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1. 发明授权

US4638216A Electron cyclotron resonance ion source 失效
标题翻译：电子回旋共振离子源
公开(公告)号：US4638216A
公开(公告)日：1987-01-20
申请号：US611625
申请日：1984-05-18
申请人： Marc Delaunay , Rene Gualandris , Richard Geller , Claude Jacquot , Paul Ludwig , Jean-Marc Mathonnet , Jean-Claude Rocco , Pierre Sermet , Francois Zadworny , Francois Bourg
发明人： Marc Delaunay , Rene Gualandris , Richard Geller , Claude Jacquot , Paul Ludwig , Jean-Marc Mathonnet , Jean-Claude Rocco , Pierre Sermet , Francois Zadworny , Francois Bourg
IPC分类号： H01J37/08 , H01J27/02 , H01J27/18 , H05H7/08 , H01J7/24 , H05B31/26
CPC分类号： H01J27/18
摘要： An electron cyclotron resonance ion source in which a plasma is confined in a magnetic configuration having a first group of coils located in the plane defined by the tight window of an ultra-high frequency injector and surrounding the latter, supplying the magnetic field creating and confining a plasma as well as a second group of coils supplied in counter-field compared with the first group and surrounding an ion extraction system. Ion extraction takes place in a magnetic field well below that corresponding to the cyclotron resonance. This ion source has numerous applications in the field of thin layer sputtering, microetching, ion implantation, accelerators, etc.
摘要翻译：一种电子回旋共振离子源，其中等离子体被限制在具有位于由超高频喷射器的紧密窗口限定的平面中的第一组线圈的磁性构造中，并且围绕该第一组线圈围绕该第一组线圈，提供磁场产生和限制等离子体以及与第一组相比提供的第二组线圈，并围绕离子提取系统。离子提取发生在远低于回旋加速器共振的磁场中。该离子源在薄层溅射，微蚀刻，离子注入，加速器等领域具有广泛的应用。

2. 发明授权

US07338554B2 Method of synthesising and growing nanorods from a metal carbide on a substrate, substrates thus obtained and applications thereof 失效
标题翻译：从基底上的金属碳化物合成和生长纳米棒的方法，由此获得的基底及其应用
公开(公告)号：US07338554B2
公开(公告)日：2008-03-04
申请号：US10532500
申请日：2003-12-04
申请人： Marc Delaunay , Francoise Vinet
发明人： Marc Delaunay , Francoise Vinet
IPC分类号： C30B1/02
CPC分类号： C23C14/5846 , B82Y30/00 , C01B32/914 , C01P2004/13 , C01P2004/64 , C01P2004/82 , C23C14/0036 , C23C14/08 , C23C14/58
摘要： The invention relates to a process for synthesizing nanorods of a carbide of one metal M1 on a substrate, which comprises: a) the deposition, on the substrate, of a layer of nanocrystals of oxide of the metal M1 and nanocrystals of oxide of at least one metal M2 different from metal M1, the M1 metal oxide nanocrystals being dispersed within this layer; b) the reduction of the M1 and M2 metal oxide nanocrystals into corresponding metal nanocrystals; and c) the selective growth of the M1 metal nanocrystals. The invention also relates to a process for growing nanorods of a carbide of one metal M1 on a substrate from nanocrystals of this metal, to the substrates thus obtained and to their applications: fabrication of Microsystems provided with chemical or biological functionalities, in particular the fabrication of biosensors; electron emission sources, for example for flat television or computer screens; etc.
摘要翻译：本发明涉及一种用于合成基底上一种金属M 1的碳化物的纳米棒的方法，该方法包括：a）在衬底上沉积金属M 1的氧化物的纳米晶体层和氧化物的纳米晶体至少一种不同于金属M 1的金属M 2，M 1金属氧化物纳米晶体分散在该层内; b）将M 1和M 2金属氧化物纳米晶体还原成相应的金属纳米晶体; 和c）M 1金属纳米晶体的选择性生长。本发明还涉及一种在衬底上从该金属的纳米晶体生长到衬底上的一种金属M 1的碳化物的纳米棒的方法，以及由此获得的衬底及其应用：制备具有化学或生物学功能的微系统，特别是制作生物传感器; 电子发射源，例如用于平板电视或电脑屏幕; 等等

