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    • 2. 发明授权
    • Semiconductor differential pressure measuring device
    • 半导体差压测量装置
    • US5959213A
    • 1999-09-28
    • US891105
    • 1997-07-10
    • Kyoichi IkedaTetsuya WatanabeSatoshi FukuharaTakashi YoshidaHideo Tsukamoto
    • Kyoichi IkedaTetsuya WatanabeSatoshi FukuharaTakashi YoshidaHideo Tsukamoto
    • G01L9/00G01L9/06G01L13/02G01L19/04G01L9/04
    • G01L13/025G01L15/00G01L9/0054G01L9/045
    • A semiconductor differential pressure measuring device comprising two measurement diaphragms and two detection sensors provided in a semiconductor substrate using micromachining techniques, and a computing circuit which computes the differences between the two sensor outputs, wherein a communicating hole is provided for applying pressure to each diaphragm so that the diaphragms operate in opposite phases by differential pressure, and two detecting sensors are provided on each diaphragm for detecting displacement or strain of each diaphragm caused by the differential pressure applied to the respective diaphragm, whereby detecting the differences in displacement or strain cancels the static pressure error and temperature error so that the invention has excellent temperature and static pressure characteristics, and whereby the computing circuit comprises a bridge using the two detecting sensors, which substantially reduces the cost of the device.
    • 一种半导体差压测量装置,包括使用微加工技术设置在半导体衬底中的两个测量膜片和两个检测传感器,以及计算电路,其计算两个传感器输出之间的差异,其中设置有用于向每个隔膜施加压力的连通孔 膜片通过差压在相反的相位下工作,并且在每个隔膜上设置两个检测传感器,用于检测由施加到各个隔膜的差压引起的每个隔膜的位移或应变,由此检测位移或应变的差异消除了静态 压力误差和温度误差,使得本发明具有优异的温度和静压特性,并且由此计算电路包括使用两个检测传感器的桥,这大大降低了装置的成本。
    • 10. 发明授权
    • Vibration type density meter
    • 振动式密度计
    • US4429564A
    • 1984-02-07
    • US330175
    • 1981-12-14
    • Kyoichi IkedaMotoyoshi AndoKinji Harada
    • Kyoichi IkedaMotoyoshi AndoKinji Harada
    • G01N9/00
    • G01N9/002
    • A vibration type density meter includes a mechanical oscillator or resonator having a resonance frequency variable with the density of a specimen fluid around the oscillator. The resonator is of a cylindrical configuration with flanges at the ends thereof, at least one of the ends being open for introducing specimen fluid into the resonator. The meter also includes means for exciting the resonator, means for detecting oscillations of the cylindrical resonator, a cover coupled to the flanges of the resonator in surrounding relation to the latter, and circuit means for processing a frequency signal from the oscillation detecting means, and by arithmetic operations derive and display the density of the specimen fluid being measured.
    • 振动型密度计包括机械振荡器或谐振器,其具有随振荡器周围的样本流体的密度变化的共振频率。 谐振器具有在其端部具有凸缘的圆柱形构造,至少一个端部是开放的,以将样本流体引入谐振器。 该仪表还包括用于激励谐振器的装置,用于检测圆柱形谐振器的振荡的装置,与谐振器的凸缘耦合到其周围的盖的盖,以及用于处理来自振荡检测装置的频率信号的电路装置,以及 通过算术运算得出和显示被测流体的密度。