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    • 7. 发明授权
    • High voltage transistors
    • 高压晶体管
    • US07705409B2
    • 2010-04-27
    • US12014244
    • 2008-01-15
    • Oh-kyum KwonYong-chan KimJoon-suk OhMyung-hee KimHye-young Park
    • Oh-kyum KwonYong-chan KimJoon-suk OhMyung-hee KimHye-young Park
    • H01L29/78
    • H01L29/78H01L29/0653H01L29/0692H01L29/66568
    • Some embodiments of the present invention provide high voltage transistors including a semiconductor substrate and a device isolation film defining an active region in the semiconductor substrate. A gate electrode extends along a central portion of the active region while maintaining a predetermined width on the semiconductor substrate. A second well is formed on both sides of the gate electrode in the semiconductor substrate, and partially extends to a bottom surface of the device isolation film. The active region in the semiconductor substrate comprises a first active region disposed under the gate electrode, and separating the device isolation film and a second active region defined by the first active region and the device isolation film. Methods of manufacturing high voltage transistors are also provided.
    • 本发明的一些实施例提供了包括半导体衬底和限定半导体衬底中的有源区的器件隔离膜的高压晶体管。 栅电极沿着有源区的中心部分延伸,同时保持半导体衬底上的预定宽度。 第二阱形成在半导体衬底中的栅电极的两侧,并且部分地延伸到器件隔离膜的底表面。 半导体衬底中的有源区域包括设置在栅电极下方的第一有源区,以及分离器件隔离膜和由第一有源区和器件隔离膜限定的第二有源区。 还提供制造高压晶体管的方法。
    • 8. 发明申请
    • High Voltage Transistors
    • 高压晶体管
    • US20080185664A1
    • 2008-08-07
    • US12014244
    • 2008-01-15
    • Oh-kyum KwonYong-chan KimJoon-suk OhMyung-hee KimHye-young Park
    • Oh-kyum KwonYong-chan KimJoon-suk OhMyung-hee KimHye-young Park
    • H01L29/78
    • H01L29/78H01L29/0653H01L29/0692H01L29/66568
    • Some embodiments of the present invention provide high voltage transistors including a semiconductor substrate and a device isolation film defining an active region in the semiconductor substrate. A gate electrode extends along a central portion of the active region while maintaining a predetermined width on the semiconductor substrate. A second well is formed on both sides of the gate electrode in the semiconductor substrate, and partially extends to a bottom surface of the device isolation film. The active region in the semiconductor substrate comprises a first active region disposed under the gate electrode, and separating the device isolation film and a second active region defined by the first active region and the device isolation film. Methods of manufacturing high voltage transistors are also provided.
    • 本发明的一些实施例提供了包括半导体衬底和限定半导体衬底中的有源区的器件隔离膜的高压晶体管。 栅电极沿着有源区的中心部分延伸,同时保持半导体衬底上的预定宽度。 第二阱形成在半导体衬底中的栅电极的两侧,并且部分地延伸到器件隔离膜的底表面。 半导体衬底中的有源区域包括设置在栅电极下方的第一有源区,以及分离器件隔离膜和由第一有源区和器件隔离膜限定的第二有源区。 还提供制造高压晶体管的方法。