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    • 3. 发明授权
    • Thin film magnetic head having thin film coil embedded in first insulating layer covered with second insulating layer
    • 薄膜磁头,其具有嵌入第一绝缘层中的第二绝缘层的薄膜线圈
    • US07061718B2
    • 2006-06-13
    • US10613073
    • 2003-07-07
    • Yoshitaka SasakiAtsushi IijimaKazumasa Fukuda
    • Yoshitaka SasakiAtsushi IijimaKazumasa Fukuda
    • G11B5/147
    • G11B5/3967G11B5/3116G11B5/313Y10T29/49032Y10T29/49044Y10T29/49046Y10T29/4906
    • On a first magnetic layer 27, is formed a ring-shaped insulating layer 28 whose air bearing surface side edge defines a reference position for a throat height, and after forming a write gap layer 29, a second magnetic layer 30 is formed such that the second magnetic layer extends over the ring-shaped insulating layer 28. The write gap layer is selectively removed by performing an etching process using the second magnetic layer as a mask, and then the first magnetic layer is partially removed over a part of its thickness to form a trim structure. After forming a thin film coil 33, 35 within the ring-shaped insulating layer, a third magnetic layer is formed to be brought into contact with a rear portion of the second magnetic layer 31. The third magnetic layer may be contacted with a surface, a surface and side walls or a surface, side walls and an end surface of rear portion of the second magnetic layer. In the thin film magnetic head, a pole chip defining a track width is narrow, magnetic flux saturation and leakage of magnetic flux can be suppressed in spite of a short throat height, and a high recording efficiency can be attained. The invention provides a method of manufacturing easily the thin film magnetic head having such superior performance with a high yield.
    • 在第一磁性层27上形成环形绝缘层28,其环形绝缘层28的空气轴承表面侧边缘限定了喉部高度的基准位置,并且在形成写入间隙层29之后,形成第二磁性层30, 第二磁性层在环形绝缘层28上延伸。通过使用第二磁性层作为掩模进行蚀刻工艺来选择性地去除写入间隙层,然后将第一磁性层的一部分厚度部分地去除, 形成一个装饰结构。 在环状绝缘层内形成薄膜线圈33,35之后,形成与第二磁性层31的后部接触的第三磁性层。第三磁性层可以与表面接触, 表面和侧壁或表面,侧壁和第二磁性层后部的端面。 在薄膜磁头中,限定磁道宽度的磁极芯片窄,尽管具有短的喉部高度,也可以抑制磁通饱和度和磁通量的泄漏,并且可以获得高的记录效率。 本发明提供一种以高产率容易地制造具有这种优异性能的薄膜磁头的方法。
    • 5. 发明授权
    • Thin film magnet head with improved performance
    • 薄膜磁头具有改进的性能
    • US6163436A
    • 2000-12-19
    • US103394
    • 1998-06-24
    • Yoshitaka SasakiAtsushi IijimaKazumasa Fukuda
    • Yoshitaka SasakiAtsushi IijimaKazumasa Fukuda
    • G11B5/31G11B5/39G11B5/147
    • G11B5/3967G11B5/3116G11B5/313G11B5/3163
    • After forming the first shield layer 23 on a basic substrate 21 and 22, a GMR film 25 is formed and embedded in the shield gap layers 24 and 26, in addition, a first insulation layer 28' where the edge defines a reference position of a throat height zero is formed on a first magnetic layer 27, a gap layer 28 is formed on a magnetic pole portion of the first magnetic layer 27 and the first insulation layer, then a second magnetic layer 29 extended above the first insulation layer 38' from the upper side of the magnetic pole portion of the first magnetic layer 27 is formed, after smoothing its surface by the second insulation layer 31, thin film coils 32 and 34 are formed on this second insulation layer, and the third magnetic layer 36 is formed on the insulation layers 33 and 35 where the magnetic pole portion and the thin film coil of the second above magnetic layer are isolated. In order to cancel the saturation of the magnetic flux in a magnetic pole portion effectively , and to prevent the widening of width the effective track and a decrease in the yield, the third above magnetic layer is made retreated from the air bearing surface, and is connected to rear a region from the magnetic pole portion of the second magnetic layer. A rear region of the magnetic pole portion of the second magnetic layer 29 is made in the shape of fan and connected to the third magnetic layer 36 over enough area so that the magnetic flux might not be saturated even when the tip portion of the upper pole is retreated from the air bearing surface.