3. 发明授权

US07160585B2 Process for making at least one nanotube between two electrically conducting elements and device for implementing such a process 有权
标题翻译：用于在两个导电元件之间制造至少一个纳米管的工艺以及用于实现这种工艺的装置
公开(公告)号：US07160585B2
公开(公告)日：2007-01-09
申请号：US10330618
申请日：2002-12-26
申请人： Marc Delaunay , Anne Senillou , Marie-Noelle Semeria
发明人： Marc Delaunay , Anne Senillou , Marie-Noelle Semeria
IPC分类号： C23C16/26 , C23C16/511 , D01F9/12 , D01F9/127
CPC分类号： B82Y30/00 , B82Y10/00 , B82Y40/00 , C01B32/16 , C23C16/26 , C23C16/511 , C30B25/105 , C30B29/02 , C30B29/605 , H01J37/32192 , H01J37/3266 , H01L51/0048 , H01L51/0052 , H05H1/46 , Y10S427/102 , Y10S977/843
摘要： A process makes at least one nanotube between two electrically conducting elements located on a substrate, using, inside a deposition chamber, a microwave power, a magnetic field, and at least one electronic cyclotron resonance zone faciliting ionization and/or dissociation of a gas containing carbon injected into the deposition chamber at a low pressure inside the deposition chamber, causing ionization and/or dissociation of this gas in each electronic cyclotron resonance zone. The ions and electrons produced are located along the field lines of the magnetic field set up in the deposition chamber. The process also includes a screening operation of the various species produced in each electronic cyclotron resonance zone to enable exclusive access of CxHy°non condensable free radicals produced to access a deposition zone adjacent to at least one part of the substrate including the two electrically conducting elements to make the nanotube.
摘要翻译：一种方法使位于衬底上的两个导电元件之间的至少一个纳米管使用淀积室内的微波功率，磁场和至少一个电子回旋共振带，促进电离和/或解离包含在沉积室内以低压注入沉积室中的碳，导致在每个电子回旋共振区中该气体的离子化和/或解离。所产生的离子和电子沿着设置在沉积室中的磁场的场线定位。该方法还包括在每个电子回旋加速器共振区中产生的各种物种的筛选操作，以使得能够独立地进入所生产的CxHy不可冷凝自由基以进入邻近至少一部分的沉积区基板包括两个导电元件以制造纳米管。

4. 发明授权

US5336961A Source of ions with electronic cyclotronic resonance 失效
标题翻译：具有电子回旋共振的离子源
公开(公告)号：US5336961A
公开(公告)日：1994-08-09
申请号：US877544
申请日：1992-05-01
申请人： Bernard Jacquot , Marc Delaunay
发明人： Bernard Jacquot , Marc Delaunay
IPC分类号： H01J27/18 , H01J37/08 , H05H7/08 , H01J1/50 , H05H1/02
CPC分类号： H01J27/18
摘要： A device for optimizing a source of ions with electronic cyclotronic resonance (ECR) is provided. The present invention comprises a conventional ECR source to which an apparatus is added for moving the resonance point (C) which appears in the dielectric pipe when the source is in operation. The controlled adjustment of the position of the resonance point (C) ensures an optimal positioning of points A and B of the equimagnetic surface, points (A) and (B) being dependent on point (C). The resonance displacement apparatus comprises, in one embodiment, a magnetic screw threaded onto its periphery so as to form a screw/nut system with the armouring of the ECR source. Particular utility is found in the area of particle accelerator equipment for use in scientific and medical applications, although other utilities are contemplated.
摘要翻译：提供了一种用电子循环共振（ECR）优化离子源的装置。本发明包括传统的ECR源，当源处于工作状态时，添加装置用于移动在电介质管中出现的共振点（C）。谐振点（C）的位置的受控调节确保了等磁场表面的点A和B的最佳定位，点（A）和（B）取决于点（C）。在一个实施例中，谐振位移装置包括螺纹连接到其周边上的磁性螺钉，以便与ECR源的铠装形成螺杆/螺母系统。在科学和医疗应用中使用的颗粒加速器设备领域中发现了特别的用途，尽管考虑了其他实用程序。

