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    • 6. 发明授权
    • Robot arm edge gripping device for handling substrates using two four-bar linkages
    • 使用两个四杆连杆处理基板的机器人手臂边缘夹紧装置
    • US06623235B2
    • 2003-09-23
    • US10120673
    • 2002-04-11
    • Chuckson YokotaJoseph MannJean-Pascal RoulandMalek CharifTed Hwang
    • Chuckson YokotaJoseph MannJean-Pascal RoulandMalek CharifTed Hwang
    • B25J1500
    • H01L21/68707
    • An edge gripping device for a robot arm grips and ungrips substrates, such as semiconductor wafers. A base is fixed to an end of the robot arm. A blade, having a distal contact location thereon, and a pusher bar, having preferably two proximal contact locations thereon, are movably mounted to the base via a linkage mechanism. The linkage mechanism includes two four-bar linkages. The first four-bar linkage has a stationary link and three movable links connected in a parallelogram configuration. The pusher bar is fixed to one of the movable links of the first linkage for movement therewith. The second four-bar linkage has a stationary link and three movable links connected in a trapezoidal configuration. The blade is fixed to one of the movable links of the second linkage for movement therewith. The two linkages share a stationary pivot point. An actuator having one end fixed with respect to the first linkage and an opposite end fixed with respect to the second linkage is operative to move the first linkage and the second linkage. The proximal contact location moves substantially horizontally and the distal contact location moves vertically and horizontally.
    • 用于机器人手臂的边缘夹紧装置夹住并脱离诸如半导体晶片的衬底。 基座固定在机器人手臂的一端。 在其上具有远端接触位置的叶片和其上具有优选地两个近端接触位置的推杆通过连杆机构可移动地安装到基座。 连杆机构包括两个四杆连杆。 第一个四杆联动装置具有固定连杆和三个以平行四边形配置连接的可移动连杆。 推杆固定到第一连杆的可移动连杆中的一个以与其一起运动。 第二个四杆联动装置具有固定连杆和三个以梯形构造连接的可移动连杆。 刀片被固定到第二连杆的可移动连杆中的一个以与其一起运动。 两个联动共享一个固定的枢轴点。 具有相对于第一连杆固定的一端和相对于第二连杆固定的相对端的致动器可操作以移动第一连杆机构和第二连杆机构。 近端接触位置大致水平移动,远端接触位置垂直和水平移动。