： G06F11/16 , G06F11/32
CPC分类号： G06F11/1637 , G06F11/328 , G06F11/321
摘要： A digital-based control data processing system detects during system operation the occurrence of data processing errors. Data processing accuracy is verified by receiving output information developed from system input information in accordance with a first operational function, computing a derived version of the system input information in accordance with a second operational function, and comparing the derived version of the system input information to the actual system input information to determine whether they differ by a predetermined operational tolerance. This method for verifying processing accuracy is especially advantageous for detecting latent software errors which are unique to a particular computer program. The processing system includes display apparatus which develops from the output information a set of display symbols that convey the information on a monitor screen to the pilot. Assigned to each display symbol is an identifying tag which identifies in real time a display symbol that conveys erroneous information.
摘要翻译：基于数字的控制数据处理系统在系统操作期间检测数据处理错误的发生。通过接收根据第一操作功能从系统输入信息开发的输出信息，根据第二操作功能计算系统输入信息的导出版本，并将系统输入信息的导出版本与实际的系统输入信息，以确定它们是否因预定的运行公差而不同。用于验证处理精度的该方法对于检测特定计算机程序唯一的潜在软件错误是特别有利的。该处理系统包括显示装置，该显示装置根据输出信息显示将监视器屏幕上的信息传送给飞行员的一组显示符号。分配给每个显示符号的是识别标签，其实时识别传达错误信息的显示符号。

10. 发明授权

US07705879B2 System for and method of synchronous acquisition of pulsed source light in performance of monitoring aircraft flight operation 有权
标题翻译：脉冲源光同步采集的系统和方法，用于监测飞机的飞行运行
公开(公告)号：US07705879B2
公开(公告)日：2010-04-27
申请号：US12279158
申请日：2007-02-13
申请人： J. Richard Kerr , Gregory A. Zuro , Michael E. Fossey
发明人： J. Richard Kerr , Gregory A. Zuro , Michael E. Fossey
IPC分类号： H04N7/18 , H04N7/00
CPC分类号： H04N19/186 , G01S1/70 , G06T5/50 , G08G5/025
摘要： A system for and a method of synchronous acquisition of pulsed source light performs monitoring of aircraft flight operation. Diode sources of illumination (18, 108, 208) are pulsed (16, 106, 206) at one-half the video frame rate of an imaging camera (36, 136, 236). Alternate frames view the world-scene with lights of interest pulsed on, and then off, respectively. Video differencing (34, 134, 234) eliminates the background scene, as well as all lights not of interest. Suitable threshholding over a resulting array of camera pixel-differences acquires the desired lights and represents them as point symbology on a display (40, 140, 240). In an enhanced vision landing system embodiment, the desired lights (symbols) overlay or are fused on a thermal image of the scene; alternatively, the symbols overlay a visible scene (TV) image.
摘要翻译：脉冲光源同步采集的系统和方法执行飞行器飞行操作的监控。二极管照明源（18,108,208）以成像照相机（36,136,236）的视频帧速率的一半被脉冲（16,106,206）。替代框架分别观察世界各地的场景，其中有兴趣的灯脉冲，然后关闭。视频差分（34，134，234）消除了背景场景，以及所有不感兴趣的灯光。在所得到的相机像素差异阵列上的合适的阈值获取期望的光并将其表示为显示器（40,140,240）上的点符号。在增强的视觉着陆系统实施例中，期望的光（符号）覆盖或融合在场景的热图像上; 或者，符号覆盖可见场景（TV）图像。

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