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2. 发明申请

US20050024707A1 Integrated continuous spectrum spatial light modulator 有权
标题翻译：集成连续光谱空间光调制器
公开(公告)号：US20050024707A1
公开(公告)日：2005-02-03
申请号：US10631087
申请日：2003-07-31
申请人： Jonathan Bernstein , Mehmet Dokmeci
发明人： Jonathan Bernstein , Mehmet Dokmeci
IPC分类号： G02B6/26 , G02B6/34 , G02B6/35 , G02B26/08 , G02F1/23
CPC分类号： G02B6/357 , G02B6/266 , G02B6/3516 , G02B6/3518 , G02B6/356 , G02B6/3566 , G02B6/3584 , G02B6/3594 , G02B26/0841 , Y10S359/904
摘要： A novel spatial light modulator system has a high fill factor MEMS array of tilting mirrors used to attenuate wavelength channels in an optical network and an interface control circuit controlling the tilting mirror array via received control signals. The control signals include definitions of the wavelength channels and desired attenuation. This control circuit may or may not be on the same chip as the mirror array. Each mirror is supported by one or more flexures, located symmetrically or asymmetrically with respect to the mirror's center of gravity, providing single-axis or two-axis rotation. Stiffener ribs at mirror edges provide a flatter mirror. Landing electrodes held at the same potential as the mirror prevent stiction, while strain relief slots relieve stress on the mirror or flexures. Mirrors fabricated from polysilicon or metal are polished flat using a CMP technique. This SLM design is non-interferometric, therefore increased angular tilt provides increased attenuation.
摘要翻译：一种新颖的空间光调制器系统具有用于衰减光网络中的波长信道的倾斜镜的高填充因子MEMS阵列和经由接收的控制信号控制倾斜镜阵列的接口控制电路。控制信号包括波长信道的定义和期望的衰减。该控制电路可以或可以不在与镜阵列相同的芯片上。每个镜子由相对于镜子的重心对称或不对称的一个或多个弯曲部支撑，提供单轴或双轴旋转。镜面边缘的加强筋提供更平坦的镜子。保持在与镜子相同电位的着陆电极防止静电，而应力消除槽释放反射镜上的应力或弯曲。使用CMP技术将由多晶硅或金属制成的反射镜抛光平面。这种SLM设计是非干涉式的，因此增加的角度倾斜提供增加的衰减。

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