5. 发明授权

US07303790B2 Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes and nanotubes thus obtained 失效
标题翻译：电子回旋共振等离子体沉积工艺和单壁碳纳米管和纳米管的器件
公开(公告)号：US07303790B2
公开(公告)日：2007-12-04
申请号：US10399175
申请日：2001-10-26
申请人： Marc Delaunay , Cyril Vannufel
发明人： Marc Delaunay , Cyril Vannufel
IPC分类号： H05H1/16 , H05H1/18 , H05H1/46 , C23C16/23 , C23C16/511
CPC分类号： B82Y30/00 , B82Y10/00 , B82Y40/00 , C01B3/0021 , C01B32/16 , C01B2202/02 , C30B25/105 , C30B29/605 , C30B29/66 , F17C11/005 , H01J9/025 , H01J37/32192 , H01J37/32678 , H01J2201/30469 , H01J2209/0223 , H05H1/46 , Y02E60/321 , Y02E60/325
摘要： Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes (SWNTs) on a catalyst-free substrate, by injection of microwave power into a deposition chamber comprising a magnetic confinement structure with a magnetic mirror, and at least one electron cyclotron resonance area inside or at the border of the deposition chamber and facing the substrate, whereby dissociation and/or ionization of a gas containing carbon is caused, at a pressure of less than 10−3 mbars, in the magnetic mirror at the center of the deposition chamber, producing species that will be deposited on said heated substrate. The substrate surface includes raised and/or lowered reliefs. The invention concerns the SWNTs thus obtained.
摘要翻译：电子回旋共振等离子体沉积工艺和在无催化剂的衬底上的单壁碳纳米管（SWNT）的装置，通过将微波功率注入到包括具有磁镜的磁约束结构的沉积室中，以及至少一个电子回旋共振在沉积室的内部或边界处的面对基板，从而在小于10 -3毫巴的压力下产生含碳气体的解离和/或离子化在沉积室的中心反射镜，产生将沉积在所述加热的基底上的物质。衬底表面包括凸起和/或降低的浮雕。本发明涉及如此获得的SWNT。

6. 发明申请

US20050271815A1 Method of synthesising and growing nanorods from a metal carbide on a substrate, substrates thus obtained and applications thereof 失效
标题翻译：从基底上的金属碳化物合成和生长纳米棒的方法，由此获得的基底及其应用
公开(公告)号：US20050271815A1
公开(公告)日：2005-12-08
申请号：US10532500
申请日：2003-12-04
申请人： Marc Delaunay , Francoise Vinet
发明人： Marc Delaunay , Francoise Vinet
IPC分类号： C01B31/30 , C23C14/00 , C23C14/08 , C23C14/58 , C30B29/66 , C23C14/32 , C23C16/00
CPC分类号： C23C14/5846 , B82Y30/00 , C01B32/914 , C01P2004/13 , C01P2004/64 , C01P2004/82 , C23C14/0036 , C23C14/08 , C23C14/58
摘要： The invention relates to a process for synthesizing nanorods of a carbide of one metal M1 on a substrate, which comprises: a) the deposition, on the substrate, of a layer of nanocrystals of oxide of the metal M1 and nanocrystals of oxide of at least one metal M2 different from metal M1, the M1 metal oxide nanocrystals being dispersed within this layer; b) the reduction of the M1 and M2 metal oxide nanocrystals into corresponding metal nanocrystals; and c) the selective growth of the M1 metal nanocrystals. The invention also relates to a process for growing nanorods of a carbide of one metal M1 on a substrate from nanocrystals of this metal, to the substrates thus obtained and to their applications: fabrication of Microsystems provided with chemical or biological functionalities, in particular the fabrication of biosensors; electron emission sources, for example for flat television or computer screens; etc.
摘要翻译：本发明涉及一种用于合成基底上的一种金属M1的碳化物的纳米棒的方法，该方法包括：a）在衬底上沉积金属M1的氧化物的纳米晶体层和至少一个氧化物的纳米晶体一个金属M2不同于金属M1，M1金属氧化物纳米晶体分散在该层内; b）将M1和M2金属氧化物纳米晶体还原成相应的金属纳米晶体; 和c）M1金属纳米晶体的选择性生长。本发明还涉及一种用于在衬底上从该金属的纳米晶体到由此获得的衬底的衬底上生长一种金属M1的碳化物的纳米棒的方法及其应用：制备具有化学或生物学功能的微系统，特别是制造的生物传感器; 电子发射源，例如用于平板电视或电脑屏幕; 等等

