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1. 发明授权

US5339952A Transfer container for transferring flimsy circuit panels under clean room conditions 失效
标题翻译：在洁净室条件下转运易碎电路板的转运容器
公开(公告)号：US5339952A
公开(公告)日：1994-08-23
申请号：US901479
申请日：1992-06-19
申请人： Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
发明人： Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
IPC分类号： H01L21/677 , B65D51/14 , B65D85/86 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , B65D73/02 , B65D85/42
CPC分类号： H01L21/67363 , H01L21/67386
摘要： Disclosed is a transfer container for carrying circuit panels in and between substantially contaminant free environments. The walls of the transfer container are fabricated out of substantially particulate free, unfilled polymers, such as polycarbonate. One of the end walls is an access wall. The access wall has an opening surrounded by a ferromagnetic gasket. This gasketed opening is adapted to receive a ferromagnetic door panel. The side walls, and the top and bottom walls may extend beyond the access wall, with the ends of said walls defining a plane, so that the access wall is recessed with respect to the plane defined by the said extensions. Each of the side walls have co-planar bracket pairs for holding circuit panels. Either one of, or preferably both brackets of a bracket pair have pyramidal or conical positioning pins. These pins extend upwardly from the brackets and are adapted to receive and hold a workpiece in place.
摘要翻译：公开了一种用于在基本无污染环境之间和之间承载电路板的转移容器。转移容器的壁由基本上不含颗粒的未填充聚合物如聚碳酸酯制成。其中一个端壁是进入墙。进入墙具有由铁磁垫圈包围的开口。该垫圈开口适于容纳铁磁门板。侧壁和顶壁和底壁可以延伸超过进入壁，其中所述壁的端部限定一个平面，使得进入壁相对于由所述延伸部限定的平面凹陷。每个侧壁具有用于保持电路板的共面支架对。托架对中的任何一个或优选地两个支架具有金字塔形或锥形定位销。这些销钉从支架向上延伸，并适于将工件接收并固定到位。

2. 发明授权

US5451131A Dockable interface airlock between process enclosure and interprocess transfer container 失效
标题翻译：过程外壳和过程间转移容器之间的可对接界面气闸
公开(公告)号：US5451131A
公开(公告)日：1995-09-19
申请号：US901041
申请日：1992-06-19
申请人： Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
发明人： Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
IPC分类号： H01L21/02 , F24F7/06 , H01L21/00 , H01L21/677 , B65G1/00 , B23B29/24 , B65G65/34 , C23C14/00
CPC分类号： H01L21/67236 , H01L21/67126 , H01L21/67772 , Y10S414/137 , Y10S414/139 , Y10S414/14 , Y10T29/53191
摘要： Disclosed is a manufacturing system having isolated islands of "clean room" environment connected by inter-process transfer containers for transfering in-process workpieces. The system has airlock transfer ports between the process enclosures and the inter-process transfer containers. The make and break airlock transfer ports have facing sealable doors in the process enclosure and the transfer container. These doors are in air sealable facing recesses of the process enclosure and the transfer container. At least one peripheral gasket surrounds the recesses and the pair of doors. This provides a substantially clean room environment in the airlock. The sealable door in the interprocess transfer container is fabricated of a ferromagnetic material and is seated on a ferromagnetic gasket, while the sealable door in the process enclosure has a controllable electromagnetic clamp. After establishment of an airtight seal between the two recesses, the doors are opened by activating the electromagnetic clamp in the process enclosure door to pull the ferromagnetic door in the interprocess transfer container away from the ferromagnetic gasket. The results in the simultaneous opening of the of the process enclosure door and the ferromagnetic interprocess transfer container door, while avoiding contamination inside either of the containers.
摘要翻译：公开了一种具有通过过程间转移容器连接的隔离岛“洁净室”环境的制造系统，用于转移过程中的工件。该系统在进程外壳和进程间转移容器之间具有气闸传送端口。制造和拆卸气闸传输端口在处理外壳和转移容器中具有面对的可密封的门。这些门在处理外壳和转移容器的空气密封面对的凹部中。至少一个外围垫圈围绕凹槽和一对门。这在气闸中提供了基本洁净的房间环境。处理间转移容器中的可密封的门由铁磁材料制成并且位于铁磁性垫圈上，而过程外壳中的可密封的门具有可控的电磁夹。在两个凹口之间建立密封密封之后，通过启动过程外壳门中的电磁夹具来打开门，以将处理间转移容器中的铁磁门拉离铁磁垫圈。结果是同时打开过程外壳门和铁磁过程转移容器门，同时避免了任何一个容器内的污染。

