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    • 1. 发明授权
    • Method for operating a pneumatic device for the metered delivery of a liquid and pneumatic device
    • 用于操作用于液体和气动装置的计量输送的气动装置的方法
    • US08590739B2
    • 2013-11-26
    • US11402703
    • 2006-04-11
    • Ladislav KuceraMartin Von Arx
    • Ladislav KuceraMartin Von Arx
    • B67D7/28
    • G01F13/00Y10T137/3127
    • The invention concerns the operation of a pneumatic device for the metered delivery of a liquid and a pneumatic device particularly suited for operation in accordance with the invention. The pneumatic device has a pressure tank that can be connected to a compressed air source by means of an inlet valve and with the surroundings by means of an outlet valve. For delivery of the liquid, a pressure pulse is applied to the liquid container containing the liquid in that the pressure tank is temporarily connected to the liquid container via a changeover valve. After the end of the pressure pulse, the pressure prevailing in the pressure tank is increased to a value that is greater than the set value to be achieved during the pressure pulse.
    • 本发明涉及用于计量输送液体和气动装置的气动装置的操作,特别适用于根据本发明的操作。 气动装置具有压力罐,该压力罐可以通过入口阀和通过出口阀与周围环境连接到压缩空气源。 为了输送液体,将压力脉冲施加到容纳液体的液体容器中,因为压力罐经由切换阀临时连接到液体容器。 在压力脉冲结束之后,压力罐中的压力增加到大于在压力脉冲期间要实现的设定值的值。
    • 5. 发明申请
    • Method And Device For Measuring A Height Difference
    • 测量高差的方法和装置
    • US20100315655A1
    • 2010-12-16
    • US12518098
    • 2007-11-19
    • Stefan BehlerPatrick BlessingStephan ScholzeRoland StalderMartin Von Arx
    • Stefan BehlerPatrick BlessingStephan ScholzeRoland StalderMartin Von Arx
    • G01B11/02
    • G01B11/0608
    • Determination of the height difference between a first reference point and a second reference point, at least one of the two reference points lying on a semiconductor chip, which is mounted on a substrate, comprises the stepsA) recording a first image from a first direction, which runs diagonally to the surface of the substrate at a predetermined angle α2, the substrate and the semiconductor chip being illuminated from a second direction which runs diagonally to the surface of the substrate at a predetermined angle α3, a telecentric optics being located in the beam path, B) recording a second image from the second direction, the substrate and the semiconductor chip being illuminated from the first direction, either the cited telecentric optics or a further telecentric optics being located in the beam path, C) ascertaining a first coordinate of the position of the first reference point and a first coordinate of the position of the second reference point in the first image and determining a first difference between these two coordinates, D) ascertaining a first coordinate of the position of the first reference point and a first coordinate of the position of the second reference point in the second image and determining a second difference between these two coordinates, and E) calculating the height difference from the first difference and the second difference.
    • 确定第一参考点和第二参考点之间的高度差,位于安装在基板上的半导体芯片上的两个参考点中的至少一个包括以下步骤:A)从第一方向 ,其以预定角度α2对角地延伸到基板的表面,基板和半导体芯片从以基板的表面以预定角度α3斜对角地延伸的第二方向照射,远心光学器件位于 B)从所述第二方向记录第二图像,所述衬底和所述半导体芯片从所述第一方向被照射,所述远心光学器件或另外的远心光学器件位于所述光束路径中,C)确定第一坐标 的第一参考点的位置和第二参考点在第一图像和确定中的位置的第一坐标 确定这两个坐标之间的第一差异,D)确定第一参考点的位置的第一坐标和第二图像中的第二参考点的位置的第一坐标,并确定这两个坐标之间的第二差,以及 E)计算与第一差异和第二差异的高度差。