    • 在基本基板21,22上形成第一屏蔽层23之后,形成GMR膜25并嵌入屏蔽间隙层24和26中,此外,第一绝缘层28'的边缘限定了基板的基准位置 在第一磁性层27上形成喉部高度零点,在第一磁性层27和第一绝缘层的磁极部上形成间隙层28,然后在第一绝缘层38'的上方延伸第二磁性层29 形成第一磁性层27的磁极部的上侧,在通过第二绝缘层31使其表面平滑化之后,在该第二绝缘层上形成有薄膜线圈32,34,形成第三磁性层36 在第二上述磁性层的磁极部分和薄膜线圈被隔离的绝缘层33和35上。 为了有效地消除磁极部分的磁通量的饱和,并且为了防止有效轨迹的宽度扩大和产量的降低,第三上述磁性层从空气轴承表面退避,并且是 连接到从第二磁性层的磁极部分的区域的后面。 第二磁性层29的磁极部的后部区域形成为风扇的形状,并且在第三磁性层36的足够的面积上连接,使得即使当上部极的顶端部分的磁通量也不会饱和 从空气轴承表面退回。
    • 6. 发明授权
    • Thin film magnetic head having upper pole chip formed over insulating
layer
    • 薄膜磁头具有形成在绝缘层上的上极芯片
    • US6130805A
    • 2000-10-10
    • US99461
    • 1998-06-18
    • Yoshitaka SasakiAtsushi IijimaKazumasa Fukuda
    • Yoshitaka SasakiAtsushi IijimaKazumasa Fukuda
    • G11B5/31G11B5/39G11B5/147
    • G11B5/3967G11B5/3116G11B5/313Y10T29/49032Y10T29/49044Y10T29/49046Y10T29/4906
    • On a first magnetic layer 27, is formed a ring-shaped insulating layer 28 whose air bearing surface side edge defines a reference position for a throat height, and after forming a write gap layer 29, a second magnetic layer 30 is formed such that the second magnetic layer extends over the ring-shaped insulating layer 28. The write gap layer is selectively removed by performing an etching process using the second magnetic layer as a mask, and then the first magnetic layer is partially removed over a part of its thickness to form a trim structure. After forming a thin film coil 33, 35 within the ring-shaped insulating layer, a third magnetic layer is formed to be brought into contact with a rear portion of the second magnetic layer 31. The third magnetic layer may be contacted with a surface, a surface and side walls or a surface, side walls and an end surface of rear portion of the second magnetic layer. In the thin film magnetic head, a pole chip defining a track width is narrow, magnetic flux saturation and leakage of magnetic flux can be suppressed in spite of a short throat height, and a high recording efficiency can be attained. The invention provides a method of manufacturing easily the thin film magnetic head having such superior performance with a high yield.
    • 在第一磁性层27上形成环形绝缘层28,其环形绝缘层28的空气轴承表面侧边缘限定了喉部高度的基准位置,并且在形成写入间隙层29之后,形成第二磁性层30, 第二磁性层在环形绝缘层28上延伸。通过使用第二磁性层作为掩模进行蚀刻工艺来选择性地去除写入间隙层,然后将第一磁性层的一部分厚度部分地去除, 形成一个装饰结构。 在环状绝缘层内形成薄膜线圈33,35之后,形成与第二磁性层31的后部接触的第三磁性层。第三磁性层可以与表面接触, 表面和侧壁或表面,侧壁和第二磁性层后部的端面。 在薄膜磁头中,限定磁道宽度的磁极芯片窄,尽管具有短的喉部高度,也可以抑制磁通饱和度和磁通量的泄漏,并且可以获得高的记录效率。 本发明提供一种以高产率容易地制造具有这种优异性能的薄膜磁头的方法。