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    • 4. 发明申请
    • Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium
    • 光致抗蚀剂母版的处理方法,记录介质的制造方法,记录介质的制造方法,光致抗蚀剂母版,记录媒体使用主和记录介质
    • US20050142320A1
    • 2005-06-30
    • US10507429
    • 2003-03-10
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • B05D3/00B30B15/06B32B3/26G03F7/20G11B7/0045G11B7/013G11B7/26
    • G11B7/261B23K26/0622B23K26/0823B23K26/0869B23K26/40B23K2103/50G03F7/70383G11B7/00456G11B7/24085G11B7/263G11B23/0085Y10S430/146Y10T428/24355Y10T428/31504
    • The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
    • 本发明涉及一种用于处理光刻胶涂覆板的方法,一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法,该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案, 使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。 通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c,从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。 当要形成的预制凹坑的长度短于4T时,例如,输入到光调制器109的脉冲信号序列的占空比在约50%至65%的范围内变化,使得脉冲 随着要形成的预制凹坑的长度变长,激光束的功率由如此产生的脉冲信号列调制,产生具有较高占空比的信号序列。 另一方面,当要形成的预制凹坑的长度等于或大于4T时,例如,产生具有恒定占空比的脉冲信号序列,独立于预制凹坑的长度 形成的激光束的功率由如此产生的脉冲信号串调制。
    • 9. 发明授权
    • Processing method for photoresist master, production method for recording medium-use mater, production method for recording medium, photoresist master, recording medium-use master and recording medium
    • 用于处理光致抗蚀剂涂覆的玻璃板的方法,用于制造用于记录介质的压模的方法,记录介质的制造方法,光致抗蚀剂涂覆的玻璃板,用于记录介质的压模和记录介质
    • US07297472B2
    • 2007-11-20
    • US10507429
    • 2003-03-10
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • Hisaji OyakeTatsuya KatoHajime UtsunomiyaMasanori ShibaharaKenji Yoneyama
    • G11B7/45G11B7/26
    • G11B7/261B23K26/0622B23K26/0823B23K26/0869B23K26/40B23K2103/50G03F7/70383G11B7/00456G11B7/24085G11B7/263G11B23/0085Y10S430/146Y10T428/24355Y10T428/31504
    • The present invention relates to a method for processing a photoresist-coated board, a method for manufacturing a stamper for a recording medium and a method for manufacturing a recording medium which can form a fine raised and depressed pattern having a uniform width after development even in the case where a laser beam having a relatively long wavelength is used for forming pre-pits on a recording medium with high accuracy. A photoresist-coated board 108 is constituted by laminating a light absorption layer 108b and a photosensitive material layer 108c on a glass substrate 108a in this order and is exposed to a laser beam 102 by condensing the laser beam 102 onto the photosensitive material layer 108c, thereby forming a raised and depressed pattern corresponding to pre-pits on the the photosensitive material layer 108. When the length of a pre-pit to be formed is shorter than 4 T, for example, the duty ratio of the pulse signal train input to the light modulator 109 is varied within a range from about 50% to 65% so that a pulse signal train having a higher duty ratio is generated as the length of a pre-pit to be formed becomes longer and the power of a laser beam is modulated by the thus generated pulse signal train. On the other hand, when the length of a pre-pit to be formed is equal to or longer than 4 T, for example, a pulse signal train having a constant duty ratio is generated independently of the length of the pre-pit to be formed and the power of a laser beam is modulated by the thus generated pulse signal train.
    • 本发明涉及一种用于处理光刻胶涂覆板的方法,一种用于制造用于记录介质的压模的方法和一种用于制造记录介质的方法,该记录介质可以在显影后形成具有均匀宽度的细微凸起和凹陷图案, 使用具有较长波长的激光束以高精度在记录介质上形成预凹坑的情况。 通过将光吸收层108b和感光材料层108c依次层叠在玻璃基板108a上并通过将激光束102聚光到感光材料上而暴露于激光束102而构成光刻胶层108 层108c,从而形成对应于感光材料层108上的预凹坑的凸起和凹陷图案。 当要形成的预制凹坑的长度短于4T时,例如,输入到光调制器109的脉冲信号序列的占空比在约50%至65%的范围内变化,使得脉冲 随着要形成的预制凹坑的长度变长,激光束的功率由如此产生的脉冲信号列调制,产生具有较高占空比的信号序列。 另一方面,当要形成的预制凹坑的长度等于或大于4T时,例如,产生具有恒定占空比的脉冲信号序列,独立于预制凹坑的长度 形成的激光束的功率由如此产生的脉冲信号串调制。