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    • 5. 发明授权
    • Heat sink and its manufacturing method
    • 散热片及其制造方法
    • US06758264B2
    • 2004-07-06
    • US10343214
    • 2003-01-29
    • Masanobu Azuma
    • Masanobu Azuma
    • H05K720
    • H01L23/3731H01L21/4882H01L23/3732H01L23/3735H01L2924/0002Y10T29/4935H01L2924/00
    • A heat sink including a substrate of insulating ceramic and, superimposed on its upper surface, a diamond film for disposing an element thereon. The heat sink has excellent heat radiation characteristics and is stable during use. This heat sink is obtained by providing a substrate of ceramic containing aluminum nitride of high thermal conductivity as a principal component; forming on the substrate a bonding member layer, such as a silicon film which is capable of being bonded with the substrate and a diamond film; and forming a polycrystalline diamond film of high quality on the bonding member layer so that the polycrystalline diamond film is strongly bonded with the substrate via the bonding member layer interposed therebetween in accordance with, for example, the vapor phase method.
    • 一种散热器,其包括绝缘陶瓷的基板,并且在其上表面上叠加用于在其上设置元件的金刚石膜。 散热片具有优异的散热特性,使用时稳定。 该散热器是通过提供含有高导热性氮化铝的陶瓷基板作为主要成分而获得的; 在基板上形成能够与基板结合的金刚石膜等的接合部件层, 以及在接合构件层上形成高品质的多晶金刚石膜,使得多晶金刚石膜通过例如气相法通过接合构件层与基板牢固地结合。