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    • 4. 发明授权
    • Apparatus and method for stamping a surface
    • 用于冲压表面的装置和方法
    • US5669303A
    • 1997-09-23
    • US610776
    • 1996-03-04
    • George N. MaracasLawrence N. DworskyKathleen Tobin
    • George N. MaracasLawrence N. DworskyKathleen Tobin
    • B41K3/02B05C1/02B05D1/18B05D1/28C40B60/14G03F7/00H01L21/027B41F31/00
    • B82Y30/00B05C1/027B05D1/185B05D1/28B05D1/283B82Y10/00B82Y40/00G03F7/0002B01J2219/00382C40B60/14
    • An apparatus (100) including a support structure (104), a flexible stamp (106) having a stamping surface (110) including a predetermined pattern disposed opposite the support structure (104), a pressure controlled chamber (112) disposed above the support structure (104), and a mechanical attachment (114) affixed to the flexible stamp (106). A method is provided for stamping the surface (101) of an article (102) including the steps of i) placing the article (102) on the support structure (104) within the pressure-controlled chamber (112), ii) wetting the stamping surface (110) with a solution containing a self-assembled monolayer-forming molecular species, iii) aligning alignment patterns (118) on the flexible stamp (106) with alignment patterns (124) on the surface (101) of the article (102), iv) controllably contacting the wetted stamping surface (110) with the surface (101) of the article (102) by changing the pressure differential across the flexible stamp (106) so that contact commences at the center of the flexible stamp (106) and proceeds outwardly in a controlled manner, and v) removing the stamping surface (110) from the surface (101) of the article so that a self-assembled monolayer (134) having the predetermined pattern is formed on the surface (101) of the article (102).
    • 一种包括支撑结构(104)的装置(100),具有包括与所述支撑结构(104)相对设置的预定图案的冲压表面的柔性印模(106),设置在所述支撑结构(104)上方的压力控制室 结构(104)和固定到柔性印模(106)上的机械附件(114)。 提供了一种用于冲压制品(102)的表面(101)的方法,包括以下步骤:i)将制品(102)放置在压力控制室(112)内的支撑结构(104)上,ii)润湿 用包含自组装单层形成分子种类的溶液冲压表面(110),iii)将柔性印模(106)上的对准图案(118)与制品的表面(101)上的对准图案(124)对准( 102),iv)通过改变柔性印章(106)上的压差来可控地将湿润的冲压表面(110)与制品(102)的表面(101)接触,使得在柔性印模的中心开始接触 106),并且以受控的方式向外移动,以及v)从制品的表面(101)移除冲压表面(110),使得在表面(101)上形成具有预定图案的自组装单层(134) )的物品(102)。