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    • 7. 发明授权
    • Non-tilting plate actuator for use in a micropositioning device
    • 用于微型定位装置的非倾斜板致动器
    • US5693997A
    • 1997-12-02
    • US599570
    • 1996-02-09
    • Joseph E. GriffithRafael N. Kleiman
    • Joseph E. GriffithRafael N. Kleiman
    • G01B7/34G01N13/00G01N27/00G01Q10/04H01J37/20H01L41/09H02N2/02H02N2/00H01L41/08
    • G01Q10/04B82Y35/00H01L41/0953H01L41/096H02N2/028
    • A non-tilting positioner for a micropositioning device constructed of piezoelectric plate actuators each arranged with a pair of opposed parallel edges respectively coupled to first and second elements. A first surface of each plate is divided into quadrants, with first electrodes in each of the quadrants. At least one second electrode is provided on the opposed surface. Electric voltages are applied to the first and second electrodes with appropriate polarities so as to generate an electric field through the thickness of the plate which is of a first polarity in a first pair of diagonally opposite quadrants and is of the opposite polarity in the second pair of diagonally opposite quadrants. Movement along a line parallel to the plane of the plate is thereby effected. Movement in a third orthogonal direction can also be attained by selecting an appropriate electrode pattern. A compact design with double the range is attained by providing at least two of the aforedescribed actuators which are arranged with their plates in parallel or coplanar relation to each other, with a rigid intermediate element being coupled to one end of each of the actuator plates. This "doubling back" of the plates is inherently thermally compensated and eliminates parasitic vertical motion associated with the desired horizontal motion.
    • 一种用于由压电板致动器构成的微定位装置的非倾斜定位器,每个压电板致动器均布置有分别联接到第一和第二元件的一对相对的平行边缘。 每个板的第一表面被分成象限,每个象限中具有第一电极。 在相对表面上设置至少一个第二电极。 以适当的极性将电压施加到第一和第二电极,以便通过在第一对斜面相对象限中具有第一极性的板的厚度产生电场,并且在第二对中具有相反极性的电场 的对角相对的象限。 从而平行于板的平面的线移动。 也可以通过选择合适的电极图案来实现第三正交方向的移动。 通过提供至少两个上述致动器来实现具有两倍范围的紧凑设计,所述至少两个致动器以它们的板彼此平行或共面的关系布置,刚性中间元件联接到每个致动器板的一端。 板的“加倍”是固有的热补偿,并消除与期望的水平运动相关联的寄生垂直运动。