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    • 8. 发明授权
    • Wafer transfer device for a semiconductor device fabricating system
    • 用于半导体器件制造系统的晶片传送器件
    • US5147175A
    • 1992-09-15
    • US813665
    • 1991-12-27
    • Keishi Tada
    • Keishi Tada
    • B25J9/00B25J9/10B65G49/07H01L21/677
    • B25J9/107H01L21/67742Y10T74/18848Y10T74/1888
    • A semiconductor wafer transfer device includes a rotary member, a driving member which rotates coaxially with the rotary member, a driven member which is driven by the driving member and a frog leg linkage having a first link with an end fixed to the driving member, a second link with an end fixed to the driven member, a third link having an end pivotally joined to another end of the first link, and a fourth link having an end pivotally joined to the other end of the second link. A wafer support plate is supported on the other ends of the third and fourth links. An auxiliary escape mechanism is provided for moving the frog leg linkage out of its dead point. The mechanism includes a first pulley coaxillary fixed to the rotary member with the driving member, a second pulley rotatably supported on a pivot shaft pivotally joining the first and the third links, and a belt wound around the first and second pulleys. The radius of the first pulley is greater than the center distance between the driving member and the driven member. The diameter of the second pulley is smaller than that of the first pulley.
    • 一种半导体晶片传送装置,包括旋转构件,与旋转构件同轴旋转的驱动构件,由驱动构件驱动的从动构件和具有固定到驱动构件的端部的第一连杆的青蛙腿联动件, 第二连杆,其一端固定到所述从动构件,第三连杆具有枢转地连接到所述第一连杆的另一端的端部,以及第四连杆,所述第四连杆具有枢转地连接到所述第二连杆的另一端的端部。 晶片支撑板支撑在第三和第四连杆的另一端上。 提供了一种辅助逃逸机构,用于将青蛙腿联动件移出其死点。 所述机构包括:固定在所述旋转构件上的第一滑轮同轴驱动构件;可旋转地支撑在枢转地连接所述第一和第三连杆的枢转轴上的第二滑轮,以及卷绕在所述第一和第二滑轮周围的皮带。 第一滑轮的半径大于驱动构件和从动构件之间的中心距离。 第二滑轮的直径小于第一滑轮的直径。