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    • 3. 发明授权
    • Sensor device
    • 传感器装置
    • US08143689B2
    • 2012-03-27
    • US11597280
    • 2006-09-19
    • Clyde WarsopAndrew Julian PressMartyn John Hucker
    • Clyde WarsopAndrew Julian PressMartyn John Hucker
    • H01L31/058
    • G01F1/6845G01P5/12G01P13/025
    • A sensor device for sensing air flow speed at the exterior of an aircraft, comprising a substrate having an upper side on which is mounted a diaphragm over an aperture or recess in the substrate, the diaphragm being thermally and electrically insulative, and mounting on its upper surface a heating element comprising a layer of resistive material, and wherein electrical connections to the heating element are buried in the diaphragm and/or the substrate, and provide electrical terminals at the lower side of the substrate. The heating element is exposed to the environment, but the remaining electrical parts of the device are not exposed.
    • 一种用于感测飞行器外部的空气流速的传感器装置,包括具有上侧的基板,在基板上的孔或凹部上安装有隔膜,所述隔膜具有热和电绝缘性,并且安装在其上部 表面包括电阻材料层的加热元件,并且其中与所述加热元件的电连接被掩埋在所述隔膜和/或所述基板中,并且在所述基板的下侧提供电端子。 加热元件暴露于环境中,但是该设备的其余电气部分不暴露。
    • 5. 发明授权
    • Bonding tool and method
    • 粘合工具和方法
    • US07942994B2
    • 2011-05-17
    • US11815875
    • 2007-05-23
    • Martyn John HuckerClyde Warsop
    • Martyn John HuckerClyde Warsop
    • B32B37/00
    • B81C3/001B32B37/12B32B2457/14H01L41/313Y10T156/17
    • A bonding tool and method A bonding tool and method for bonding together layers of a MEMS transducer device, including at least one layer of a piezoelectric material, and an intermediate reinforcing layer of titanium, or other metal, comprising: positioning the layers above one another and spaced apart by means of spacing members, heating said layers to a bonding temperature, and retracting the spacing members so as to bring the layers together under pressure to effect a bond between adjacent surfaces of the layers, wherein a press head is employed with a compliant caul for evenly distributing the press force; and permitting said layers to cool to an operating temperature in which said piezoelectric layer is under compressive strain and the titanium layer is under tensile strain.
    • 一种接合工具和方法用于将包括至少一层压电材料的MEMS换能器装置的层与钛或其它金属的中间加强层粘合在一起的粘结工具和方法包括:将层定位在彼此之上 并且通过间隔构件间隔开,将所述层加热至接合温度,并缩回间隔构件,以便在压力下将层压在一起,以实现层的相邻表面之间的结合,其中使用压头 均匀分布压力; 并允许所述层冷却至所述压电层处于压应变状态并且钛层处于拉伸应变下的工作温度。