3. 发明授权

US5395198A Vacuum loading chuck and fixture for flexible printed circuit panels 失效
标题翻译：用于柔性印刷电路板的真空加载卡盘和夹具
公开(公告)号：US5395198A
公开(公告)日：1995-03-07
申请号：US901640
申请日：1992-06-19
申请人： Thomas P. Duffy , Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
发明人： Thomas P. Duffy , Lewis C. Hecht , Merritt P. Sulger, deceased , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
IPC分类号： B23P21/00 , B25H3/02 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677 , H01L21/683 , H05K3/00 , B65G49/06 , B65H1/00 , C23C16/00
CPC分类号： H01L21/67236 , H01L21/67126 , H01L21/67363 , H01L21/67376 , H01L21/67386 , H01L21/67772
摘要： Disclosed is a system for handling large area, in-process, circuit panel layers. The circuit panel layers are thin and flimsy, and require rigid support for certain processing steps. The system includes a peripheral frame fixture for surrounding and supporting the in process circuit panel layer, and a a loading chuck for mounting the in-process circuit panel layer in the peripheral frame fixture. The peripheral frame fixture includes a bottom plate having a central opening to expose the circuit panel layer, a top frame having a corresponding central opening to expose the opposite surface of the circuit panel layer, and a compressive apparatus, as screws, bolts, or the like, for applying a z axis compressive force to the bottom plate, the top frame, and a panel layer therebetween. Optionally, the fixture may include alignment pins or fiducials for aligning the bottom plate, a panel layer, and the top frame, and a robotic interface for a robotic arm to grasp and transfer the peripheral frame fixture. The system also includes a loading chuck for mounting the in-process circuit panel layer in the peripheral frame fixture. The loading chuck includes a peripheral edge for receiving the bottom plate of the peripheral frame fixture. This provides co-planarity of the in-process circuit panel layer, the bottom plate of the peripheral frame fixture, and the vacuum table. The vacuum table is within the area bounded by the peripheral edge of the loading chuck and the peripheral frame of the peripheral frame fixture, and is coplanar with them. The vacuum table includes slidable bearing surfaces, with vacuum apertures for drawing a vacuum to hold the panel in place, and slide actuators for moving the slidable bearing surfaces to apply x-y axis tension to a panel on the bearing surfaces.
摘要翻译：公开了一种用于处理大面积，在制程中的电路板层的系统。电路板层薄而脆弱，并且对于某些加工步骤需要刚性支撑。该系统包括用于围绕和支撑过程电路板层的外围框架固定装置，以及用于将工艺中电路板层安装在周边框架固定装置中的装载卡盘。外围框架固定装置包括具有中央开口以暴露电路板层的底板，具有相应中心开口以露出电路板层的相对表面的顶部框架，以及压缩装置，如螺钉，螺栓或用于将z轴压缩力施加到底板，顶部框架以及它们之间的面板层。可选地，固定装置可以包括用于对准底板，面板层和顶部框架的对准销或基准，以及用于机器人臂来抓握和传送外围框架固定装置的机器人界面。该系统还包括用于将工艺中电路板层安装在外围框架固定装置中的装载卡盘。装载卡盘包括用于接收外围框架固定装置的底板的外围边缘。这提供了工艺电路板层，外围框架固定装置的底板和真空工作台的共面性。真空工作台位于由装载卡盘周边边缘和外围框架固定装置的外围框架所限定的区域内，与它们共面。真空工作台包括可滑动的支承表面，具有用于拉伸真空以将面板保持在适当位置的真空孔，以及用于移动可滑动的支承表面以将x-y轴张力施加到支承表面上的面板的致动器。

4. 发明授权

US5364225A Method of printed circuit panel manufacture 失效
标题翻译：印刷电路板制造方法
公开(公告)号：US5364225A
公开(公告)日：1994-11-15
申请号：US901042
申请日：1992-06-19
申请人： Lewis C. Hecht , Merritt P. Sulger, deceased , by Ellen Sulgar, executrix , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
发明人： Lewis C. Hecht , Merritt P. Sulger, deceased , by Ellen Sulgar, executrix , Ernst E. Thiele , Mark V. Pierson , Lawrence E. Williams
IPC分类号： B23P21/00 , B25H3/02 , B65D51/14 , B65D85/86 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677 , H05K3/00 , B65G65/02 , C23C13/08
CPC分类号： H01L21/67236 , H01L21/67126 , H01L21/67363 , H01L21/67376 , H01L21/67386 , H01L21/67772 , Y10S414/139
摘要： Disclosed is a method of manufacturing a printed circuit panel. The method is carried out without a cleanroom, but in a clean room environment. The first step is to place a thin, non-rigid panel in a suitable fixture, for example, for transfer and also for processing. The fixtured panel is then placed in an air tight transfer container, which has a substantially contaminant free atmosphere. The transfer container has a sealed door at one end. The transfer container is then brought into a seaiable, substantially airtight interlock with a process enclosure. This process enclosure also has a substantially contaminant free atmosphere, and a sealed door at one end. An airtight seal is formed between the transfer container and the process enclosure, and also between the surfaces of the two doors. This is to avoid introducing surface contaminants into the process enclosure and transfer container atmospheres. Next, the two doors are opened simultaneously. This is to allow the transfer of at least one panel and its fixture from the transfer container into the process enclosure. Inside the process enclosure the panel is transferred to a process station for a manufacturing process. Finally, the panel and its fixture are transferred from the process enclosure into the transfer container. This may be the same container or a different container. The doors of the process enclosure and the transfer container are then closed and sealed.
摘要翻译：公开了印刷电路板的制造方法。该方法在没有洁净室的情况下进行，但在洁净室环境中进行。第一步是将薄的非刚性面板放置在合适的夹具中，例如用于转移和加工。然后将固定面板放置在气密转移容器中，其具有基本上无污染的气氛。转移容器在一端具有密封门。然后将转移容器与过程外壳进入可检测的，基本上气密的互锁。该过程外壳还具有基本上无污染的气氛，并且在一端具有密封门。在转移容器和处理外壳之间以及两个门的表面之间形成气密密封。这是为了避免将表面污染物引入工艺外壳并转移容器环境。接下来，两扇门同时打开。这是为了允许将至少一个面板及其固定装置从转移容器传送到过程外壳中。在工艺外壳内部，面板被传送到制造过程的处理站。最后，面板及其固定装置从过程外壳转移到转移容器中。这可能是相同的容器或不同的容器。然后将过程外壳和转移容器的门关闭并密封。

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