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    • 4. 发明授权
    • Method of forming a binary code of a ROM
    • 形成ROM的二进制码的方法
    • US6166943A
    • 2000-12-26
    • US421260
    • 1999-10-20
    • Ping-Ying WangChun-Yi YangChun-Jung LinJui-Chin ChangMam-Tsung Wang
    • Ping-Ying WangChun-Yi YangChun-Jung LinJui-Chin ChangMam-Tsung Wang
    • G11C17/10G11C17/00
    • G11C17/10
    • The present invention provides a method of writing a set of binary codes into a ROM. The method is performed by forming a first photo mask and a second photo mask according to an original first code pattern, an original second code pattern, and a set of binary codes to be written into the ROM. Final first and second code patterns are formed by coupling the binary codes to be written with the original first and second code patterns by using a Boolean logical OR operation. The first and second photo masks are formed according to the final first and second code patterns. The first photolithographic process is performed using the first photo mask, and the first ion implantation process is performed; the second photolithographic process is performed using the second photo mask, and the second ion implantation process is performed. Thus the set of binary codes is written into the ROM completely and correctly.
    • 本发明提供了将一组二进制码写入到ROM中的方法。 该方法通过根据原始第一代码图案,原始第二代码图案和要写入ROM的一组二进制代码形成第一光掩模和第二光掩模来执行。 最终的第一和第二代码模式通过使用布尔逻辑“或”运算来耦合待写入的二进制代码与原始的第一和第二代码模式而形成。 根据最终的第一和第二编码模式形成第一和第二光掩膜。 使用第一光掩模执行第一光刻工艺,并且执行第一离子注入工艺; 使用第二光掩模进行第二光刻工序,进行第二离子注入工序。 因此,二进制代码集完全正确地写入ROM中。