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    • 5. 发明申请
    • MICROELECTROMECHANICAL SYSTEM MICROPHONE STRUCTURE AND MICROELECTROMECHANICAL SYSTEM MICROPHONE PACKAGE STRUCTURE
    • 微电子系统麦克风结构与微电子系统麦克风包装结构
    • US20100067728A1
    • 2010-03-18
    • US12211650
    • 2008-09-16
    • Li-Che Chen
    • Li-Che Chen
    • H04R9/08
    • H04R1/406H04R19/005H04R19/04H04R31/00
    • A microelectromechanical system microphone structure including a substrate, a first device and at least one second device is provided. The first device is disposed on the substrate and including a first upper electrode and a first lower electrode disposed between the first upper electrode and the substrate. The second device is disposed on the substrate, surrounding the first device and including a second upper electrode and a second lower electrode disposed between the second upper electrode and the substrate. The second upper electrode includes a plurality of first conductive layers and first plugs. The first conductive layers are arranged in steps, and the first plug is disposed between the adjacent first conductive layers. The second lower electrode includes a plurality of second conductive layers and a plurality of second plugs. The second conductive layers are arranged in steps, and the second plug is disposed between the adjacent second conductive layers.
    • 提供包括基板,第一装置和至少一个第二装置的微机电系统麦克风结构。 第一器件设置在衬底上,并且包括设置在第一上电极和衬底之间的第一上电极和第一下电极。 第二装置设置在基板上,围绕第一装置并且包括设置在第二上电极和基板之间的第二上电极和第二下电极。 第二上电极包括多个第一导电层和第一插塞。 第一导电层被分阶段布置,并且第一插头设置在相邻的第一导电层之间。 第二下电极包括多个第二导电层和多个第二插塞。 第二导电层被分阶段地布置,并且第二插头设置在相邻的第二导电层之间。