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    • 3. 发明授权
    • Probe card measurement tool
    • 探针卡测量工具
    • US06674296B1
    • 2004-01-06
    • US10085549
    • 2002-02-28
    • Koby L. DuckworthMarian C. Estrada
    • Koby L. DuckworthMarian C. Estrada
    • G01R3102
    • G01B3/22
    • Various embodiments of a measurement tool are disclosed. In one aspect, a measurement tool is provided that includes a frame that has a first member. A second member is provided that is moveable relative to the first member along a first axis and a second axis. The first and second members have first and second cooperating structures engageable to enable the second member to be moved downward along the second axis to a preselected elevation when the second member is moved to a preselected position along the first axis. The movement of the second member along the first axis is constrained when the second member is moved to the preselected elevation. A meter is coupled to the second member for measuring feature heights. The meter has a contact surface that contacts the feature when the second member is moved to the preselected elevation. The tool provides for non-destructive probe card pin height measurement.
    • 公开了测量工具的各种实施例。 一方面,提供了一种包括具有第一构件的框架的测量工具。 提供第二构件,其可沿着第一轴线和第二轴线相对于第一构件移动。 第一和第二构件具有第一和第二配合结构,当第二构件沿着第一轴线移动到预定位置时,可将第二构件沿着第二轴线向下移动到预选的高度。 当第二构件移动到预选高程时,第二构件沿着第一轴线的运动受到约束。 仪表与第二构件联接以测量特征高度。 当第二构件移动到预选高程时,仪表具有接触表面的接触表面。 该工具提供非破坏性的探针卡引脚高度测量。
    • 6. 发明授权
    • Electrical test probe card having a removable probe head assembly with alignment features and a method for aligning the probe head assembly to the probe card
    • 具有具有对准特征的可拆卸探针头组件的电测试探针卡和用于将探针头组件对准探针卡的方法
    • US06429671B1
    • 2002-08-06
    • US09199608
    • 1998-11-25
    • Koby L. DuckworthMiguel L. IslasTimothy Eric Gilliam
    • Koby L. DuckworthMiguel L. IslasTimothy Eric Gilliam
    • G01R3102
    • G01R1/07378
    • An electrical test probe card is presented including a removable probe head assembly with alignment features, as well as a method for aligning the probe head assembly to the probe card. The probe head assembly is used to provide an electrical interface between an interface circuit and a semiconductor device under test. The probe head assembly includes a probe head body having a pair of opposed surfaces. A set of probe holes and a set of alignment holes extend between the opposed surfaces. Each probe hole is adapted to receive an electrically conductive probe, and each alignment hole is adapted to pass optical illumination used to align the probe head body with the interface circuit. The probe holes are arranged according to a first pattern defined by a set of electrical contacts on a surface of the device under test. A surface of the interface circuit includes a set of electrical contacts arranged according to the first pattern, and a set of alignment marks defining a second pattern. Each probe hole thus has a corresponding electrical contact on the surface of the device under test, and a corresponding electrical contact on the surface of the interface circuit. The alignment holes are arranged according to the second pattern such that each alignment hole has a corresponding alignment mark on the surface of the interface circuit.
    • 提供了一种电测试探针卡,其包括具有对准特征的可移除探针头组件,以及用于将探头组件与探针卡对准的方法。 探针头组件用于在接口电路和被测半导体器件之间提供电接口。 探针头组件包括具有一对相对表面的探针头本体。 一组探针孔和一组对准孔在相对的表面之间延伸。 每个探针孔适于接收导电探针,并且每个对准孔适于通过用于将探针头本体与接口电路对准的光学照明。 探针孔根据由被测设备的表面上的一组电触点限定的第一图案来布置。 接口电路的表面包括根据第一图案布置的一组电触点和限定第二图案的一组对准标记。 因此,每个探针孔在被测器件的表面上具有相应的电接触,并且在接口电路的表面上具有相应的电接触。 对准孔根据第二图案布置,使得每个对准孔在接口电路的表面上具有对应的对准标记。