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    • 1. 发明授权
    • Foil trap device with improved heat resistance
    • 具有改善的耐热性的箔陷阱装置
    • US08721778B2
    • 2014-05-13
    • US13395450
    • 2010-09-14
    • Christof MetzmacherMichael SchaafPeter Klaus Bachmann
    • Christof MetzmacherMichael SchaafPeter Klaus Bachmann
    • B01D49/00G03F7/20
    • G03F7/70916G03F7/70166G03F7/70883G03F7/70958G03F7/70983Y10S977/778
    • The present invention relates to a foil trap device for debris mitigation, in particular in an EUV system. The foil trap comprises a plurality of spaced apart foils (4) extending from an entrance side towards an exit side of the foil trap, said foils (4) being arranged to allow a straight pass of radiation between the entrance side and the exit side. The foils (4) are coated at least at entrance side edges with a layer (8, 11) of a carbon material containing a fraction of at least 60% of sp3-hybridized carbon atoms, or with a layer (8, 11) of carbon nanotubes. As an alternative, the foils (4) are made of a bulk carbon material of the above composition. The proposed foil trap offers the combination of a high thermal conductivity, a high thermo-chemical resistance against Sn and other liquid metals and a high mechanical stiffness.
    • 本发明涉及一种用于碎片减轻的箔捕获装置,特别是在EUV系统中。 箔捕获器包括从箔捕获器的入口侧朝向出口侧延伸的多个间隔开的箔片(4),所述箔片(4)布置成允许入射侧和出射侧之间的直线辐射通过。 至少在入口侧缘处,将箔(4)涂覆至含有至少60%的sp 3杂化碳原子的分数的碳材料层(8,11),或者涂覆有层(8,11) 碳纳米管。 作为替代,箔(4)由上述组成的块状碳材料制成。 所提出的箔夹具提供高导热性,对Sn和其他液态金属的高耐热化学性和高机械刚度的组合。
    • 7. 发明申请
    • LINEAR ACTUATOR
    • 线性执行器
    • US20100213776A1
    • 2010-08-26
    • US12702423
    • 2010-02-09
    • Thomas MüllerAndreas KurtzKlaus Bachmann
    • Thomas MüllerAndreas KurtzKlaus Bachmann
    • H02K7/116
    • H02K5/15H02K1/145H02K1/185H02K5/1735H02K7/06H02K37/12
    • The invention relates to a linear actuator (1), at least including a stator (3) that is placed within a cartridge-like casing (2), a bearing ring (4) with a bearing seat for mounting a rotor (5) with an antifriction bearing (6), a spindle (7) that on its drive side (7.1) is together with the rotor (5) designed as motion transformer to transform the rotary motion into a translatory motion and a flange (9) that closes the casing (2) on the output side (8) of the linear actuator (1), the flange (9) being equipped with an anti-rotation locking device for the spindle output side (7.2) that penetrates the flange (9). According to the invention the cartridge-like casing (2) is provided with several formed bending tongues (10.1, 10.2), whereby in assembled condition first bending tongues (10.1) engage with groove-like recesses (11) of the bearing ring (4) of the antifriction bearing (6) and second bending tongues (10.2) engage with groove-like recesses (11) of the flange (9) so that all components (3, 4, 5, 7 and 9) placed in the casing are tensioned against each other without further connection techniques being required.
    • 本发明涉及一种线性致动器(1),其至少包括放置在盒状壳体(2)内的定子(3),具有用于安装转子(5)的轴承座的轴承环(4) 减速轴承(6),主体(7),其驱动侧(7.1)与设计成运动变换器的转子(5)一起转动,以将旋转运动转换成平移运动;以及凸缘(9),其关闭 壳体(2)在线性致动器(1)的输出侧(8)上,凸缘(9)配备有用于穿过凸缘(9)的主轴输出侧(7.2)的防旋转锁定装置。 根据本发明,筒状壳体(2)设置有多个成形的弯曲舌片(10.1,10.2),由此在组装状态下,第一弯曲舌片(10.1)与轴承环(4)的凹槽状凹部(11)接合 减速轴承(6)和第二弯曲舌片(10.2)的凸缘(9)的槽状凹部(11)接合,使得放置在壳体中的所有部件(3,4,5,7和9) 彼此张紧,不需要进一步的连接技术。