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    • 2. 发明申请
    • CORROSION-RESISTANT MEMS COMPONENT AND METHOD FOR THE PRODUCTION THEREOF
    • 耐腐蚀MEMS组件及其生产方法
    • US20100207216A1
    • 2010-08-19
    • US12452426
    • 2008-06-27
    • Jürgen DrewsKarl-Ernst EhwaldKatrin Schulz
    • Jürgen DrewsKarl-Ernst EhwaldKatrin Schulz
    • H01L29/84H01L21/30
    • B81B7/0012G01N11/16
    • An MEMS component including a monolithically integrated electronic component with a multi-plane conductor track layer stack which is arranged on a substrate and into which is integrated a cantilevered elastically movable metallic actuator which is arranged in the multi-plane conductor track layer stack at the level of a conductor track plane and is connected by via contacts to conductor track planes which are arranged thereabove or therebeneath and which apart from an opening in the region of the actuator are separated from the conductor track plane of the actuator by a respective intermediate plane insulator layer, wherein the actuator is formed from a metallically conductive layer or layer combination which is resistant to corrosive liquids or gases and which contains titanium nitride or consists of titanium nitride.
    • 一种MEMS组件,包括具有多平面导体轨道层堆叠的单片集成电子部件,其布置在基板上并且集成有悬臂弹性可移动金属致动器,其布置在多平面导体轨道层堆叠中 的导体轨道平面,并且通过通孔触点连接到布置在其上方或其下方的导体轨道平面,并且除了致动器的区域中的开口之外,通过相应的中间平面绝缘体层与致动器的导体轨道平面分离 其中所述致动器由对腐蚀性液体或气体具有耐受氮化钛或由氮化钛组成的金属导电层或层组合形成。
    • 3. 发明授权
    • Corrosion-resistant MEMS component and method for the production thereof
    • 耐腐蚀MEMS元件及其制造方法
    • US08330237B2
    • 2012-12-11
    • US12452426
    • 2008-06-27
    • Jürgen DrewsKarl-Ernst EhwaldKatrin Schulz
    • Jürgen DrewsKarl-Ernst EhwaldKatrin Schulz
    • H01L29/84
    • B81B7/0012G01N11/16
    • An MEMS component including a monolithically integrated electronic component with a multi-plane conductor track layer stack which is arranged on a substrate and into which is integrated a cantilevered elastically movable metallic actuator which is arranged in the multi-plane conductor track layer stack at the level of a conductor track plane and is connected by via contacts to conductor track planes which are arranged thereabove or therebeneath and which apart from an opening in the region of the actuator are separated from the conductor track plane of the actuator by a respective intermediate plane insulator layer, wherein the actuator is formed from a metallically conductive layer or layer combination which is resistant to corrosive liquids or gases and which contains titanium nitride or consists of titanium nitride.
    • 一种MEMS组件,包括具有多平面导体轨道层堆叠的单片集成电子部件,其布置在基板上并且集成有悬臂弹性可移动金属致动器,其布置在多平面导体轨道层堆叠中 的导体轨道平面,并且通过通孔触点连接到布置在其上方或其下方的导体轨道平面,并且除了致动器的区域中的开口之外,通过相应的中间平面绝缘体层与致动器的导体轨道平面分离 其中所述致动器由对腐蚀性液体或气体具有耐受氮化钛或由氮化钛组成的金属导电层或层组合形成。