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1. 发明授权

US07011932B2 Polymer waveguide fabrication process 失效
公开(公告)号：US07011932B2
公开(公告)日：2006-03-14
申请号：US09846697
申请日：2001-05-01
申请人： Paul M. Ferm , Kevin Battell , Karl W. Beeson , Macrae Maxfield , Deepti Pant , Lawrence W. Shacklette
发明人： Paul M. Ferm , Kevin Battell , Karl W. Beeson , Macrae Maxfield , Deepti Pant , Lawrence W. Shacklette
IPC分类号： G02B6/10
CPC分类号： G02B6/1221 , G02B6/13
摘要： The invention relates to a process a process for forming single-mode, organic waveguides employing organic polymeric materials. The process reduces dissolved and gaseous oxygen content to very low quantities, resulting in production of waveguides having superior properties and manufacturability. Also provided is a process for preventing loss of light due to cores having flared ends. A waveguide is produced by sequentially a layer of a liquid, photosensitive buffer and clad composition to a surface of a substrate; deoxygenating under vacuum; overall exposing under an inert gas actinic radiation to partially polymerize the compositions below a full curing. Coating a photosensitive core composition to the clad composition; deoxygenating under vacuum, covering with an inert gas atmosphere; positioning a photomask above, but not in contact with the core layer; imagewise exposing the core through a photomask pattern to actinic radiation to partially polymerize the core composition; developing core; coating a photosensitive overclad composition over the image areas of the core composition; deoxygenating under vacuum; overall exposing the overclad composition, under inert gas to actinic radiation to substantially fully cure the optional buffer composition, the underclad composition, the core composition and the clad composition.

2. 发明授权

US06487354B1 Design of low insertion loss, single-mode polymeric waveguides 有权
标题翻译：低插入损耗单模聚合物波导的设计
公开(公告)号：US06487354B1
公开(公告)日：2002-11-26
申请号：US09846699
申请日：2001-05-01
申请人： Paul M. Ferm , Kevin Battell , Lawrence W. Shacklette
发明人： Paul M. Ferm , Kevin Battell , Lawrence W. Shacklette
IPC分类号： G02B610
CPC分类号： G02B6/1221 , G02B6/13 , G02B2006/12107
摘要： The invention provides organic optical waveguide devices which are lithographically formed and employ polymeric materials having low propagation loss. An optical waveguide has a substrate; a polymeric buffer layer on a surface of the substrate; a thin, polymeric undercladding layer on a surface of the buffer layer; a pattern of a light-transmissive, polymeric core on the surface of the undercladding layer; and a polymeric overcladding layer on a top surface of the core and on sidewalls of the core and on a portion of the undercladding layer; the undercladding layer having a thickness of from about 10 percent to about 50 percent a thickness of the core. The core has an index of refraction nc which is greater than an index of refraction of the overcladding layer no and also greater than an index of refraction of the undercladding layer nu; wherein &Dgr;n=nc−no, and wherein the difference between nc and the index of refraction of the buffer nb is at least about 1.5 times &Dgr;n.
摘要翻译：本发明提供了光刻形成的有机光波导器件，并且使用具有低传播损耗的聚合材料。光波导具有基板; 在所述基底的表面上的聚合物缓冲层; 在缓冲层的表面上的薄的聚合物底层; 在下包层的表面上的透光聚合物芯的图案; 以及在所述芯的顶表面和所述芯的侧壁上和所述下包层的一部分上的聚合物外包层; 所述下包层具有芯的厚度的约10％至约50％的厚度。芯的折射率nc大于外包层no的折射率，并且大于下包层nu的折射率; 其中DELTAn = nc-no，并且其中nc和缓冲器nb的折射率之间的差异是DELTAn的至少约1.5倍。

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