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    • 2. 发明申请
    • COATING DEVICE AND COATING METHOD
    • 涂层设备和涂层方法
    • US20120135144A1
    • 2012-05-31
    • US13375938
    • 2010-05-13
    • Tino HarigMarkus HöferArtur LaukartLothar SchäferMarkus Armgardt
    • Tino HarigMarkus HöferArtur LaukartLothar SchäferMarkus Armgardt
    • C23C16/455
    • C23C16/22C23C16/24C23C16/26C23C16/44C23C16/4405C23C16/52
    • A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shielding element which can protect at least the securing point at least partially against the effect of the gaseous precursor is provided. The shielding element has a longitudinal extension having a first side and a second side, the first side being arranged on the support element and a locking element being arranged on the second side of the shielding element, the locking element having at least one outlet. At least one separation wall is arranged inside the shielding element, the wall separating the inner volume of the shielding element into a first partial volume and into a second partial volume.
    • 一种涂覆装置包括至少一个可被抽空的接收器,其被提供以接收基底,至少一个气体供应装置,其能够将至少一种气态前体引入接收器;以及至少一个激活装置,其包含至少一个 可加热激活元件,其端部固定到支撑元件上的固定点。 提供了可以至少部分地抵御气态前体的影响来保护至少保护点的屏蔽元件。 屏蔽元件具有纵向延伸部,其具有第一侧面和第二侧面,第一侧面布置在支撑元件上,锁定元件布置在屏蔽元件的第二侧上,锁定元件具有至少一个出口。 至少一个分隔壁布置在屏蔽元件内部,壁将屏蔽元件的内部容积分成第一部分体积并进入第二部分体积。
    • 5. 发明授权
    • Coating device and coating method
    • 涂布装置和涂布方法
    • US08940367B2
    • 2015-01-27
    • US13375938
    • 2010-05-13
    • Tino HarigMarkus HöferArtur LaukartLothar SchäferMarkus Armgardt
    • Tino HarigMarkus HöferArtur LaukartLothar SchäferMarkus Armgardt
    • C23C16/00C23C16/22C23C16/24C23C16/26C23C16/44C23C16/52
    • C23C16/22C23C16/24C23C16/26C23C16/44C23C16/4405C23C16/52
    • A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shielding element which can protect at least the securing point at least partially against the effect of the gaseous precursor is provided. The shielding element has a longitudinal extension having a first side and a second side, the first side being arranged on the support element and a locking element being arranged on the second side of the shielding element, the locking element having at least one outlet. At least one separation wall is arranged inside the shielding element, the wall separating the inner volume of the shielding element into a first partial volume and into a second partial volume.
    • 一种涂覆装置包括至少一个可被抽空的接收器,其被提供以接收基底,至少一个气体供应装置,其能够将至少一种气态前体引入接收器;以及至少一个激活装置,其包含至少一个 可加热激活元件,其端部固定到支撑元件上的固定点。 提供了可以至少部分地抵御气态前体的影响来保护至少保护点的屏蔽元件。 屏蔽元件具有纵向延伸部,其具有第一侧面和第二侧面,第一侧面布置在支撑元件上,锁定元件布置在屏蔽元件的第二侧上,锁定元件具有至少一个出口。 至少一个分隔壁布置在屏蔽元件内部,壁将屏蔽元件的内部容积分成第一部分体积并进入第二部分体积。
    • 8. 发明申请
    • COATING DEVICE AND COATING METHOD
    • 涂层设备和涂层方法
    • US20120107501A1
    • 2012-05-03
    • US13375957
    • 2010-05-13
    • Tino HarigMarkus HöferArtur LaukartLothar SchäferMarkus Armgardt
    • Tino HarigMarkus HöferArtur LaukartLothar SchäferMarkus Armgardt
    • C23C16/52C23C16/50C23C16/448C23C16/455
    • C23C16/00C23C16/22C23C16/24C23C16/26C23C16/44C23C16/4404C23C16/52
    • A coating installation containing at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. In the related method, the activation element can be heated by at least one first heating device and at least one second heating device, the first heating device enabling energy to be input in a uniform manner over the longitudinal extension of the activation element and the second heating device enabling energy to be input in a changeable manner over the longitudinal extension of the activation element such that the temperature of the activation element, in at least one longitudinal section, can be brought to over 1300° C. due to the effect of the second heating element.
    • 一种涂覆装置,其至少包含一个可被排空的接收器,并且被提供以接纳基底,至少一个可将至少一种气态前体引入到接收器中的气体供应装置,以及至少一个包含至少一个 可加热激活元件,其端部固定到支撑元件上的固定点。 在相关方法中,激活元件可以被至少一个第一加热装置和至少一个第二加热装置加热,第一加热装置使能量能够以均匀的方式输入到激活元件的纵向延伸部上,而第二加热装置 加热装置能够在活动元件的纵向延伸部上以可更改的方式输入能量,使得在至少一个纵向截面中的激活元件的温度可以达到超过1300℃,这是由于 第二加热元件。