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1. 发明授权

US07183633B2 Optical cross-connect system 有权
标题翻译：光交叉连接系统
公开(公告)号：US07183633B2
公开(公告)日：2007-02-27
申请号：US10469516
申请日：2002-03-01
申请人： Michael J. Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark W. Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
发明人： Michael J. Daneman , Franklin Wall , Behrang Behin , Murali Chaparala , Mark W. Chang , Scott Dalton , Timothy Beerling , Stephen Panyko , Meng-Hsiung Kiang , Boris Kobrin , Chuang-Chia Lin
IPC分类号： H01L23/02 , G02B26/08 , G02B6/42
CPC分类号： G02B6/3518 , G02B6/3546 , G02B6/356 , G02B6/357 , G02B6/3572 , G02B6/3584 , G02B26/0841
摘要： An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.
摘要翻译：光学交叉连接开关包括底座（216），翼片（211）和连接到翼片（211）的一个或多个导电着陆垫（222）。翼片（211）具有可移动地联接到基部（216）的底部部分，使得翼片（211）能够相对于基部（216）的平面从第一方向移动到第二方向。一个或多个着陆垫（222）与翼片（211）电隔离并且电耦合以与着陆表面等电位。

2. 发明授权

US06514781B2 Maintaining the state of a MEMS device in the event of a power failure 有权
标题翻译：在电源故障的情况下保持MEMS器件的状态
公开(公告)号：US06514781B2
公开(公告)日：2003-02-04
申请号：US09900841
申请日：2001-07-07
申请人： Mark W. Chang , Scott D. Dalton , Michael J. Daneman , Timothy Beerling , Stephen F. Panyko , Gary M. Zalewski
发明人： Mark W. Chang , Scott D. Dalton , Michael J. Daneman , Timothy Beerling , Stephen F. Panyko , Gary M. Zalewski
IPC分类号： H01L2100
CPC分类号： G02B26/0841
摘要： A method and apparatus for maintaining the state of a MEMS device in the event of a power failure are disclosed. The apparatus and method may be used with a MEMS device generally having one or more MEMS elements moveably coupled to a substrate that uses electrostatic clamping force to sustain the state of the MEMS element. According to the method, a capacitive or other charge-storing circuit is coupled between a clamping surface and an electrical ground. During normal operation, a clamping voltage is applied between the clamping surface and at least one MEMS element to retain the at least one MEMS element against the clamping surface. In the event of a power failure, the source of the clamping voltage and other circuit paths to ground are isolated from the clamping surface. The charge-storing circuit maintains an electric charge on the clamping surface. Leaky circuit paths to ground may be isolated from the clamping surface by an isolator element configured to electrically isolate the clamping surface in the event of a power failure. The isolator element may include an opto-isolator or a low leakage diode.
摘要翻译：公开了一种用于在电源故障的情况下保持MEMS装置的状态的方法和装置。该装置和方法可以与通常具有一个或多个MEMS元件的MEMS器件一起使用，所述MEMS元件可移动地耦合到使用静电夹持力来维持MEMS元件的状态的基板。根据该方法，电容或其他电荷存储电路耦合在夹紧表面和电接地之间。在正常操作期间，钳位电压施加在夹紧表面和至少一个MEMS元件之间以将至少一个MEMS元件保持抵靠夹紧表面。在电源故障的情况下，钳位电压的来源和其他到地的电路路径与夹紧表面隔离。电荷存储电路在夹持表面上保持电荷。泄漏电路到地的路径可以通过隔离器元件与夹紧表面隔离，隔离器元件被配置为在电源故障的情况下电隔离夹紧表面。隔离元件可以包括光隔离器或低泄漏二极管。

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