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1. 发明授权

US5702533A Particulate free vacuum compatible pinch seal 失效
标题翻译：颗粒自由真空兼容夹紧密封
公开(公告)号：US5702533A
公开(公告)日：1997-12-30
申请号：US672317
申请日：1996-06-28
申请人： Randall S. Mundt , Kenneth R. Krieg
发明人： Randall S. Mundt , Kenneth R. Krieg
IPC分类号： C23C14/56 , H01L21/677 , C23C16/00
CPC分类号： C23C14/564 , H01L21/67709 , Y10S414/135
摘要： A pinch seal in which particle generation by frictional contact is prevented so that the pinch seal can be used in a semiconductor processing apparatus where elimination of particulate contamination is desirable. The pinch seal is particularly adapted for use in connection with a semiconductor wafer transport device, such as a linear transport device. The pinch seal is formed in a barrier provided between a transport device and a semiconductor processing work environment. One or more support members for transporting a wafer extend through the pinch seal. In one embodiment, the pinch seal includes a flexible sealing member with a magnetic strip extending along the length of the flexible sealing member. A mechanism which does not physically contact the flexible sealing member, such as a device generating a magnetic field, is used to selectively open and close the flexible sealing member to prevent contact between the flexible sealing member and the support member passing through the flexible sealing member while retaining the isolating function of the shielding member.
摘要翻译：一种夹紧密封件，其中防止了通过摩擦接触产生颗粒，使得夹紧密封件可用于需要消除颗粒污染的半导体加工设备中。夹紧密封件特别适合于与半导体晶片输送装置（例如线性输送装置）结合使用。夹紧密封件形成在设置在传送装置和半导体处理工作环境之间的屏障中。用于运输晶片的一个或多个支撑构件延伸穿过夹紧密封件。在一个实施例中，夹紧密封件包括具有沿着柔性密封构件的长度延伸的磁条的柔性密封构件。使用不与柔性密封构件（例如产生磁场的装置）物理接触的机构来选择性地打开和关闭柔性密封构件，以防止柔性密封构件与穿过柔性密封构件的支撑构件之间的接触同时保持屏蔽构件的隔离功能。

2. 发明申请

US20190099315A1 DIFFERENTIAL AIR PRESSURE SYSTEMS AND METHODS OF USING AND CALIBRATING SUCH SYSTEMS FOR MOBILITY IMPAIRED USERS 审中-公开
公开(公告)号：US20190099315A1
公开(公告)日：2019-04-04
申请号：US15993136
申请日：2018-05-30
申请人： Eric Richard KUEHNE , Christopher LOEW , Glen R. MANGSETH , Kenneth R. KRIEG , David P. GRENEWETZKI , Clifford T. JUE , Trevor L. DONALD
发明人： Eric Richard KUEHNE , Christopher LOEW , Glen R. MANGSETH , Kenneth R. KRIEG , David P. GRENEWETZKI , Clifford T. JUE , Trevor L. DONALD
IPC分类号： A61H1/02 , A63B69/00 , A63B22/02 , A63B71/00 , A63B22/00 , A61H9/00
摘要： Described herein are various embodiments of differential air pressure systems and methods of using and calibration such systems for individuals with impaired mobility. The differential air pressure systems may include an access assist device configured to help a mobility impaired user to stand in a pressure chamber configured to apply a positive pressure on a portion of the user's body in the sealed pressure chamber. The system may also include load sensors configured to measure the user's weight exerted inside and outside the chamber. The system may be calibrated by determining a relationship between the actual weight of the user and the pressure in the chamber, where the actual weight of the user may be measured by more than one load sensor and at least one load sensor is not in the pressure chamber.

3. 发明申请

US20120238921A1 DIFFERENTIAL AIR PRESSURE SYSTEMS AND METHODS OF USING AND CALIBRATING SUCH SYSTEMS FOR MOBILITY IMPAIRED USERS 审中-公开
标题翻译：差分空气压力系统和使用和校准这些系统的机动车辆有害用户的方法
公开(公告)号：US20120238921A1
公开(公告)日：2012-09-20
申请号：US13423124
申请日：2012-03-16
申请人： Eric Richard Kuehne , Christopher Loew , Glen R. Mangseth , Kenneth R. Krieg , David P. Grenewetzki , Clifford T. Jue , Trevor L. Donald
发明人： Eric Richard Kuehne , Christopher Loew , Glen R. Mangseth , Kenneth R. Krieg , David P. Grenewetzki , Clifford T. Jue , Trevor L. Donald
IPC分类号： A61H1/02
CPC分类号： A61H1/0229 , A61H9/005 , A61H2201/0103 , A61H2201/0161 , A61H2201/0173 , A61H2201/1652 , A61H2201/5061 , A61H2201/5071 , A61H2201/5097 , A61H2203/0406 , A61H2203/0431 , A61H2230/80 , A63B22/0235 , A63B69/0064 , A63B71/0009 , A63B2022/0094 , A63B2071/0018 , A63B2208/053 , A63B2220/51 , A63B2225/50
摘要： Described herein are various embodiments of differential air pressure systems and methods of using and calibration such systems for individuals with impaired mobility. The differential air pressure systems may comprise an access assist device configured to help a mobility impaired user to stand in a pressure chamber configured to apply a positive pressure on a portion of the user's body in the seals pressure chamber. The system may further comprise load sensors configured to measure the user's weight exerted inside and outside the chamber. The system may be calibrated by determining a relationship between the actual weight of the user and the pressure in the chamber, where the actual weight of the user may be measured by more than one load sensor and at least one load sensor is not in the chamber.
摘要翻译：这里描述的是不同的气压系统的各种实施例，以及使用和校准这种系统对于具有受限的移动性的个人的方法。差动空气压力系统可以包括进入辅助装置，其被配置成帮助移动受损用户站在配置成在密封压力室中对用户身体的一部分施加正压力的压力室中。该系统还可以包括负载传感器，该负载传感器被配置为测量在室内和室外施加的使用者的重量。可以通过确定用户的实际重量与室内的压力之间的关系来校准系统，其中用户的实际重量可以由多于一个的负载传感器测量，并且至少一个负载传感器不在室中。

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