7. 发明授权

US06319372B1 Permanent magnet linear microwave plasma source 有权
标题翻译：永磁线性微波等离子体源
公开(公告)号：US06319372B1
公开(公告)日：2001-11-20
申请号：US09229575
申请日：1999-01-13
申请人： Marc Delaunay
发明人： Marc Delaunay
IPC分类号： C23C1434
CPC分类号： H01J37/32229 , H01J37/32192 , H01J37/32678
摘要： A linear microwave plasma source comprises a leaktight chamber (10) under negative pressure and a microwave injection guide (12) that ends in a 90° elbow (13) opening perpendicularly into the chamber, a leaktight microwave window (15) being placed between the microwave injection guide (12) and the 90° elbow (13) such that they cause ionization of the gas in a zone (35) of electron cyclotron resonance located a few centimeters inside the elbow (13) that is under negative pressure. First and second permanent magnets (13, 17) are disposed on either side of said window (15), said magnets (16, 17) being installed with alternating polarity. A sputtering target (21) is located inside the plasma stream and electrically insulated from the chamber and charged with a negative polarity, and means (27) for injecting gas for controlling the ionic species of the plasma stream are provided.
摘要翻译：线性微波等离子体源包括负压下的泄漏室（10）和垂直于室内开口的90°弯头（13）端部的微波注入引导件（12），一个密封微波窗口（15）微波注入引导件（12）和90°弯头（13），使得它们在位于处于负压力的弯头（13）内部几厘米处的电子回旋共振区域（35）中引起气体的离子化。第一和第二永磁体（13,17）设置在所述窗（15）的任一侧上，所述磁体（16,17）以交替的极性安装。溅射靶（21）位于等离子体流的内部并与室电绝缘并带负极性，并且提供用于喷射气体以控制等离子体流的离子物质的装置（27）。

8. 发明授权

US5178763A Method and apparatus for preparing a substitution liquid 失效
标题翻译：制备替代液体的方法和装置
公开(公告)号：US5178763A
公开(公告)日：1993-01-12
申请号：US683555
申请日：1991-04-10
申请人： Marc Delaunay
发明人： Marc Delaunay
IPC分类号： A61M1/14 , A61M1/34 , A61M5/00
CPC分类号： A61M1/3462 , A61M1/3465
摘要： The invention is directed to an apparatus and method for transforming a sterile pyrogen-free liquid into a substitution liquid using an exchanger. The method includes the steps of flowing first and second liquids over opposite sides of a semipermeable membrane, the first liquid being sterile and pyrogen-free. Both liquids contain at least some electrolytes of blood including at least a buffer agent or a precursor of a buffer agent. At least some of the electrolytes have different concentrations in the two liquids. When purifying blood by hemodiafiltration, this method has the particular advantage that, rather than discarding the second liquid, it can be used for hemodiafiltration.
摘要翻译：本发明涉及一种使用交换器将无菌无热原液体转化为置换液体的装置和方法。该方法包括使第一和第二液体在半透膜的相对侧流动的步骤，第一液体是无菌和无热原的。两种液体至少含有一些血液电解液，包括至少一种缓冲剂或缓冲剂的前体。至少一些电解质在两种液体中具有不同的浓度。当通过血液透析过滤净化血液时，该方法具有的特别优点是，不是丢弃第二液体，而是可以用于血液透析过滤。

