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    • 3. 发明授权
    • Photoelectric detecting apparatus
    • 光电检测装置
    • US4202627A
    • 1980-05-13
    • US900856
    • 1978-04-28
    • Akiyoshi SuzkiIchiro KanoHideki YoshinariMasao TozukaRyozo HiragaYuzo KatoYasuo Ogino
    • Akiyoshi SuzkiIchiro KanoHideki YoshinariMasao TozukaRyozo HiragaYuzo KatoYasuo Ogino
    • G01B11/00G01B11/02G02B27/00G02B27/46G03F9/00H01L21/027H01L21/30
    • G03F9/70G01B11/02
    • An improved photoelectric detecting apparatus is disclosed in which a subject surface containing a pattern which diffracts light in a predetermined direction is scanned with spotlight and the diffracted light coming from the pattern is detected by means of photoelectric element so as to read out information of the pattern. The apparatus comprises a first photoelectric element for detecting the light diffracted in the predetermined direction, a second photoelectric element adapted for detecting light diffracted in directions other than the predetermined direction and an operational circuit for operating the signal derived from the first photoelectric element and that derived from the second one. Thus, when there is any diffractive matter such as flaw, dust and the like on the subject surface, diffracted light from the diffractive matter is detected by both the first and second photoelectric elements whereas diffracted light from the pattern is detected only by the first photoelectric element. By operating the outputs of the two photoelectric elements only the necessary information of the pattern can be read out.
    • 公开了一种改进的光电检测装置,其中包含以预定方向衍射光的图案的被摄体表面用聚光灯扫描,并且通过光电元件检测来自图案的衍射光,以便读出图案的信息 。 该装置包括用于检测沿预定方向衍射的光的第一光电元件,适用于检测沿除了预定方向以外的方向衍射的光的第二光电元件和用于操作从第一光电元件导出的信号的操作电路, 从第二个。 因此,当在物体表面上存在诸如缺陷,灰尘等的衍射物质时,来自衍射物质的衍射光由第一和第二光电元件都被检测,而来自图案的衍射光仅由第一光电 元件。 通过操作两个光电元件的输出,只能读出图案的必要信息。