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    • 3. 发明授权
    • Three-dimensional magnetic direction sensor, and magneto-impedance sensor element
    • 三维磁方向传感器和磁阻传感器元件
    • US07298140B2
    • 2007-11-20
    • US10523807
    • 2004-07-13
    • Yoshinobu HonkuraMichiharu YamamotoKouei Genba
    • Yoshinobu HonkuraMichiharu YamamotoKouei Genba
    • G01R33/02
    • G01R33/0206G01R33/02
    • A three-dimensional magnetic bearing sensor 10a includes a first sensor 101, a second sensor 102, and a third sensor 103 each constituted by a magneto-impedance sensor element 10 comprising a magnetic sensitive member 2 having a characteristic changed responsive to an external magnetic field, an insulator 4 formed to allow penetration of the magnetic sensitive member 2 therethrough, and an electromagnetic coil 3 made up of foil-like conductive patterns 31, 32 arranged in adjacent relation on an outer surface of the insulator 4. The first sensor 101, the second sensor 102, and the third sensor 103 are disposed such that directions in which the magnetic sensitive members 2 in respective sensors have maximum magnetic field detection sensitivities are substantially orthogonal to each other.
    • 三维磁性轴承传感器10a包括第一传感器101,第二传感器102和第三传感器103,每个传感器由磁阻抗传感器元件10构成,磁传感元件10包括响应于外部磁 形成为允许敏感元件2穿过其中的绝缘体4以及在绝缘体4的外表面上相邻布置的由箔状导电图案31,32构成的电磁线圈3。 第一传感器101,第二传感器102和第三传感器103被布置成使得各个传感器中的感磁元件2具有最大磁场检测灵敏度的方向基本上彼此正交。