9. 发明申请

US20090152473A1 Photon source comprising an ecr source with pressure gradient 审中-公开
标题翻译：光源包括具有压力梯度的ecr源
公开(公告)号：US20090152473A1
公开(公告)日：2009-06-18
申请号：US10582515
申请日：2006-05-11
申请人： Denis Hitz , Marc Delaunay
发明人： Denis Hitz , Marc Delaunay
IPC分类号： H01J27/00 , H01J7/24
CPC分类号： H05G2/003
摘要： The invention relates to a photon source comprising an electron cyclotron resonance (ECR) multicharged ion plasma source, the multicharged ions corresponding to several charge states of a first constituent (g1) inserted into a vacuum chamber (CH), and at least one charge state emitting photons with a wavelength λo by de-excitation, wherein means set up a pressure gradient within the chamber (CH) of the first constituent (g1) and/or at least one second constituent (g2) different from the first constituent (g1), the pressure gradient being capable of creating an energy gradient of plasma electrons such that additional multicharged ions are created emitting photons with a wavelength equal to approximately λo by de-excitation.
摘要翻译：本发明涉及一种光子源，其包括电子回旋共振（ECR）多电荷离子等离子体源，所述多电荷离子对应于插入真空室（CH）中的第一成分（g1）的若干电荷状态，以及至少一个电荷状态通过去激发发射具有波长兰波的光子，其中在第一成分（g1）和/或与第一成分（g1）不同的第一成分（g1）和/或至少一种第二成分（g2）的室（CH）内设置压力梯度的装置，，压力梯度能够产生等离子体电子的能量梯度，使得产生附加的多电荷离子，通过去激发发射波长等于近似兰博的光子。

10. 发明授权

US06337110B1 Process for the deposition by electron cyclotron resonance plasma of electron-emitting carbon films under the effect of an electric field applied 有权
标题翻译：在电场作用下通过电子发射碳膜的电子回旋共振等离子体沉积的方法
公开(公告)号：US06337110B1
公开(公告)日：2002-01-08
申请号：US09330871
申请日：1999-06-11
申请人： Marc Delaunay , Marie-Noëlle Semeria
发明人： Marc Delaunay , Marie-Noëlle Semeria
IPC分类号： C23C1626
CPC分类号： H01J37/32192 , C23C16/26 , C23C16/511 , H01J37/32357 , H01J37/32678 , H05H1/18
摘要： The present invention relates to a process for electron cyclotron resonance plasma deposition of electron-emitting carbon films, in which by injecting a microwave power into a plasma chamber incorporating an electron cyclotron resonance zone (9), ionization takes place of a gaseous mixture under a low pressure, the thus created ions and electrons diffusing along the magnetic field lines (6) to a substrate (3), the gaseous mixture comprising organic molecules and hydrogen molecules. Said process comprises the following stages: heating the substrate (3), creating a plasma from the ionized gaseous mixture, creating a potential difference between the plasma and the substrate, diffusion of the plasma up to the substrate (3) which, by heating, has reached a temperature such that said electron-emitting material is deposited on the substrate.
摘要翻译：本发明涉及电子发射碳膜的电子回旋共振等离子体沉积的方法，其中通过将微波功率注入到包含电子回旋共振区（9）的等离子体室中，电离发生在下面的气体混合物由此产生的离子和电子沿着磁场线（6）扩散到衬底（3），气体混合物包含有机分子和氢分子。所述方法包括以下阶段：加热衬底（3），从电离气体混合物产生等离子体，产生等离子体和衬底之间的电位差，等离子体扩散到衬底（3）已经达到使得所述电子发射材料沉积在基底上的温度。

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